JPH0198500U - - Google Patents

Info

Publication number
JPH0198500U
JPH0198500U JP19527687U JP19527687U JPH0198500U JP H0198500 U JPH0198500 U JP H0198500U JP 19527687 U JP19527687 U JP 19527687U JP 19527687 U JP19527687 U JP 19527687U JP H0198500 U JPH0198500 U JP H0198500U
Authority
JP
Japan
Prior art keywords
electron beam
chamber
beam injection
storage
inflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19527687U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19527687U priority Critical patent/JPH0198500U/ja
Publication of JPH0198500U publication Critical patent/JPH0198500U/ja
Pending legal-status Critical Current

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  • Particle Accelerators (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の断面図、第２図は
従来装置の断面図である。 ２は貯蔵リングの真空チヤンバ、３は電子ビー
ム、４はチヤンバ、５はインフレクタ、１０は電
子ビーム投入口、１１はオリフイスを示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. インフレクタの収納されているチヤンバの貯蔵
    リングに対する電子ビーム投入口をオリイスとし
    、チヤンバ内貯蔵リング内をそれぞれ真空引した
    ことを特徴とする電子ビーム入射装置。
JP19527687U 1987-12-23 1987-12-23 Pending JPH0198500U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19527687U JPH0198500U (ja) 1987-12-23 1987-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19527687U JPH0198500U (ja) 1987-12-23 1987-12-23

Publications (1)

Publication Number Publication Date
JPH0198500U true JPH0198500U (ja) 1989-06-30

Family

ID=31485961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19527687U Pending JPH0198500U (ja) 1987-12-23 1987-12-23

Country Status (1)

Country Link
JP (1) JPH0198500U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173499A (ja) * 1985-01-25 1986-08-05 住友電気工業株式会社 荷電ビ−ムの入射方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173499A (ja) * 1985-01-25 1986-08-05 住友電気工業株式会社 荷電ビ−ムの入射方法

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