JPH0197245U - - Google Patents

Info

Publication number
JPH0197245U
JPH0197245U JP19389187U JP19389187U JPH0197245U JP H0197245 U JPH0197245 U JP H0197245U JP 19389187 U JP19389187 U JP 19389187U JP 19389187 U JP19389187 U JP 19389187U JP H0197245 U JPH0197245 U JP H0197245U
Authority
JP
Japan
Prior art keywords
flow path
flow
adjustment section
flow rate
rate adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19389187U
Other languages
Japanese (ja)
Other versions
JPH0514198Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987193891U priority Critical patent/JPH0514198Y2/ja
Publication of JPH0197245U publication Critical patent/JPH0197245U/ja
Application granted granted Critical
Publication of JPH0514198Y2 publication Critical patent/JPH0514198Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Measuring Volume Flow (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図ないし第4図は本考案の実施例を、第5
図は従来の微粒子計を示している。 2……粒子検出部、3……流量計、4……流量
調整部、7……流路開閉手段、8……側流路。
1 to 4 show an embodiment of the present invention, and a fifth embodiment of the present invention is shown in FIGS.
The figure shows a conventional particle meter. 2... Particle detection section, 3... Flow meter, 4... Flow rate adjustment section, 7... Channel opening/closing means, 8... Side channel.

Claims (1)

【実用新案登録請求の範囲】 (1) 被測定流体試料が導入され、通過する粒子
検出部と、流量計および流量調整部とを直列に接
続して流路を形成した微粒子計において、 前記流量調整部上流側に側流路を接続し、しか
もこの側流路に流路開閉手段を設けたことを特徴
とする微粒子計。 (2) 前記側流路が前記流量調整部より大なる流
通を流し得るごとく構成されたことを特徴とする
実用新案登録請求の範囲第1項記載の微粒子計。 (3) 前記流路開閉手段を含む側流路の下流側を
前記流量調整部下流側に接続したことを特徴とす
る実用新案登録請求の範囲第1項または第2項記
載の微粒子計。
[Scope of Claim for Utility Model Registration] (1) In a particle meter in which a flow path is formed by connecting in series a particle detection section through which a fluid sample to be measured is introduced and passes through, a flowmeter and a flow rate adjustment section, the flow rate is A particle meter characterized in that a side flow path is connected to the upstream side of the adjustment section, and a flow path opening/closing means is provided in this side flow path. (2) The particulate meter according to claim 1, wherein the side flow path is configured to allow a larger flow to flow than the flow rate adjustment section. (3) The particulate meter according to claim 1 or 2, wherein the downstream side of the side flow path including the flow path opening/closing means is connected to the downstream side of the flow rate adjustment section.
JP1987193891U 1987-12-21 1987-12-21 Expired - Lifetime JPH0514198Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987193891U JPH0514198Y2 (en) 1987-12-21 1987-12-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987193891U JPH0514198Y2 (en) 1987-12-21 1987-12-21

Publications (2)

Publication Number Publication Date
JPH0197245U true JPH0197245U (en) 1989-06-28
JPH0514198Y2 JPH0514198Y2 (en) 1993-04-15

Family

ID=31484657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987193891U Expired - Lifetime JPH0514198Y2 (en) 1987-12-21 1987-12-21

Country Status (1)

Country Link
JP (1) JPH0514198Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020153948A (en) * 2019-03-22 2020-09-24 野村マイクロ・サイエンス株式会社 Cleaning method of fine particle measurement system and ultrapure water production system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01118748A (en) * 1987-10-31 1989-05-11 Canon Inc Particle analysis device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01118748A (en) * 1987-10-31 1989-05-11 Canon Inc Particle analysis device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020153948A (en) * 2019-03-22 2020-09-24 野村マイクロ・サイエンス株式会社 Cleaning method of fine particle measurement system and ultrapure water production system

Also Published As

Publication number Publication date
JPH0514198Y2 (en) 1993-04-15

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