JPH0192153U - - Google Patents
Info
- Publication number
- JPH0192153U JPH0192153U JP18763787U JP18763787U JPH0192153U JP H0192153 U JPH0192153 U JP H0192153U JP 18763787 U JP18763787 U JP 18763787U JP 18763787 U JP18763787 U JP 18763787U JP H0192153 U JPH0192153 U JP H0192153U
- Authority
- JP
- Japan
- Prior art keywords
- light
- photocurrent
- outputting
- detection signal
- determining means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図ａ，ｂ第２図は第１の実施例を説明する
もので、第１図ａがＰＳＤの平面図、第１図ｂが
そのｂ―ｂ線断面図、第２図がその出力処理回路
のブロツク図である。第３図および第４図は第２
の実施例を説明するもので、第３図が第１図ｂに
相当する図、第４図が出力処理回路のブロツク図
である。第５図および第６図は従来のＰＳＤを説
明するもので、第５図がｘ軸方向断面図、第６図
がその―線断面図である。
１，１１：Ｐ形シリコン基板、２，１２：Ｎ＋
埋込層、３，１３：Ｎ−エピタキシヤル層、４，
１４：Ｐ＋素子分離拡散領域、５，１５：Ｐ形拡
散領域、６，１６：Ｐ形高抵抗領域、７，１７：
Ｎ＋拡散領域、８，１８：ＳｉＯ２膜、９，１９
：電極、２０：カレントミラー回路、２１：加算
器、２２：判定回路、２３：スイツチ、２４：出
力信号、２５：共通出力端子。
Figure 1 a, b Figure 2 explains the first embodiment, where Figure 1 a is a plan view of the PSD, Figure 1 b is a sectional view taken along line bb--2, and Figure 2 is its output. FIG. 3 is a block diagram of a processing circuit. Figures 3 and 4 are
FIG. 3 is a diagram corresponding to FIG. 1b, and FIG. 4 is a block diagram of the output processing circuit. 5 and 6 illustrate a conventional PSD, in which FIG. 5 is a cross-sectional view in the x-axis direction, and FIG. 6 is a cross-sectional view along the line -. 1, 11: P-type silicon substrate, 2, 12: N +
Buried layer, 3, 13: N - epitaxial layer, 4,
14: P + element isolation diffusion region, 5, 15: P type diffusion region, 6, 16: P type high resistance region, 7, 17:
N + diffusion region, 8, 18: SiO 2 film, 9, 19
: electrode, 20: current mirror circuit, 21: adder, 22: determination circuit, 23: switch, 24: output signal, 25: common output terminal.
Claims (1)
射光量に応じた光電流を生ぜしめる複数の帯状の
受光素子と、 該各受光素子の長さ方向の両端に形成され照射
光の受光素子上の位置に応じた分配比で前記光電
流を分割して取り出す各一対の電極と、 前記各受光素子に対応して設けられ、前記各受
光素子の光電流を基準値と比較し、光電流が大き
いときに検出信号を出力する判定手段と、 前記検出信号に応答して受光素子の各電極に出
力する第一の電流と第二の電流を各受光素子の電
極ごとに共通な出力端子にそれぞれ取出すスイツ
チ手段とを備えたことを特徴とする半導体光位置
検出装置。[Scope of Utility Model Registration Claim] A plurality of band-shaped light-receiving elements that are arranged in parallel on one main surface of a semiconductor substrate and generate a photocurrent according to the amount of light irradiated from a light source, and both longitudinal ends of each of the light-receiving elements. a pair of electrodes formed to divide and take out the photocurrent at a distribution ratio according to the position of the irradiated light on the light receiving element; determining means for comparing with a reference value and outputting a detection signal when the photocurrent is large; and determining means for outputting a detection signal when the photocurrent is large; 1. A semiconductor optical position detection device characterized by comprising switch means for taking out respective electrodes to a common output terminal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18763787U JPH0192153U (en) | 1987-12-09 | 1987-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18763787U JPH0192153U (en) | 1987-12-09 | 1987-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0192153U true JPH0192153U (en) | 1989-06-16 |
Family
ID=31478776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18763787U Pending JPH0192153U (en) | 1987-12-09 | 1987-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0192153U (en) |
-
1987
- 1987-12-09 JP JP18763787U patent/JPH0192153U/ja active Pending
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