JPH0189739U - - Google Patents
Info
- Publication number
- JPH0189739U JPH0189739U JP18508887U JP18508887U JPH0189739U JP H0189739 U JPH0189739 U JP H0189739U JP 18508887 U JP18508887 U JP 18508887U JP 18508887 U JP18508887 U JP 18508887U JP H0189739 U JPH0189739 U JP H0189739U
- Authority
- JP
- Japan
- Prior art keywords
- pressurized oxidation
- opening
- gas
- oxidation apparatus
- pressure vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は、この考案の第１実施例を示す正面図
、第２図は、第１図の側面図、第３図は、ガス管
の拡大断面図、第４図は、第２実施例を示す断面
図で第４図に相当する図、第５図は、第３実施例
を示す側面図で、第２図に相当する図第６図は、
第４実施例を示す側面図で、第２図に相当する図
である。
１……圧力容器、１ａ……開口部、２……反応
管、２ａ……開口部、３，４……吹き出し治具。
Fig. 1 is a front view showing the first embodiment of this invention, Fig. 2 is a side view of Fig. 1, Fig. 3 is an enlarged sectional view of the gas pipe, and Fig. 4 is a second embodiment. FIG. 5 is a side view showing the third embodiment, and FIG. 6 is a sectional view corresponding to FIG.
It is a side view which shows 4th Example, and is a figure corresponded to FIG. 2. 1... Pressure vessel, 1a... Opening, 2... Reaction tube, 2a... Opening, 3, 4... Blowing jig.
Claims (1)
の開口部と反応管の開口部の少なくとも一方の開
口部に、不活性ガスカーテン形成手段を設けたこ
とを特徴とする加圧酸化装置。 (2) 不活性ガスカーテン形成手段が、不活性ガ
ス吹き出し治具であることを特徴とする実用新案
登録請求の範囲第１項記載の加圧酸化炉。 (3) 前記吹き出し治具が、圧力容器の開口部に
設けられていることを特徴とする実用新案登録請
求の範囲第２項記載の加圧酸化装置。 (4) 前記吹き出し治具が、反応管の開口部に設
けられていることを特徴とする実用新案登録請求
の範囲第２項記載の加圧酸化装置。 (5) 前記吹き出し治具が、圧力容器の開口部と
、反応管の開口部に設けられていることを特徴と
する実用新案登録請求の範囲第２項記載の加圧酸
化装置。 (6) 圧力容器の開口部と反応管の開口部に設け
られた吹き出し治具が、互いに対向して設けられ
ていることを特徴とする実用新案登録請求の範囲
第５項記載の加圧酸化装置。 (7) 前記吹き出し治具が、ガス供給口とガス噴
射口とを備えたガス管であることを特徴とする実
用新案登録請求の範囲第２項記載の加圧酸化装置
。 (8) ガス供給口が、ガス管の中央に設けられて
いることを特徴とする実用新案登録請求の範囲第
７項記載の加圧酸化装置。 (9) ガス供給口が、ガス管の両端部に設けられ
ていることを特徴とする実用新案登録請求の範囲
第７項記載の加圧酸化装置。 (10) ガス噴射口が、孔であることを特徴とする
実用新案登録請求の範囲第７項記載の加圧酸化装
置。 〓(11)１１〓 ガス噴射口が、スリツトであるこ
とを特徴とする実用新案登録請求の範囲第７項記
載の加圧酸化装置。 〓(12)１２〓 ガス管が、円弧状であることを特
徴とする実用新案登録請求の範囲第７項記載の加
圧酸化装置。[Claims for Utility Model Registration] (1) A reaction tube is disposed within a pressure vessel, and an inert gas curtain forming means is provided at at least one of the opening of the pressure vessel and the opening of the reaction tube. A pressurized oxidation device characterized by: (2) The pressurized oxidation furnace according to claim 1, wherein the inert gas curtain forming means is an inert gas blowing jig. (3) The pressurized oxidation apparatus according to claim 2, wherein the blowing jig is provided at an opening of a pressure vessel. (4) The pressurized oxidation apparatus according to claim 2, wherein the blowing jig is provided at an opening of a reaction tube. (5) The pressurized oxidation apparatus according to claim 2, wherein the blowing jig is provided at an opening of a pressure vessel and an opening of a reaction tube. (6) Pressurized oxidation according to claim 5 of the utility model registration, characterized in that the blowing jigs provided at the opening of the pressure vessel and the opening of the reaction tube are provided facing each other. Device. (7) The pressurized oxidation apparatus according to claim 2, wherein the blowing jig is a gas pipe having a gas supply port and a gas injection port. (8) The pressurized oxidation apparatus according to claim 7, wherein the gas supply port is provided at the center of the gas pipe. (9) The pressurized oxidation apparatus according to claim 7, wherein the gas supply ports are provided at both ends of the gas pipe. (10) The pressurized oxidation device according to claim 7, wherein the gas injection port is a hole. (11) 11 The pressurized oxidation apparatus according to claim 7, wherein the gas injection port is a slit. (12) 12 The pressurized oxidation apparatus according to claim 7, wherein the gas pipe has an arc shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18508887U JPH0189739U (en) | 1987-12-04 | 1987-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18508887U JPH0189739U (en) | 1987-12-04 | 1987-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189739U true JPH0189739U (en) | 1989-06-13 |
Family
ID=31476416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18508887U Pending JPH0189739U (en) | 1987-12-04 | 1987-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189739U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61198717A (en) * | 1985-02-28 | 1986-09-03 | Mitsubishi Electric Corp | Chemical vapor phase growth device |
| JPS6224630A (en) * | 1985-07-24 | 1987-02-02 | Mitsubishi Electric Corp | Formation of thermal oxidation film and device therefor |
-
1987
- 1987-12-04 JP JP18508887U patent/JPH0189739U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61198717A (en) * | 1985-02-28 | 1986-09-03 | Mitsubishi Electric Corp | Chemical vapor phase growth device |
| JPS6224630A (en) * | 1985-07-24 | 1987-02-02 | Mitsubishi Electric Corp | Formation of thermal oxidation film and device therefor |
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