JPH0188457U - - Google Patents
Info
- Publication number
- JPH0188457U JPH0188457U JP1987184027U JP18402787U JPH0188457U JP H0188457 U JPH0188457 U JP H0188457U JP 1987184027 U JP1987184027 U JP 1987184027U JP 18402787 U JP18402787 U JP 18402787U JP H0188457 U JPH0188457 U JP H0188457U
- Authority
- JP
- Japan
- Prior art keywords
- support shaft
- base
- uniaxial
- tilting table
- tilting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000013507 mapping Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は本考案に係るマツピング用試料ステー
ジの正面図、第２図は第１図の―線に沿う断
面図、第３図は励起ビームの試料表面に対する入
射角の関係を示す説明図である。
１……マツピング用試料ステージ、６……基台
、１４……一軸移動機構、１６……支軸、１８…
…傾斜台、２２……傾斜駆動機構、２８……試料
、３２……上下調節機構、３４……試料ホルダ。
Fig. 1 is a front view of the mapping sample stage according to the present invention, Fig. 2 is a sectional view taken along the line - in Fig. 1, and Fig. 3 is an explanatory diagram showing the relationship of the incident angle of the excitation beam to the sample surface. be. DESCRIPTION OF SYMBOLS 1... Sample stage for mapping, 6... Base, 14... Uniaxial movement mechanism, 16... Support shaft, 18...
... tilting table, 22 ... tilting drive mechanism, 28 ... sample, 32 ... vertical adjustment mechanism, 34 ... sample holder.
Claims (1)
軸移動機構が連接される一方、前記基台上には基
台の移動方向に沿つて支軸が配置され、この支軸
の一端には傾斜台が固定され、支軸の他端にはこ
の傾斜台を前記一軸移動機構の動作に同期して傾
斜させる傾斜駆動機構が取り付けられ、前記傾斜
台上には上下調節機構を介して試料ホルダが設け
られていることを特徴とするマツピング用試料ス
テージ。 A uniaxial movement mechanism for moving the base along a uniaxial direction is connected to the base, and a support shaft is arranged on the base along the movement direction of the base, and one end of this support shaft has a A tilting table is fixed, and a tilting drive mechanism is attached to the other end of the support shaft to tilt the tilting table in synchronization with the operation of the uniaxial movement mechanism, and a sample holder is mounted on the tilting table via a vertical adjustment mechanism. A sample stage for mapping, characterized by being provided with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987184027U JPH0188457U (en) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987184027U JPH0188457U (en) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0188457U true JPH0188457U (en) | 1989-06-12 |
Family
ID=31475417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987184027U Pending JPH0188457U (en) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0188457U (en) |
-
1987
- 1987-12-01 JP JP1987184027U patent/JPH0188457U/ja active Pending