JPH0187857U - - Google Patents
Info
- Publication number
- JPH0187857U JPH0187857U JP18552887U JP18552887U JPH0187857U JP H0187857 U JPH0187857 U JP H0187857U JP 18552887 U JP18552887 U JP 18552887U JP 18552887 U JP18552887 U JP 18552887U JP H0187857 U JPH0187857 U JP H0187857U
- Authority
- JP
- Japan
- Prior art keywords
- stamper
- polishing
- holding
- polishing table
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Manufacturing Optical Record Carriers (AREA)
Description
第１図は本考案の一実施例を示す縦断面図、第
２図は従来の一例を示す斜視図である。
１……スタンパ、２……スタンパ研磨用ホルダ
、３……プレシヤープレート、４……研磨剤、５
……研磨テーブル、６……研磨クロス、７……供
給ノズル、８……シリンダ、１１……スタンパ中
心穴、１２……滴下ノズル。
FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, and FIG. 2 is a perspective view showing a conventional example. 1... Stamper, 2... Stamper polishing holder, 3... Pressure plate, 4... Abrasive, 5
... Polishing table, 6 ... Polishing cloth, 7 ... Supply nozzle, 8 ... Cylinder, 11 ... Stamper center hole, 12 ... Dripping nozzle.
Claims (1)
パを保持するための保持手段と、前記スタンパに
一定の加工圧を加えるための加圧手段と、研磨剤
を前記スタンパの中心穴から前記研磨テーブル上
に供給するための供給手段とを含むことを特徴と
するスタンパ研磨装置。 A rotation means for rotating a polishing table, a holding means for holding a stamper, a pressure means for applying a constant processing pressure to the stamper, and an abrasive is supplied onto the polishing table from a center hole of the stamper. A stamper polishing apparatus comprising: a supply means for polishing a stamper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18552887U JPH0187857U (en) | 1987-12-04 | 1987-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18552887U JPH0187857U (en) | 1987-12-04 | 1987-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187857U true JPH0187857U (en) | 1989-06-09 |
Family
ID=31476842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18552887U Pending JPH0187857U (en) | 1987-12-04 | 1987-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187857U (en) |
-
1987
- 1987-12-04 JP JP18552887U patent/JPH0187857U/ja active Pending