JPH0197245U - - Google Patents
Info
- Publication number
- JPH0197245U JPH0197245U JP19389187U JP19389187U JPH0197245U JP H0197245 U JPH0197245 U JP H0197245U JP 19389187 U JP19389187 U JP 19389187U JP 19389187 U JP19389187 U JP 19389187U JP H0197245 U JPH0197245 U JP H0197245U
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- flow
- adjustment section
- flow rate
- rate adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
- Measuring Volume Flow (AREA)
Description
第1図ないし第4図は本考案の実施例を、第5
図は従来の微粒子計を示している。
2……粒子検出部、3……流量計、4……流量
調整部、7……流路開閉手段、8……側流路。
1 to 4 show an embodiment of the present invention, and a fifth embodiment of the present invention is shown in FIGS.
The figure shows a conventional particle meter. 2... Particle detection section, 3... Flow meter, 4... Flow rate adjustment section, 7... Channel opening/closing means, 8... Side channel.
Claims (1)
検出部と、流量計および流量調整部とを直列に接
続して流路を形成した微粒子計において、 前記流量調整部上流側に側流路を接続し、しか
もこの側流路に流路開閉手段を設けたことを特徴
とする微粒子計。 (2) 前記側流路が前記流量調整部より大なる流
通を流し得るごとく構成されたことを特徴とする
実用新案登録請求の範囲第1項記載の微粒子計。 (3) 前記流路開閉手段を含む側流路の下流側を
前記流量調整部下流側に接続したことを特徴とす
る実用新案登録請求の範囲第1項または第2項記
載の微粒子計。[Scope of Claim for Utility Model Registration] (1) In a particle meter in which a flow path is formed by connecting in series a particle detection section through which a fluid sample to be measured is introduced and passes through, a flowmeter and a flow rate adjustment section, the flow rate is A particle meter characterized in that a side flow path is connected to the upstream side of the adjustment section, and a flow path opening/closing means is provided in this side flow path. (2) The particulate meter according to claim 1, wherein the side flow path is configured to allow a larger flow to flow than the flow rate adjustment section. (3) The particulate meter according to claim 1 or 2, wherein the downstream side of the side flow path including the flow path opening/closing means is connected to the downstream side of the flow rate adjustment section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987193891U JPH0514198Y2 (en) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987193891U JPH0514198Y2 (en) | 1987-12-21 | 1987-12-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0197245U true JPH0197245U (en) | 1989-06-28 |
| JPH0514198Y2 JPH0514198Y2 (en) | 1993-04-15 |
Family
ID=31484657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987193891U Expired - Lifetime JPH0514198Y2 (en) | 1987-12-21 | 1987-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0514198Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020153948A (en) * | 2019-03-22 | 2020-09-24 | 野村マイクロ・サイエンス株式会社 | Cleaning method of fine particle measurement system and ultrapure water production system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01118748A (en) * | 1987-10-31 | 1989-05-11 | Canon Inc | Particle analysis device |
-
1987
- 1987-12-21 JP JP1987193891U patent/JPH0514198Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01118748A (en) * | 1987-10-31 | 1989-05-11 | Canon Inc | Particle analysis device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020153948A (en) * | 2019-03-22 | 2020-09-24 | 野村マイクロ・サイエンス株式会社 | Cleaning method of fine particle measurement system and ultrapure water production system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0514198Y2 (en) | 1993-04-15 |
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