JPH0199793A - Laser spectral device - Google Patents

Abstract

PURPOSE:To execute a spectrum without changing the peak output of a laser light and to perform plural laser beam machinings by distributing a pulse light on each pulse unit by the reflection plate driven by synchronizing with the pulse period of the pulse light outputted from a laser oscillator. CONSTITUTION:The pulse light of the laser light outputted from a laser oscillator 1 is subjected to a spectrum by a spectral device 20 and the light of one part is reflected dy a total reflection mirror 3a and condensed by a condensing lens 4a. The light of the other part is reflected by a total reflection mirror 3b and condensed by a condensing lens 46. At this time, the reflection plate 21 of the spectral device 20 is driven by a motor 22 and the motor 22 is controlled at its rotation by a control device 23 so as to rotate by synchronizing with the pulse light, so the pulse light is reflected in (e), (f) directions respectively. Therefore the pulse light is acted so as to distribute by reflection faces (g), (h) on each pulse unit and the distributed pulse light is condensed by the condensing lenses 4a, 4b respectively.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a laser spectrometer that spectrally separates pulsed laser light.

[Conventional technology]

FIG. 7 is a configuration diagram showing a conventional laser spectrometer disclosed in, for example, Japanese Unexamined Patent Publication No. 60-166186. In the figure, 1 is a laser oscillator that outputs pulsed laser light, and 2 is a half mirror. 3a and 3b are total reflection mirrors, and 4a and 4b are condensing lenses.

Next, the operation will be explained. Now, when a pulsed laser beam as shown in FIG. 8 is outputted from the laser oscillator 1, part of the pulsed light is reflected by the partially transmitting mirror 2 and the remaining light is transmitted. For example, if the transmittance of the partially transmitting mirror 2 is 50%, the amount of light that is reflected and the amount of light that is transmitted are 50 times each. The pulsed light thus reflected by the partially transmitting mirror 2 is reflected by the total reflecting mirror 3a and condensed by the condensing lens 4a. On the other hand, the pulsed light transmitted through the partially transmitting mirror 2 is reflected by the total reflecting mirror 3b and condensed by the condensing lens 4b. The peak value of the pulsed light obtained by each of these condensing lenses 4as4b is, as shown in FIG. 9, half the peak value of the pulsed light from the laser oscillator 1 shown in FIG. 8.

[Problem that the invention seeks to solve]

Since the conventional laser spectrometer is configured as described above, when the transmittance of the partially transmitting mirror 2 is set to 50%, the peak value of the pulsed light at the condensing lenses 4a and 4b is output from the oscillator. When applied to laser processing equipment, a laser oscillator with twice the performance of the pulse peak value required for processing is required, making it extremely uneconomical. There were some problems, such as:

This invention was made to solve the above-mentioned problems, and by synchronizing the pulsed laser light output from the laser oscillator with the pulse period and splitting it, the laser output from the laser oscillator can be The object of the present invention is to obtain a laser spectrometer that can separate pulsed light having the same peak value as the pulsed light into a plurality of condensing lenses.

[Means for solving problems]

The laser spectrometer according to the present invention operates a driving device in synchronization with the pulse period of pulsed light output from a laser oscillator, and uses a reflecting plate driven by the driving device to transmit the pulsed light in pulse units. It is configured to be distributed.

[For production]

Since the driving device in this invention operates in synchronization with the pulse period of the pulsed light from the laser oscillator, the pulsed light for each pulse unit can be reliably incident on the reflecting plate, and the pulsed light obtained from this reflecting plate can be The peak value of the light is set to be the same as the peak value of the pulsed light emitted from the laser oscillator, so that the energy of the pulsed light is equally effectively applied to a plurality of workpieces.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to the drawings. 1st
In the figure, 1 is a laser oscillator, 20 is a laser oscillator 1
a spectroscopic device that spectrally spectra pulsed laser light outputted by; 3;
a, 3b are total reflection mirrors interposed in the separated optical path; 4
a*4b is a condensing lens. FIG. 2 is a front view showing a schematic configuration of the spectroscopic device 20, and FIG. 3 is a side view.
21 is a reflector that reflects laser light in two directions; 22 is a motor serving as a driving device for rotating this reflector 21; and 23 is a control device that controls rotation of the motor 22 in accordance with the pulse cycle of the laser oscillator 1. . Here, the reflecting plate 21 has two reflecting surfaces g that reflect the optical pulses of the laser beam in different directions.
e) has 1. FIG. 4 shows pulsed laser light output from the laser oscillator 1, and FIGS. 5 and 6 show pulsed light split into two parts by the laser spectrometer 20.

Next, one operation will be explained. First, in Figure 1,
Pulsed laser light output from the laser oscillator 1 is separated into spectra by a spectrometer 20, and one of the lights is reflected by a total reflection mirror 3a and condensed by a condenser lens 4a. The other light is reflected by the total reflection mirror 3b and condensed by the condenser lens 4b.

In this case, the reflection plate 21 that reflects the pulsed light
is driven by a motor 22, and the reflecting plate 21 reflects the incident pulsed light in two directions by two reflecting surfaces g and h.

Since the rotation of the motor 22 is controlled by the control device 23 so as to rotate in synchronization with the pulsed light from the laser oscillator 1, the pulsed light emitted from the laser oscillator 1 is directed in the e direction, as shown in FIG. In other words, the reflecting surface geh acts to distribute the pulsed light reflected in the 9 and f directions in units of pulses, and the distributed pulsed light is condensed by the condenser lenses 4a and 4b, respectively.

Therefore, as shown in FIG. 5 with the condenser lens 4a and FIG. 6 with the condenser lens 4b, pulsed lights in the e direction and f direction in FIG. 4 are obtained separately, and these are applied to each workpiece. It will be concluded. Therefore, the peak value of the pulsed light focused by the condenser lenses 4a and 4b is the same as the peak value of the pulsed light emitted from the laser oscillator 1.

In the above embodiment, the case of 2 spectra is shown, but the number of spectra may be 3 or more, and the same effects as in the above embodiments can be obtained.

Further, in the above embodiment, the reflecting plate 21 is of a rotary type, but the reflecting plate 21 may be of a reciprocating type, and the same effects as in the above embodiment can be obtained.

〔Effect of the invention〕

As described above, according to the present invention, the configuration is such that the pulsed laser beam to be irradiated onto the workpiece etc. can be spectrally separated without changing the peak output of the pulsed laser beam output from the laser oscillator. This eliminates the need for a laser oscillator with a high peak output depending on the number of spectra, making it possible to perform laser processing on multiple workpieces using a laser oscillator with the required constant peak value, making it possible to use an inexpensive oscillator. This has the effect of making it possible to perform laser processing with a high peak output.

[Brief explanation of the drawing]

FIG. 1 is a block connection diagram showing a laser spectroscopy system equipped with a laser spectrometer according to an embodiment of the present invention, FIG. 2 is a front view showing a schematic configuration of the laser spectrometer shown in FIG. 1, and FIG. FIG. 2 is a side view of the laser spectrometer shown in FIG. 2, FIG. 4 is a pulse light waveform diagram of the laser beam output from the laser oscillator, and FIGS. 5 and 6 are pulses separated by the laser spectrometer according to the present invention. FIG. 7 is a block connection diagram showing a conventional laser spectroscopy system, and FIGS. 8 and 9 are waveform diagrams of pulsed light separated by a conventional spectroscopic device. 1 is a laser oscillator, 20 is a laser spectrometer, 21 is a reflection plate, 22 is a drive device, and 23 is a control device. In addition, in the figures, the same reference numerals indicate the same or equivalent parts. Patent applicant Mitsubishi Electric Co., Ltd. Representative Patent Attorney 1) Hiroshi Sawa (2 others) Figure 1 Dig 2 Figure S Time

Claims (2)

[Claims] (1) A laser spectrometer equipped with a drive device that operates in synchronization with the pulse cycle of pulsed light output from a laser oscillator, and a reflector that is displaced by the drive device and distributes the pulsed light in units of pulses. . (2) A laser spectrometer according to claim 1, characterized in that the driving device is a motor.