JPH02103209U - - Google Patents

Info

Publication number
JPH02103209U
JPH02103209U JP1179789U JP1179789U JPH02103209U JP H02103209 U JPH02103209 U JP H02103209U JP 1179789 U JP1179789 U JP 1179789U JP 1179789 U JP1179789 U JP 1179789U JP H02103209 U JPH02103209 U JP H02103209U
Authority
JP
Japan
Prior art keywords
axis
scanning
generation circuit
signal generation
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1179789U
Other languages
English (en)
Other versions
JPH074492Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989011797U priority Critical patent/JPH074492Y2/ja
Publication of JPH02103209U publication Critical patent/JPH02103209U/ja
Application granted granted Critical
Publication of JPH074492Y2 publication Critical patent/JPH074492Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Description

【図面の簡単な説明】
第１図は本考案第一実施例による走査信号発生
回路図、第２図は本考案第二実施例による走査信
号発生回路図、第３図ａは従来の走査信号発生回
路図、第３図ｂは探針の走査説明図、第４図は面
内走査概念図、第５図はＸ軸走査方向切換後の面
内走査概念図を示したものである。 １……動作クロツク発生器、２……Ｘ軸走査コ
ントローラ、３……Ｙ軸走査コントローラ、４…
…Ｘ軸カウントアツプクロツク、５……Ｘ軸カウ
ントダウンクロツク、６……Ｙ軸カウントアツプ
クロツク、７……Ｙ軸カウントダウンクロツク、
８……Ｘ軸アツプダウンカウンタ、９……Ｙ軸ア
ツプダウンカウンタ、１０……Ｘ軸カウントデー
タ、１１……Ｙ軸カウントデータ、１２……Ｘ軸
Ｄ／Ａコンバータ、１３……Ｙ軸Ｄ／Ａコンバー
タ、１４……Ｘ軸走査電圧、１５……Ｙ軸走査電
圧、１６……Ｘ軸出力アンプ、１７……Ｙ軸出力
アンプ、１８……Ｘ軸正駆動電圧、１９……Ｘ軸
負駆動電圧、２０……Ｙ軸正駆動電圧、２１……
Ｙ軸負駆動電圧、２２……Ｘ軸駆動素子、２３…
…Ｙ軸駆動素子、２４……Ｘ軸走査方向切換器、
２５……Ｙ軸走査方向切換器、２６……Ｘ軸Ｙ軸
切換器、２７……面内走査の原点、２８……面内
走査範囲、２９……走査軌跡。

Claims (1)

  1. 【実用新案登録請求の範囲】 走査信号発生回路を備えた走査型トンネル顕微
    鏡において、 上記走査信号発生回路はＤ／Ａコンバータを有
    し、このＤ／Ａコンバータの入力側に走査部の走
    査方向を切換えるための切換器が配置されている
    ことを特徴とする走査型トンネル顕微鏡。
JP1989011797U 1989-02-03 1989-02-03 走査型トンネル顕微鏡 Expired - Lifetime JPH074492Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989011797U JPH074492Y2 (ja) 1989-02-03 1989-02-03 走査型トンネル顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989011797U JPH074492Y2 (ja) 1989-02-03 1989-02-03 走査型トンネル顕微鏡

Publications (2)

Publication Number Publication Date
JPH02103209U true JPH02103209U (ja) 1990-08-16
JPH074492Y2 JPH074492Y2 (ja) 1995-02-01

Family

ID=31220666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989011797U Expired - Lifetime JPH074492Y2 (ja) 1989-02-03 1989-02-03 走査型トンネル顕微鏡

Country Status (1)

Country Link
JP (1) JPH074492Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04169809A (ja) * 1990-11-02 1992-06-17 Mitsutoyo Corp 測定装置
JP2011169696A (ja) * 2010-02-17 2011-09-01 Asahi Kasei Electronics Co Ltd 磁気センサユニット

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6415817A (en) * 1987-07-10 1989-01-19 Hitachi Ltd Actuator driving circuit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6415817A (en) * 1987-07-10 1989-01-19 Hitachi Ltd Actuator driving circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04169809A (ja) * 1990-11-02 1992-06-17 Mitsutoyo Corp 測定装置
JP2011169696A (ja) * 2010-02-17 2011-09-01 Asahi Kasei Electronics Co Ltd 磁気センサユニット

Also Published As

Publication number Publication date
JPH074492Y2 (ja) 1995-02-01

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term