JPH0194461U - - Google Patents
Info
- Publication number
- JPH0194461U JPH0194461U JP19148987U JP19148987U JPH0194461U JP H0194461 U JPH0194461 U JP H0194461U JP 19148987 U JP19148987 U JP 19148987U JP 19148987 U JP19148987 U JP 19148987U JP H0194461 U JPH0194461 U JP H0194461U
- Authority
- JP
- Japan
- Prior art keywords
- dielectric
- reaction vessel
- line
- shape
- coated line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19148987U JPH0543097Y2 ( ) | 1987-12-16 | 1987-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19148987U JPH0543097Y2 ( ) | 1987-12-16 | 1987-12-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0194461U true JPH0194461U ( ) | 1989-06-21 |
| JPH0543097Y2 JPH0543097Y2 ( ) | 1993-10-29 |
Family
ID=31482396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19148987U Expired - Lifetime JPH0543097Y2 ( ) | 1987-12-16 | 1987-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543097Y2 ( ) |
-
1987
- 1987-12-16 JP JP19148987U patent/JPH0543097Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543097Y2 ( ) | 1993-10-29 |