JPH0191267U - - Google Patents

Info

Publication number
JPH0191267U
JPH0191267U JP18750087U JP18750087U JPH0191267U JP H0191267 U JPH0191267 U JP H0191267U JP 18750087 U JP18750087 U JP 18750087U JP 18750087 U JP18750087 U JP 18750087U JP H0191267 U JPH0191267 U JP H0191267U
Authority
JP
Japan
Prior art keywords
cavity
dew condensation
measuring section
prevention device
condensation prevention
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18750087U
Other languages
Japanese (ja)
Other versions
JPH075425Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987187500U priority Critical patent/JPH075425Y2/en
Publication of JPH0191267U publication Critical patent/JPH0191267U/ja
Application granted granted Critical
Publication of JPH075425Y2 publication Critical patent/JPH075425Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の平面図（断面図）を示してお
り、第２図は従来の測定部に於ける結露防止構造
の平面図（断面図）を示している。 １；ＩＣソケツト、２；ケツトボード、３；コ
ンタクトボード、４；スペーシングフレーム、５
；エア継手、６；空洞部、７；ケーブル、８；シ
ール材、９；恒温槽壁部、１０；テストヘツド、
１１；ベース、１２；エアノズル。 FIG. 1 shows a plan view (cross-sectional view) of the present invention, and FIG. 2 shows a plan view (cross-sectional view) of a conventional dew condensation prevention structure in a measuring section. 1; IC socket, 2; Butt board, 3; Contact board, 4; Spacing frame, 5
; air joint, 6; cavity, 7; cable, 8; sealing material, 9; constant temperature chamber wall, 10; test head,
11; base; 12; air nozzle.

Claims (1)

【実用新案登録請求の範囲】 (1) 被試験ＩＣがセツトされるソケツトボード
と、テストヘツドに接続されるコンタクトボード
との間に供給された気体を一定時間停留させるた
めの空洞部が形成されていることを特徴とする測
定部の結露防止装置。 (2) 空洞部に供給された気体が、コンタクトボ
ードに形成された小孔より排出されることを特徴
とする実用新案登録請求の範囲第１項記載の測定
部の結露防止装置。[Claims for Utility Model Registration] (1) A cavity is formed between the socket board on which the IC under test is set and the contact board connected to the test head for retaining the supplied gas for a certain period of time. A dew condensation prevention device for a measuring section, which is characterized by: (2) The dew condensation prevention device for a measuring section according to claim 1, wherein the gas supplied to the cavity is discharged through a small hole formed in the contact board.
JP1987187500U 1987-12-09 1987-12-09 Condensation preventive device for measuring part Expired - Lifetime JPH075425Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987187500U JPH075425Y2 (en) 1987-12-09 1987-12-09 Condensation preventive device for measuring part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987187500U JPH075425Y2 (en) 1987-12-09 1987-12-09 Condensation preventive device for measuring part

Publications (2)

Publication Number Publication Date
JPH0191267U true JPH0191267U (en) 1989-06-15
JPH075425Y2 JPH075425Y2 (en) 1995-02-08

Family

ID=31478648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987187500U Expired - Lifetime JPH075425Y2 (en) 1987-12-09 1987-12-09 Condensation preventive device for measuring part

Country Status (1)

Country Link
JP (1) JPH075425Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03126052U (en) * 1990-04-02 1991-12-19
JPH0464780U (en) * 1990-10-15 1992-06-03

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014011373A (en) * 2012-07-02 2014-01-20 Tokyo Electron Ltd Semiconductor inspection system and method for preventing dew condensation of interface part

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS613450U (en) * 1984-06-13 1986-01-10 オリオン機械株式会社 Constant temperature environmental test equipment
JPS62163982A (en) * 1986-01-14 1987-07-20 Mitsubishi Electric Corp Low temperature measuring apparatus of integrated circuit apparatus
JPS6453977U (en) * 1987-09-30 1989-04-03

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS613450U (en) * 1984-06-13 1986-01-10 オリオン機械株式会社 Constant temperature environmental test equipment
JPS62163982A (en) * 1986-01-14 1987-07-20 Mitsubishi Electric Corp Low temperature measuring apparatus of integrated circuit apparatus
JPS6453977U (en) * 1987-09-30 1989-04-03

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03126052U (en) * 1990-04-02 1991-12-19
JPH0464780U (en) * 1990-10-15 1992-06-03

Also Published As

Publication number Publication date
JPH075425Y2 (en) 1995-02-08

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