JPH0197247U - - Google Patents
Info
- Publication number
- JPH0197247U JPH0197247U JP19412387U JP19412387U JPH0197247U JP H0197247 U JPH0197247 U JP H0197247U JP 19412387 U JP19412387 U JP 19412387U JP 19412387 U JP19412387 U JP 19412387U JP H0197247 U JPH0197247 U JP H0197247U
- Authority
- JP
- Japan
- Prior art keywords
- light
- gas
- metal
- hydrogen
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 238000002485 combustion reaction Methods 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 5
- 239000001257 hydrogen Substances 0.000 claims 2
- 229910052739 hydrogen Inorganic materials 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 230000007613 environmental effect Effects 0.000 claims 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 1
- -1 hydrogen compound Chemical class 0.000 claims 1
- 230000031700 light absorption Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
第１図は本考案のセンサ検出構造の一実施例を
示した説明図；第２図は第１図のガスセンサの一
実施例を示した構造説明図；第３図は本考案の回
路構成の一実施例を示したブロツク図；第４図は
本考案によるシランガス及びその燃焼生成物の検
出動作を示したタイムチヤートである。
１：発光素子、２：ガスセンサ、３：受光素子
（透過光量検出用）、４：ガラス基板、５：固体
化合物（三酸化タングステンＷＯ３）、６：触媒
金属（パラジウムＰｄ）、７：受光素子（散乱光
検出用）、８：発光回路、９，１０：受光回路、
１１：信号処理回路、１５：遮光板。
Fig. 1 is an explanatory diagram showing one embodiment of the sensor detection structure of the present invention; Fig. 2 is a structural explanatory diagram showing an embodiment of the gas sensor of Fig. 1; Fig. 3 is an explanatory diagram of the circuit configuration of the present invention. A block diagram showing one embodiment; FIG. 4 is a time chart showing the detection operation of silane gas and its combustion products according to the present invention. 1: Light emitting element, 2: Gas sensor, 3: Light receiving element (for detecting amount of transmitted light), 4: Glass substrate, 5: Solid compound (tungsten trioxide WO 3 ), 6: Catalyst metal (palladium Pd), 7: Light receiving element (for scattered light detection), 8: light emitting circuit, 9, 10: light receiving circuit,
11: Signal processing circuit, 15: Light shielding plate.
Claims (1)
化合物を吸着解離する金属と、該金属中の水素原
子により還元されて光吸収特性が変化する固体化
合物との積層構造からなるガスセンサと； 該ガスセンサの透過光量の変化から被検知ガス
のガス濃度を検知する第１の受光検知手段と； 前記発光部からの光の前記被検知ガス等の燃焼
生成物による散乱光から該燃焼生成物の濃度を検
知する検出する第２の受光検知手段と； を備えたことを特徴とする環境センサ。[Claims for Utility Model Registration] A light-emitting part; A metal that adsorbs and dissociates hydrogen or a hydrogen compound when irradiated with light from the light-emitting part; and a metal that is reduced by the hydrogen atoms in the metal to change its light absorption characteristics. a gas sensor having a laminated structure with a solid compound; a first light receiving detection means for detecting the gas concentration of the detected gas from a change in the amount of light transmitted through the gas sensor; and combustion of the detected gas, etc. with light from the light emitting section. An environmental sensor comprising: second light reception detection means for detecting the concentration of the combustion products from light scattered by the products.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19412387U JPH0197247U (en) | 1987-12-22 | 1987-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19412387U JPH0197247U (en) | 1987-12-22 | 1987-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0197247U true JPH0197247U (en) | 1989-06-28 |
Family
ID=31484868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19412387U Pending JPH0197247U (en) | 1987-12-22 | 1987-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0197247U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003535327A (en) * | 2000-05-31 | 2003-11-25 | テトラ ラバル ホールデイングス エ フイナンス ソシエテ アノニム | Method and apparatus for producing a gaseous medium |
-
1987
- 1987-12-22 JP JP19412387U patent/JPH0197247U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003535327A (en) * | 2000-05-31 | 2003-11-25 | テトラ ラバル ホールデイングス エ フイナンス ソシエテ アノニム | Method and apparatus for producing a gaseous medium |
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