JPH0192651U - - Google Patents
Info
- Publication number
- JPH0192651U JPH0192651U JP18908587U JP18908587U JPH0192651U JP H0192651 U JPH0192651 U JP H0192651U JP 18908587 U JP18908587 U JP 18908587U JP 18908587 U JP18908587 U JP 18908587U JP H0192651 U JPH0192651 U JP H0192651U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- spinner chuck
- resist material
- irregularly shaped
- spinner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18908587U JPH0192651U (mo) | 1987-12-11 | 1987-12-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18908587U JPH0192651U (mo) | 1987-12-11 | 1987-12-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0192651U true JPH0192651U (mo) | 1989-06-16 |
Family
ID=31480141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18908587U Pending JPH0192651U (mo) | 1987-12-11 | 1987-12-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0192651U (mo) |
-
1987
- 1987-12-11 JP JP18908587U patent/JPH0192651U/ja active Pending
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