JPH02102719U - - Google Patents
Info
- Publication number
- JPH02102719U JPH02102719U JP989089U JP989089U JPH02102719U JP H02102719 U JPH02102719 U JP H02102719U JP 989089 U JP989089 U JP 989089U JP 989089 U JP989089 U JP 989089U JP H02102719 U JPH02102719 U JP H02102719U
- Authority
- JP
- Japan
- Prior art keywords
- original image
- reduction
- illumination
- exposure apparatus
- projection exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005286 illumination Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
Description
第１図は本案の一実施例の縮小投影露光装置を
示す図である。 １……水銀ランプ、２……楕円鏡、３……多光
束発生部材、４……コンデンサレンズ群、５……
縮小レンズ、６……縮小レンズ入射瞳、７……レ
テイクル、８……ハーフミラー、９……入射光、
１０……反射光。
示す図である。 １……水銀ランプ、２……楕円鏡、３……多光
束発生部材、４……コンデンサレンズ群、５……
縮小レンズ、６……縮小レンズ入射瞳、７……レ
テイクル、８……ハーフミラー、９……入射光、
１０……反射光。
Claims (1)
- 原画とこれを透過照明する装置と縮小レンズよ
り成る縮小投影露光装置において、原画と照明装
置の間に多重反射を防ぐハーフミラーを設けたこ
とを特徴とする縮小投影露光装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP989089U JPH02102719U (ja) | 1989-02-01 | 1989-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP989089U JPH02102719U (ja) | 1989-02-01 | 1989-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02102719U true JPH02102719U (ja) | 1990-08-15 |
Family
ID=31217034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP989089U Pending JPH02102719U (ja) | 1989-02-01 | 1989-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02102719U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7569193B2 (en) | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |
-
1989
- 1989-02-01 JP JP989089U patent/JPH02102719U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7569193B2 (en) | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |