JPH02106535U - - Google Patents
Info
- Publication number
- JPH02106535U JPH02106535U JP1424689U JP1424689U JPH02106535U JP H02106535 U JPH02106535 U JP H02106535U JP 1424689 U JP1424689 U JP 1424689U JP 1424689 U JP1424689 U JP 1424689U JP H02106535 U JPH02106535 U JP H02106535U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- filtered air
- supply
- clean bench
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Description
第１図は自動局所排気設備の使用例を示す縦断
面図、第２図はモータダンパの制御盤の正面図、
第３図ないし第５図は、本考案実施例の動作を示
す縦断面図である。
１：クリーンベンチ、２：第一装置、３：第二
装置、４，５：処理室、６，７，１１，１２：局
所排気口、８，９，１３，１４：モータダンパ、
１５：ダクト、１６，１７：スイツチ、２０：制
御盤。
Figure 1 is a longitudinal sectional view showing an example of the use of automatic local exhaust equipment, Figure 2 is a front view of the motor damper control panel,
3 to 5 are longitudinal sectional views showing the operation of the embodiment of the present invention. 1: Clean bench, 2: First device, 3: Second device, 4, 5: Processing chamber, 6, 7, 11, 12: Local exhaust port, 8, 9, 13, 14: Motor damper,
15: Duct, 16, 17: Switch, 20: Control panel.
Claims (1)
設けられる自動局所排気設備において、上記クリ
ーンベンチ内に配された装置の処理室毎に一対の
排気装置を設け、一の排気装置を上記濾過空気の
供給側に、他の排気装置を上記濾過空気の排出側
に配置し、制御盤のスイツチ操作により上記濾過
空気の供給・停止及び各排気設備の局所排気口に
設けたダンパの開・閉作動を行ない、上記各排気
設備による排気を制御するようにした自動局所排
気設備。 In an automatic local exhaust system installed in a clean bench equipped with a filtered air supply source, a pair of exhaust devices are provided for each processing chamber of the device arranged in the clean bench, and one exhaust device is used to supply the filtered air. On the supply side, another exhaust device is arranged on the discharge side of the filtered air, and by operating a switch on the control panel, the supply and stop of the filtered air and the opening and closing of dampers provided at the local exhaust ports of each exhaust equipment are controlled. Automatic local exhaust equipment that controls the exhaust air from each of the above exhaust equipments.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1424689U JPH02106535U (en) | 1989-02-09 | 1989-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1424689U JPH02106535U (en) | 1989-02-09 | 1989-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02106535U true JPH02106535U (en) | 1990-08-24 |
Family
ID=31225274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1424689U Pending JPH02106535U (en) | 1989-02-09 | 1989-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02106535U (en) |
-
1989
- 1989-02-09 JP JP1424689U patent/JPH02106535U/ja active Pending
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