JPH02104565U - - Google Patents
Info
- Publication number
- JPH02104565U JPH02104565U JP1299989U JP1299989U JPH02104565U JP H02104565 U JPH02104565 U JP H02104565U JP 1299989 U JP1299989 U JP 1299989U JP 1299989 U JP1299989 U JP 1299989U JP H02104565 U JPH02104565 U JP H02104565U
- Authority
- JP
- Japan
- Prior art keywords
- lens coil
- coil
- temperature
- control valve
- flow control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 238000012856 packing Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本案の一実施例の透過形電子顕微鏡の
試料室近傍の断面図である。
１０，１９……レンズコイル、１１，２０……
水路、１２，２１……温度センサ、１３，２２…
…自動水量調節弁、１４，２３……制御器。
FIG. 1 is a sectional view of the vicinity of a sample chamber of a transmission electron microscope according to an embodiment of the present invention. 10, 19... Lens coil, 11, 20...
Water channel, 12, 21... Temperature sensor, 13, 22...
... Automatic water flow control valve, 14, 23 ... Controller.
Claims (1)
穽以下の圧力が得られる焼出し装置のついた試料
室と、前記試料室の上下又は温度の高くなる側の
レンズコイルに温度センサを有し、かつ前記レン
ズコイルには水冷機能と、前記レンズコイル入口
に水量調節弁を有してなる電子顕微鏡において、
前記レンズコイルに設けた温度センサと前記レン
ズコイル入口の自動水量調節弁をリンクさせたこ
とを特徴とする電子顕微鏡。 The vicinity of the sample was made into a metal packing, and the temperature was 10 −7 Pa.
It has a sample chamber equipped with a bake-out device that can obtain a pressure of less than 100 liters, and a temperature sensor on the lens coil above and below the sample chamber or on the side where the temperature is higher, and the lens coil has a water cooling function, and the lens coil has a water cooling function. In an electron microscope having a water flow control valve at the coil inlet,
An electron microscope characterized in that a temperature sensor provided on the lens coil is linked to an automatic water flow control valve at an inlet of the lens coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1299989U JPH02104565U (en) | 1989-02-08 | 1989-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1299989U JPH02104565U (en) | 1989-02-08 | 1989-02-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02104565U true JPH02104565U (en) | 1990-08-20 |
Family
ID=31222933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1299989U Pending JPH02104565U (en) | 1989-02-08 | 1989-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02104565U (en) |
-
1989
- 1989-02-08 JP JP1299989U patent/JPH02104565U/ja active Pending