JPH02106831U - - Google Patents

Description

[Brief explanation of the drawing]

The drawings relate to an embodiment of the present invention, and FIG. 1 is a plan view, FIG. 2 is a side view, FIG. 3 is a bottom view, FIG. 4 is an enlarged longitudinal sectional view, and FIG. 6 is an enlarged sectional view taken along the line of FIG. 1, FIG. 7 is a side view of the state in use, FIG. Figure 10 is an exploded and separated slope view. DESCRIPTION OF SYMBOLS 1...Elastic piece, 2...Rising part, 3...Horizontal part, 4...Curved part, 5, 5 ₁ ...Protruding wall for wafer locking, 6...Locking piece, 10...Wafer support board,
DESCRIPTION OF SYMBOLS 11... Support frame body, 12... Leg piece, 13... Notch part, A... Container, B... Upper lid.

Claims (1)

[Claims for Utility Model Registration] (1) An elastic piece 1, which is provided in a container that accommodates a large number of IC wafers and is capable of supporting each wafer at regular intervals, is connected horizontally to a rising part 2. A set of wafers having shaped portions 3 facing each other, a curved portion 4 whose intermediate portion is curved downward, and having symmetrical side surfaces at or near the boundary between the horizontal portion 3 and the curved portion 4. Locking projecting wall 5,5
A large number of elastic pieces ₁ are arranged in parallel in strips in the slit 7, and one protrusion 5 of the wafer locking protrusions 5, 5 ₁ is connected to the other protrusion on the adjacent elastic piece 1. A wafer support plate in a wafer container, characterized in that it is disposed adjacent to a wall ₅₁ at a position where a portion of the side surface overlaps with the wall 51. (2) A pair of locking pieces 6 are provided approximately at the center of the curved portion 4 of the elastic piece 1 so that the opposing side surfaces are approximately V-shaped.
2. The wafer support plate according to claim 1, wherein the wafer support plates 6 are provided oppositely and projectingly at intervals. (3) The wafer support plate 10 with the elastic piece 1 is supported by a supporting frame portion 11 that can be fitted into the inner bottom of the wafer container, and a plurality of support frames supported via rising portions 2, 2 between the supporting frame portions 11, 11. The curved portion 4 of the elastic piece 1 is disposed above the support frame 11, and the wafer retaining protruding walls 5, 51 are integrally molded with an elastic piece ₁ of a synthetic resin material. 3. The wafer support plate according to claim 1, wherein the symmetrical side surfaces formed by the pair are slopes having a substantially V-shape. (4) In the wafer support plate 10 in which a large number of elastic pieces 1 are arranged in parallel at intervals, the linear slits 7 between the elastic pieces 1, 1 adjacent to each other connect the protruding walls 5, ₅₁ for wafer locking. The wafer support plate according to claim 1 or 2, wherein the slit is bent or bent in a Z-shape or S-shape at the provided position. (5) In the wafer support plate 10 in which a large number of elastic pieces 1 are arranged in parallel on the supporting frame 11 at intervals, a set of wafer locking protrusions having symmetrical side surfaces are provided on the elastic pieces 1. A pair of walls 5 and 5 ₁ are provided separated from each other on both sides, and a pair of locking pieces 6 and 6 are provided facing each other to lock the lower edge of the wafer at approximately the midpoint thereof. The intermediate portion between the wafer locking projecting walls 5, 5 ₁ and the projecting walls 5, 5 ₁ which are supported by being curved upwardly of the frame portion 11 is curved downward to substantially follow the lower edge of the wafer. Concave curved portion 4
A wafer support plate in a wafer container, characterized in that it is formed with: