JPH02102433U - - Google Patents
Info
- Publication number
- JPH02102433U JPH02102433U JP1033889U JP1033889U JPH02102433U JP H02102433 U JPH02102433 U JP H02102433U JP 1033889 U JP1033889 U JP 1033889U JP 1033889 U JP1033889 U JP 1033889U JP H02102433 U JPH02102433 U JP H02102433U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- boron nitride
- crucible
- wall
- disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052582 BN Inorganic materials 0.000 claims description 6
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 6
Landscapes
- Physical Vapour Deposition (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Description
第１図は本考案ルツボの実施例を示す断面図、
第２図は本考案ブツシングのノズル部を示す断面
図、第３図は本考案ルツボを示す断面図である。
図中の主な符号はつぎのとおりである。１１：
ルツボ、１４：接合部、２１：ブツシング、２３
：ボロンナイトライド層、３１：ルツボ、３３：
ボロンナイトライド部材。
FIG. 1 is a sectional view showing an embodiment of the crucible of the present invention;
FIG. 2 is a cross-sectional view showing the nozzle portion of the bushing of the present invention, and FIG. 3 is a cross-sectional view showing the crucible of the present invention. The main symbols in the figure are as follows. 11:
Crucible, 14: Joint, 21: Bushing, 23
: Boron nitride layer, 31: Crucible, 33:
Boron nitride material.
Claims (1)
ボであつて、該円筒部と円板部との境界部分にボ
ロンナイトライドからなる接合部を設けたことを
特徴とするルツボ。 (2) ノズル部の外壁にボロンナイトライド層を
設けたことを特徴とするブツシング。 (3) ノズルの内壁にボロンナイトライド部材を
設けたことを特徴とするルツボ。 (4) ノズルおよびノズル近傍の内壁にボロンナ
イトライド部材を設けた前記請求項３記載のルツ
ボ。[Scope of Claim for Utility Model Registration] (1) A superimposed crucible consisting of a cylindrical part and a disc part, in which a joint part made of boron nitride is provided at the boundary between the cylindrical part and the disc part. A crucible characterized by. (2) A bushing characterized by providing a boron nitride layer on the outer wall of the nozzle part. (3) A crucible characterized in that a boron nitride member is provided on the inner wall of the nozzle. (4) The crucible according to claim 3, wherein a boron nitride member is provided on the nozzle and the inner wall near the nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1033889U JPH02102433U (en) | 1989-01-30 | 1989-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1033889U JPH02102433U (en) | 1989-01-30 | 1989-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02102433U true JPH02102433U (en) | 1990-08-15 |
Family
ID=31217911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1033889U Pending JPH02102433U (en) | 1989-01-30 | 1989-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02102433U (en) |
-
1989
- 1989-01-30 JP JP1033889U patent/JPH02102433U/ja active Pending