JPH0199097U - - Google Patents
Info
- Publication number
- JPH0199097U JPH0199097U JP19550187U JP19550187U JPH0199097U JP H0199097 U JPH0199097 U JP H0199097U JP 19550187 U JP19550187 U JP 19550187U JP 19550187 U JP19550187 U JP 19550187U JP H0199097 U JPH0199097 U JP H0199097U
- Authority
- JP
- Japan
- Prior art keywords
- window
- air outlet
- irradiation
- window foil
- presser frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011888 foil Substances 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
Landscapes
- Particle Accelerators (AREA)
Description
第１図はこの考案の一実施例の断面図、第２図
はその走査管部の正面図、第３図は同じくその吹
出口部材の斜視図、第４図は従来例の断面図、第
５図はその吹出口部材の斜視図である。
１……真空容器、１ａ……走査管部、２……照
射窓、４……窓箔押え枠、６……吹出口部材、７
……給気ダクト、１０……吹出口流路。
Fig. 1 is a sectional view of one embodiment of this invention, Fig. 2 is a front view of its scanning tube section, Fig. 3 is a perspective view of its air outlet member, and Fig. 4 is a sectional view of a conventional example. FIG. 5 is a perspective view of the outlet member. DESCRIPTION OF SYMBOLS 1... Vacuum container, 1a... Scanning tube part, 2... Irradiation window, 4... Window foil press frame, 6... Air outlet member, 7
...Air supply duct, 10...Blowout outlet channel.
Claims (1)
い、この窓箔の周縁部を前記真空容器の照射窓周
縁部と窓箔押え枠の間に挾み込み、前記窓箔押え
枠の長手方向に沿う辺の内面を、この窓箔押え枠
の内部空間が前記真空容器から遠ざかる方向に広
がる傾斜面とした電子線照射装置の照射窓装置に
おいて、前記窓箔押え枠の前記内面と対面してこ
の内面との間に冷却風の吹出口流路を形成する吹
出口部材を設け、前記吹出流路に送風装置を接続
したことを特徴とする電子線照射装置の照射窓装
置。 The irradiation window for taking out the electron beam in the vacuum container is covered with a window foil, and the peripheral edge of this window foil is inserted between the irradiation window peripheral edge of the vacuum container and the window foil presser frame, and the window foil presser frame is placed in the longitudinal direction. In an irradiation window device of an electron beam irradiation device, the inner surface of the side along the window foil presser frame is an inclined surface where the inner space of the window foil presser frame expands in a direction away from the vacuum container, and An irradiation window device for an electron beam irradiation device, characterized in that an air outlet member is provided to form a cooling air outlet flow path between the inner surface and the air outlet member, and a blower device is connected to the air outlet flow path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19550187U JPH0199097U (en) | 1987-12-22 | 1987-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19550187U JPH0199097U (en) | 1987-12-22 | 1987-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0199097U true JPH0199097U (en) | 1989-07-03 |
Family
ID=31486174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19550187U Pending JPH0199097U (en) | 1987-12-22 | 1987-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0199097U (en) |
-
1987
- 1987-12-22 JP JP19550187U patent/JPH0199097U/ja active Pending