JPH0199008U - - Google Patents
Info
- Publication number
- JPH0199008U JPH0199008U JP19547187U JP19547187U JPH0199008U JP H0199008 U JPH0199008 U JP H0199008U JP 19547187 U JP19547187 U JP 19547187U JP 19547187 U JP19547187 U JP 19547187U JP H0199008 U JPH0199008 U JP H0199008U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sample mounting
- mounting table
- measuring device
- communication path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
Description
第１図は本考案に係る試料載置台の平面図、第
２図は第１図の―線断面図、第３図はその試
料載置台を備える基板測定装置の斜視図である。 ３…基板、４…試料載置台、７…吸気孔、８…
連通路、１０…強制排気手段、１１…顕微鏡。
２図は第１図の―線断面図、第３図はその試
料載置台を備える基板測定装置の斜視図である。 ３…基板、４…試料載置台、７…吸気孔、８…
連通路、１０…強制排気手段、１１…顕微鏡。
Claims (1)
- 【実用新案登録請求の範囲】 基板を載置する試料載置台と、その上方へ配置
した顕微鏡とをそれぞれ水平方向に相対移動可能
に構成した基板測定装置の試料載置台において、 試料載置面に多数の吸気孔を開口形成し、その
吸気孔を連通路を介して、強制排気手段に連通し
て成り、基板を試料載置面に吸着保持するように
構成した事を特徴とする基板測定装置の試料載置
台。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19547187U JPH0199008U (ja) | 1987-12-22 | 1987-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19547187U JPH0199008U (ja) | 1987-12-22 | 1987-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0199008U true JPH0199008U (ja) | 1989-07-03 |
Family
ID=31486149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19547187U Pending JPH0199008U (ja) | 1987-12-22 | 1987-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0199008U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014092473A (ja) * | 2012-11-05 | 2014-05-19 | Dainippon Printing Co Ltd | 金属薄板の寸法測定装置及び金属薄板の寸法測定方法 |
-
1987
- 1987-12-22 JP JP19547187U patent/JPH0199008U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014092473A (ja) * | 2012-11-05 | 2014-05-19 | Dainippon Printing Co Ltd | 金属薄板の寸法測定装置及び金属薄板の寸法測定方法 |