JPH02106823U - - Google Patents
Info
- Publication number
- JPH02106823U JPH02106823U JP1430089U JP1430089U JPH02106823U JP H02106823 U JPH02106823 U JP H02106823U JP 1430089 U JP1430089 U JP 1430089U JP 1430089 U JP1430089 U JP 1430089U JP H02106823 U JPH02106823 U JP H02106823U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- conveying
- lamp annealing
- heat
- annealing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000137 annealing Methods 0.000 claims description 4
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
Landscapes
- Furnace Details (AREA)
Description
第１図は本考案のランプアニール装置の一実施
例を示す主要断面図。第２図は本考案のランプア
ニール装置のサセプタの断面図。第３図は従来の
ランプアニール装置を示す主要断面図。
１……チヤンバー、２……ハロゲンランプ、３
……雰囲気ガス導入口、４……温度センサー、５
……被熱処理物取り出し口、６……ローダー、７
……アンローダー、８……サセプタ、９……移し
替えロボツト、１０……搬送部ガス導入口、１１
……排気口、１２……被熱処理物。
FIG. 1 is a main sectional view showing an embodiment of the lamp annealing apparatus of the present invention. FIG. 2 is a sectional view of the susceptor of the lamp annealing apparatus of the present invention. FIG. 3 is a main sectional view showing a conventional lamp annealing device. 1...Chamber, 2...Halogen lamp, 3
...Atmospheric gas inlet, 4...Temperature sensor, 5
...Heat-treated material outlet, 6...Loader, 7
... Unloader, 8 ... Susceptor, 9 ... Transfer robot, 10 ... Transport section gas inlet, 11
...Exhaust port, 12...Object to be heat treated.
Claims (1)
理物のチヤンバーへの搬送を上下方向で行なうこ
とを特徴とするランプアニール装置。 A lamp annealing device characterized by having a chamber and a conveying section in an integrated structure, and conveying a heat-treated object to the chamber in the vertical direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1430089U JPH02106823U (en) | 1989-02-09 | 1989-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1430089U JPH02106823U (en) | 1989-02-09 | 1989-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02106823U true JPH02106823U (en) | 1990-08-24 |
Family
ID=31225378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1430089U Pending JPH02106823U (en) | 1989-02-09 | 1989-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02106823U (en) |
-
1989
- 1989-02-09 JP JP1430089U patent/JPH02106823U/ja active Pending
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