JPH0189952U - - Google Patents
Info
- Publication number
- JPH0189952U JPH0189952U JP18636987U JP18636987U JPH0189952U JP H0189952 U JPH0189952 U JP H0189952U JP 18636987 U JP18636987 U JP 18636987U JP 18636987 U JP18636987 U JP 18636987U JP H0189952 U JPH0189952 U JP H0189952U
- Authority
- JP
- Japan
- Prior art keywords
- cluster
- organic
- ion
- accelerating electrode
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
- 239000011368 organic material Substances 0.000 claims 2
- 239000005416 organic matter Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Coating Apparatus (AREA)
Description
図面は本考案の一実施例にかかる有機物用イオ
ンクラスターガンを示す概念図である。
図面中、１は有機物、２は有機物質蒸気、３は
有機物クラスター発生炉、４はリペラー、５はク
ラスター、６はイオン化電子発生源、７はイオン
化電子加速電極、８は電子ビーム、９はクラスタ
ー加速電極、１０はイオンクラスター、１１は輻
射熱遮蔽板、１２は絶縁物小片、１３は固定ねじ
、１４は基板、１５は位置調整治具である。
The drawing is a conceptual diagram showing an ion cluster gun for organic substances according to an embodiment of the present invention. In the drawings, 1 is an organic substance, 2 is an organic substance vapor, 3 is an organic cluster generator, 4 is a repeller, 5 is a cluster, 6 is an ionization electron source, 7 is an ionization electron accelerating electrode, 8 is an electron beam, and 9 is a cluster Accelerator electrode, 10 is an ion cluster, 11 is a radiation heat shielding plate, 12 is an insulator small piece, 13 is a fixing screw, 14 is a substrate, and 15 is a position adjustment jig.
Claims (1)
材料であるクラスターに、イオン化電子発生源か
ら発生した電子をイオン化電子加速電極によつて
加速させて衝突させることによりイオン化し、こ
のイオンクラスターをクラスター加速電極によつ
て加速して基板に堆積させ、有機薄膜とする有機
物用イオンクラスターガンにおいて、前記イオン
化電子発生源、前記イオン化電子加速電極よりも
低電位に設定される前記有機物クラスター発生炉
へ逆行する前記イオンクラスターを追い返すリペ
ラーを前記クラスター発生炉と前記イオン化電子
発生源、イオン化電子加速電極の間に設けると共
に前記イオンクラスターのみを通過させ、前記イ
オン化電子発生源から前記基板へ入射する輻射熱
を遮蔽する輻射熱遮蔽板を設け、更に上記各部材
の間隔を任意に設定する複数の絶縁小片からなる
位置調整治具を設けたことを特徴とする有機物用
イオンクラスターガン。 (2) 前記クラスター加速電極は冷却装置を具え
ることを特徴とする実用新案登録請求の範囲第１
項記載の有機物用イオンクラスターガン。[Scope of Claim for Utility Model Registration] (1) ionization by accelerating electrons generated from an ionization electron generation source with an ionization electron accelerating electrode and colliding with clusters, which are organic materials ejected from an organic cluster generator. , an ion cluster gun for organic substances in which the ion clusters are accelerated by a cluster accelerating electrode and deposited on a substrate to form an organic thin film; A repeller is provided between the cluster generating furnace, the ionized electron generating source, and the ionized electron accelerating electrode to repel the ion clusters traveling back to the organic matter cluster generating furnace, and allows only the ion clusters to pass through, and the repeller is disposed between the cluster generating furnace, the ionized electron generating source, and the ionized electron accelerating electrode. An ion cluster gun for organic substances, characterized in that a radiant heat shielding plate is provided to shield radiant heat incident on the organic material, and a position adjustment jig consisting of a plurality of insulating small pieces is further provided to arbitrarily set the intervals between the respective members. (2) Utility model registration claim 1, characterized in that the cluster accelerating electrode is provided with a cooling device.
Ion cluster gun for organic matter as described in .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18636987U JPH0189952U (en) | 1987-12-09 | 1987-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18636987U JPH0189952U (en) | 1987-12-09 | 1987-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189952U true JPH0189952U (en) | 1989-06-13 |
Family
ID=31477599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18636987U Pending JPH0189952U (en) | 1987-12-09 | 1987-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189952U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60255971A (en) * | 1984-05-30 | 1985-12-17 | Mitsubishi Electric Corp | Thin film forming equipment |
-
1987
- 1987-12-09 JP JP18636987U patent/JPH0189952U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60255971A (en) * | 1984-05-30 | 1985-12-17 | Mitsubishi Electric Corp | Thin film forming equipment |
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