JPH0187154U - - Google Patents
Info
- Publication number
- JPH0187154U JPH0187154U JP1987183157U JP18315787U JPH0187154U JP H0187154 U JPH0187154 U JP H0187154U JP 1987183157 U JP1987183157 U JP 1987183157U JP 18315787 U JP18315787 U JP 18315787U JP H0187154 U JPH0187154 U JP H0187154U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- introduction pipe
- tip
- center
- inert gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987183157U JPH0187154U (ko) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987183157U JPH0187154U (ko) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187154U true JPH0187154U (ko) | 1989-06-08 |
Family
ID=31474589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987183157U Pending JPH0187154U (ko) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187154U (ko) |
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1987
- 1987-12-01 JP JP1987183157U patent/JPH0187154U/ja active Pending