JPH02106835A - Optical detector - Google Patents
Optical detectorInfo
- Publication number
- JPH02106835A JPH02106835A JP26095288A JP26095288A JPH02106835A JP H02106835 A JPH02106835 A JP H02106835A JP 26095288 A JP26095288 A JP 26095288A JP 26095288 A JP26095288 A JP 26095288A JP H02106835 A JPH02106835 A JP H02106835A
- Authority
- JP
- Japan
- Prior art keywords
- light
- light beam
- pattern
- diffraction pattern
- shielding body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Switches Operated By Changes In Physical Conditions (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
工場の生産ラインの自動化1合理化等のいわゆるFAの
分野では物体の有無の検出、物体のある点の通過の確認
か必須である。また、ある設備。[Detailed Description of the Invention] [Industrial Application Field] In the field of so-called FA, such as automation and rationalization of factory production lines, it is essential to detect the presence or absence of an object or to confirm that the object has passed a certain point. Also, some facilities.
装置9機械等の運転時の安全確認のために、その構成部
品の所定位置における有無9通過の確認か必要である。In order to confirm the safety of the device 9 during operation of a machine, etc., it is necessary to confirm whether or not its component parts are in a predetermined position.
また、危険場所における異物の近接の検出部、物体の有
無の検出の必要性は極め1大きい。本発明はこのような
分野において使用する透過型の光音、スイッチのような
、物体Iこよる光の遮断を判別し1この物体の有無を検
出する光学的検出装置、特に微細な線状物体(以後、こ
の線状物体を微細線ということかある6)や微小な球状
物体等を簡単な電気回路構成で検出することかできる検
出装置に関する。In addition, there is an extremely large need for detection units for detecting the proximity of foreign objects and for detecting the presence or absence of objects in hazardous locations. The present invention is an optical detection device for detecting the presence or absence of an object, such as a transmission-type optical sound or switch, used in such fields by determining whether or not light is blocked by an object, especially a minute linear object. The present invention relates to a detection device capable of detecting a linear object (hereinafter referred to as a fine line), a minute spherical object, etc. with a simple electric circuit configuration.
物体を検出するため1こ、従来透過型光電スイッチかよ
く使わt′I″Cいる。その構成は第2図Cξ示すよう
tご、はば平行な光12を投射する投光部1と。To detect an object, a transmissive photoelectric switch is often used in the past.Its configuration is as shown in FIG.
投光部Iに対向しt光線2を受光する受光部5とからな
り1い′c、受光部5は光線2を集光するレンズ6と、
レンズ6か集光した光を光電変換し1受光量に応じた電
気信号7aV出力する光電変換素子7と、電気信号7a
か入力さtlる検出回路8とで構成さtLlいる。そう
し″C1検出回路8は物体9か光12な遮ることにより
1生じる電気信号7mの変化を検出し1所定のスイッチ
動作を行つ−二値信号8aを出力′fるようfこなつ−
い工、この検出回路8は基準飴VSを発生′fろ基準値
発生回路8Iと、入力さflh ”fK気倍信号7a基
準値Vsとについτ所定の比較動作を行つ1その結果【
こ応じた判定信号を出力する比較回路82と、この判定
信号QJ応じた前述のスイッチ動作を行つτ信号88を
出力するスイッチ部83とからなつ工いる。It consists of a light receiving part 5 facing the light projecting part I and receiving the light beam 2; the light receiving part 5 has a lens 6 which condenses the light beam 2;
A photoelectric conversion element 7 that photoelectrically converts the light condensed by the lens 6 and outputs an electric signal 7aV corresponding to the amount of received light, and an electric signal 7a.
The detection circuit 8 is composed of a detection circuit 8 that receives an input signal tLl. Then, the C1 detection circuit 8 detects the change in the electrical signal 7m caused by the object 9 or the light 12 blocking it, and performs a predetermined switch operation to output a binary signal 8a.
This detection circuit 8 generates a reference value VS and performs a predetermined comparison operation with respect to the reference value generation circuit 8I and the reference value Vs of the input signal 7a.
It consists of a comparison circuit 82 which outputs a judgment signal in response to this judgment signal, and a switch section 83 which outputs a τ signal 88 which performs the above-described switch operation in response to this judgment signal QJ.
第2図C:おい1:1.光電スイッチか上記のよう「ご
構成さf1″Cいろので、スイッチ部83の動作f二よ
つ1光@2を遮る物体9の有無を検出することかできる
。Figure 2 C: Hey 1:1. Since the photoelectric switch is configured as described above, it is possible to detect the presence or absence of an object 9 blocking the light @2 by operating the switch section 83 f2.
第2図の光電スイッチでに、上記のようにし℃物体9の
有無「こ対イろ検出動作か行われろか、たとえばレンズ
6で集光さねろ光線2か直径5■の円柱状光束ななし、
−いろ場合、物体9か非常(こ細く一直径0.1+o+
の微細線状f1なつ工いろとこの物体9か光線2を遮る
ことfこよつ℃生じろ受光部5におけろ受光tの変化は
計算上2.6係程度となつτ2通常この程度の受光量変
化は、検出回路8Cご特性変動かあるため、小さ過ぎ工
、検出回路8【こよろ検出か困難である。すなわち、第
2図の光電スイッチ「:ハ、物体9か微細線であると受
光部5におけろ受光量変化か小さくなつ工、物体9の検
出か困難になろという問題点かある。In the photoelectric switch of FIG. 2, the presence or absence of the object 9 is detected as described above.
- If it is colored, the object is 9 or very thin (one diameter 0.1+o+
If the fine line f1 of the object 9 blocks the light beam 2, the change in the received light t at the light-receiving section 5 is calculated to be about a factor of 2.6.τ2 Normally, this level of light reception The amount change is due to a change in the characteristics of the detection circuit 8C, so it is difficult to detect whether it is too small or the detection circuit 8C is unstable. That is, the photoelectric switch of FIG. 2 has the problem that if the object 9 is a fine line, the amount of light received by the light receiving section 5 may change or become smaller, making it difficult to detect the object 9.
このため、従来、物体9か微細線である場合。For this reason, conventionally, when the object 9 is a fine line.
この物体9の後方に)し線2σ〕回折【:よつ−生じろ
第3図を二足したような回折パターン10をラインイメ
ージセンサで検出しt(第2図の光電変換素子7か回折
パターンlOの平均光強度を検出するのに対し工、ライ
ンイメージセンサでは個々の受光素子か回折パターンI
Oの各部の光強度を検出するので、後者【:よ4ば前者
tこよろよりソヘ度でパターン10の存在を検出するこ
とかできる。)。Behind this object 9), a line 2σ] diffraction pattern 10, which is the sum of the two lines shown in Figure 3, is detected by the line image sensor. In contrast to detecting the average light intensity of the pattern I, a line image sensor detects the average light intensity of the diffraction pattern I.
Since the light intensity at each part of the pattern 10 is detected, the presence of the pattern 10 can be detected at a higher degree than the former. ).
この検出結果と既「こ記憶させら4″Cいろパターンと
を比較しτ物体9の有無を検出する光学的検出装置が用
いられろことかあるが、この場合パターン昭識の手法を
用い℃物体の有無判定を行つQJで。An optical detection device may be used that compares this detection result with the previously memorized 4"C color pattern and detects the presence or absence of the τ object 9. In this case, a method based on pattern knowledge is used. QJ that determines the presence or absence of an object.
検出回路8の構成I:比べ℃非常【こ複雑な電気回路構
成を必要としt、こσ〕ため、このような光学的検出装
置「:1ユ製作か面倒であるという問題点かある。第3
図「Jおい″C1横軸X−Xは微細線9に直交する方向
の空間的位置を示し、縦軸Ati尤の強度を示し1いろ
。また1点Oは微細線9の軸心の位置な示し、Bは微細
線9か存在しない時の光の強度を示し工い石。Since the configuration of the detection circuit 8 is very complicated compared to the configuration of the optical detection circuit 8, it is difficult to manufacture such an optical detection device. 3
The horizontal axis XX indicates the spatial position in the direction orthogonal to the fine line 9, and the vertical axis indicates the relative strength of the line 9. Also, point O indicates the position of the axis of the fine line 9, and point B indicates the intensity of light when the fine line 9 does not exist.
本発明σ〕目的は、物体9か微細な線状、あるいは微小
な球または円状である場合におい工も受光部5(おけろ
受光量の変化か大きくなるようにし工、検出回路8のよ
うな簡単な構成の電気回路でも物体9の検出か容易「二
行えるような光学的検出装置を提供することt:ある。The purpose of the present invention σ] is that when the object 9 is in the shape of a minute line, a minute sphere, or a circle, the odor detector is also designed to increase the change in the amount of light received by the light receiving section 5 (such as the detection circuit 8). It is an object of the present invention to provide an optical detection device that can easily detect an object 9 even with a simple electrical circuit.
王妃目的を達成″′f71′まため1本発明によれば、
コヒーレントな光束を投射イろ投光部と、前記光束を受
光し工この受光結果に応じた検出動作を行う受光部とを
備え、前記受光部の前記検出動作fこもとづき前記光束
を遮光−fろ物体を検出する光学的検出装置においτ、
前記物体か前記光束を遮光する際に形成されろ前言e光
束の回折パターンに応じた遮光体を前記受光部の前記光
束を受光す71窓またはこの窓の前方に配置しt光学的
検出装置を構成するものとする。Achieving the Queen's Purpose'''F71'According to the present invention,
A light projecting section that projects a coherent light beam; and a light receiving section that receives the light beam and performs a detection operation according to the result of the light reception; In an optical detection device that detects a filter object, τ,
A light shielding body corresponding to the diffraction pattern of the light beam formed when the object blocks the light beam is placed in the window of the light receiving section that receives the light beam or in front of this window, and an optical detection device is installed. shall be configured.
上記のようCご構成すると1回折パターンの明部を遮光
し″C該回折パターンの暗部を透過させろよう「こ遮光
体の光束fこ対する光透過パターンを形成することfこ
よっ″C,回折パターンか前記光透過パターンに一致し
ない時と一致した時とで受光部の受光量か大幅に異なる
ようr:、”’(ろことができるので、物体か微細また
は微小な場合でも上述した検出口路8のような簡単な構
成の電気回路を用い1物体の検出が容易fご行えること
lごなる。By configuring C as above, the bright part of the diffraction pattern will be blocked and the dark part of the diffraction pattern will be allowed to pass through. Since the amount of light received by the light receiving section can be significantly different depending on whether the pattern does not match the light transmission pattern or when it matches, the above-mentioned detection port can be used even if the object is minute or minute. It is possible to easily detect a single object using an electric circuit having a simple configuration as shown in line 8.
第1図は本発明の一実施例とし−の光電スイッチ13の
構成図である。図fJおいt、第2図と異なる所は受光
部50光線2を受光するさ4の前面に第4図f:示した
構成の遮光体3が設けろtl 1いることで、この遮光
体3は、第4図「こ示したようニ、長方形の透明カラス
板3Iとこのガラス+1の−面に形成した光線2C二対
し1不透明なアルミニウム蒸着膜32とでS成さね工い
1.さらに、この蒸着膜32に、該蒸着膜により″C第
4図f:示した回折パターンttrこ対応した梯子状の
光透過パターン12を形成するように設けらtll:い
る。そうして、この光透過パターン12は回折パターン
11の明部11a′l:!′遮光し1バダーン11の暗
部11bを透過させろパターンで、また1回折パターン
111’!、微細線9か遮光体3の前方1mの距離C:
あつ1かつ微細@9の遮光体3への正射影か該遮光体の
軸線Y−Yに一致する位置に置か名だ時に、光線2が微
細線9によつt回折さt’tτ遮光体3上に形成されろ
回折パターンである。なお。FIG. 1 is a block diagram of a photoelectric switch 13 according to an embodiment of the present invention. The difference from Figure 2 is that a light shield 3 with the configuration shown in Figure 4 f is provided on the front of the light receiving section 50 that receives the light beam 2. As shown in FIG. 4, a rectangular transparent glass plate 3I and an opaque aluminum evaporated film 32 for each of the light beams 2C formed on the negative side of the glass 1. This vapor deposited film 32 is provided so as to form a ladder-like light transmitting pattern 12 corresponding to the diffraction pattern shown in FIG. Then, this light transmission pattern 12 is the bright part 11a'l of the diffraction pattern 11:! 'A pattern that blocks light and transmits the dark part 11b of 1 badan 11, and 1 diffraction pattern 111'! , distance C of 1 m in front of the fine line 9 and the light shielding body 3:
When the light ray 2 is orthogonally projected onto the light shielding body 3 and is placed at a position that coincides with the axis Y-Y of the light shielding body 3, the light ray 2 is diffracted by the fine line 9 t'tτ the light shielding body 3 is a diffraction pattern formed on the surface. In addition.
第4図「こおい工は、説明の便宜上1本来窓4の前面に
設げらt′+1いろ遮光体3か光透過パターン12図
か見える平面≠の状態で示されtいろ。4. For convenience of explanation, the roof structure is shown in a plane where the light shielding body 3 or light transmitting pattern 12 can be seen.
光電スイッチ!3は上述のように構成され1いろので、
今、第5図1こ示したようI:、0.1−の直径を有−
j6倣細線9か遮光体30軸線Y−Y(第5図におい′
Cも、説明の便宜上、遮光体3か第4図におけると同様
に示しtある。)に平行な姿勢でこの遮光体3の前方1
mの距離に仮想した光線2に直交する平面P上をQ矢印
方向「こ移動したとすると、遮光体3上に形成されろ第
4図r:示した回折パターン11の該遮光体C:おけろ
位置か、第5図1L:例示した■」〜114のようlご
、微細線9の移動に伴つt変化する。このため1回折パ
ターンttか上記パターンtxtのように光透過パター
ン12に一致した状態になると、パターンtttの明部
か遮光体3におけるアルミニウム蒸着膜32によりt受
光部5に入射することを遮られるので。Photoelectric switch! 3 is configured as described above and has 1 color, so
Now, as shown in Figure 1, I: has a diameter of 0.1-.
j6 tracing thin line 9 or light shielding body 30 axis Y-Y (see Fig. 5)
For convenience of explanation, C is also shown as t in the same way as the light shielding body 3 in FIG. ) in front of this light shielding body 3 in a posture parallel to
If it moves in the direction of the arrow Q on a plane P perpendicular to the imaginary light ray 2 at a distance of m, the light will be formed on the light shield 3. The kerosene position changes as shown in FIG. Therefore, when the first diffraction pattern tt matches the light transmission pattern 12 like the above pattern txt, it is blocked from entering the t light receiving section 5 by the bright part of the pattern ttt or the aluminum vapor deposited film 32 on the light shielding body 3. So.
受光部5の受光量か減少し、回折パターン11か上記の
回折パターン112〜114のよう【ζ光透過パターン
12に一致しない状態になると、これらのパターン11
2〜114におけろ明部か光透過パターン12における
透明部を透過するので、受光部5の受光量か増加し1.
この結果、光透過パターン!2か設けらt1″Cいるガ
ラス板31の1′3jII:、一致する仮想平面への微
細線9の正射影の該仮想面上の位置Gと、受光部5の受
光量Wとの関係か第61i!!、lに示した特性線14
のよ51:、 7:cろ。第6図におけ68は遮光体3
のIIII線Y−Yの位置である。When the amount of light received by the light receiving section 5 decreases and the diffraction pattern 11 becomes like the above-mentioned diffraction patterns 112 to 114 [ζ] When the light transmission pattern 12 does not match, these patterns 11
2 to 114, the light passes through the bright portion or the transparent portion of the light transmitting pattern 12, so the amount of light received by the light receiving portion 5 increases.1.
The result is a light transmission pattern! 1'3jII of the glass plate 31 with 2 t1''C: , The relationship between the position G on the virtual plane of the orthogonal projection of the fine line 9 onto the coincident virtual plane and the amount of light received by the light receiving section 5 W? Characteristic line 14 shown in No. 61i!!, l
Noyo51:, 7:cro. 68 in FIG. 6 is the light shielding body 3
This is the position of line III Y-Y.
すなわち、微細線9か第5図のようC:移動すると受光
ψW bs 象6図のよう「こ変化するか、この場合1
回折パターン11か光透優バダーン121ニー致したパ
ターン111の状態では、微細線9による光線20)回
折光がほとんど遮光体3 r:よつt遮らt1’を受光
部5t:入射L 7rいので2回折パターン!lか光透
過パターン12Iニ一致しない時と一致した時とσ〕各
々C:おけろ受光量Wの差ΔWか、計算結果C:よれば
10%以七以北しなる。したかつ−C,光電スイッチ1
3L:おい−C+工、微細紳9か光線2を横切った際【
:生じ6受光量変化ΔWが第2図の光電スイッチ「こお
けろ受光量変化2.5%rご比べCはるか「S大きいの
で、微細線9の有無t′第2図の光電スイッチで用いt
検出回路8と同様な簡単な構成の電気回路を用いt容易
r:検出することかできることC:なる。In other words, as shown in Figure 5, the fine line 9 C: When moving, the light received ψW bs changes as shown in Figure 6. In this case, 1
In the state of the pattern 111 in which the diffraction pattern 11 and the light transmitting badan 121 are aligned, the light rays 20) due to the fine lines 9 are almost completely blocked by the light shielding body 3r: t1' and the light receiving part 5t: the incident L7r. 2nd diffraction pattern! 1 or the light transmitting pattern 12I, when they do not match, when they match, and σ] respectively C: difference ΔW in the amount of received light W, calculated result C: 10% or more. Shitakatsu-C, photoelectric switch 1
3L: Hey-C+technique, when crossing the minute line 9 or ray 2 [
: The change in the amount of light received ΔW is much larger than the change in the amount of light received by the photoelectric switch shown in Figure 2. t
Using an electric circuit with a simple configuration similar to that of the detection circuit 8, the detection can be easily performed.
光電スイッチ13C:おいtは光彷過パターン12をア
ルミニウム蒸着によって形成するものとしたが1本発明
ではアルミニウムとは異なる材料の蒸着によつ℃光透過
パターン12を形成しtもよく、また2本発明ではパタ
ーン12′Ik:金属板に対するエツチング加工や打ち
抜き加工で形成しtもよい。Photoelectric switch 13C: Although the light passing pattern 12 is formed by vapor deposition of aluminum, in the present invention, the light transmission pattern 12 may be formed by vapor deposition of a material different from aluminum. In the present invention, the pattern 12'Ik may be formed by etching or punching a metal plate.
さらCご1本発明におい℃は、光線2を単色光でコ光
ヒーレンスな4.たとえばレーザ光と′fると、干渉パ
ターン111.−おけろ明部11aと暗部ttbとσ)
差か大きくなっ℃、この結果前述の受光量差ΔWか大き
くなるので好都合である。また、上述の実施例は光線2
の遮光状態を検出し1受光部5でスイッチ動作を行っ℃
二値信号8aを出方する光電スイッチであり六−か1本
発明はこのようなスイッチ動作を行う電気装置には限定
さtlないものである。そうしt、さらt:1本発明か
上記の微細線9だけでなく″C微小な球状物体や円状物
体にも適用できろものであることは説明イろまでもな(
明らかである。Furthermore, in the present invention, the temperature is 4.degree. For example, when a laser beam is used, an interference pattern 111. - Light area 11a and dark area ttb and σ)
This is advantageous because the difference ΔW in the amount of received light increases as a result. In addition, the above-mentioned embodiment has the light beam 2
Detects the light-blocking state of
This is a photoelectric switch that outputs a binary signal 8a, and the present invention is not limited to electrical devices that perform such switching operations. It goes without saying that the present invention can be applied not only to the above-mentioned fine wire 9 but also to minute spherical objects and circular objects (
it is obvious.
上述したように1本発明におい゛(は、コヒーレントな
光束を投射″fろ投光部と、前記光束を受光しtこの受
光結果【:応じた検出動作な行う受光部とを備え、受光
部の検出動作C:もとづき光束を遮光イろ物体を検出イ
ろ光学的検出装置におい−C1前記物体か光束を遮光1
6際C:、形成さ4るこの光束の回折パターンC:応じ
た遮光体を受光部の光束を受光する窓またシ:この窓の
前方C,:配置しt光学的検出装置tを構成した。As described above, one aspect of the present invention includes a light projector that projects a coherent light beam, and a light receiver that receives the light beam and performs a detection operation according to the result of the light reception. Detection operation C: Basically, the light flux is blocked and the object is detected.The optical detection device -C1 The object or the light flux is blocked 1
6. A diffraction pattern of this light beam is formed. A corresponding light shielding member is placed in front of the window C, : which receives the light beam of the light receiving part, and an optical detection device t is constructed. .
このため、上記のようC:構@:Tろと1回折パターン
の明部を遮光し1該回折パターンの暗部を透過させろよ
うC:遮光体の光束r:対1−る光透過パターンな形成
することC:よつt1回折バパターン前記光透過パター
ンlニ一致しない時と一致した時とで受光部の受光量が
大幅に異なろようにすることかできるので8本発明r:
fゴ物体か微細または微小な場合でも上述した検出回路
8のような簡単な構成の1M気回路を用い工物体の検出
か容易に行えろ効果がある。For this reason, as shown above, C: structure @: T is used to block the bright part of the diffraction pattern and transmit the dark part of the diffraction pattern. What to do C: The amount of light received by the light receiving section can be made to be significantly different when the light transmitting pattern does not match and when the light transmitting pattern matches.
Even if the object is minute or minute, it is advantageous to be able to easily detect the object by using a 1M air circuit with a simple configuration such as the detection circuit 8 described above.
fXl−1図は本発明の実施例の構成図、第2図は従来
の光電スイッチの構成図2飢3図は物体のつくろ回折バ
ダーン説明図、第4図に第1図に示した遮光体の構成説
明図、第5図t;第1図【に示し、た実施例の動作原理
説明図、第6図に物体の移動r:伴う第1図の受光部へ
の入射光中の変化説明図である。
l・・・・投光部、2・・・・・・光線、3・・・・・
・遮光体、4・・・・・・窓、5・・・・・・受光部、
9・・・・・・物体、10・・・・・・回折バター÷
÷
+
◆
r′−2
′第
図
日
第
′凛
図Fig. fXl-1 is a block diagram of an embodiment of the present invention, Fig. 2 is a block diagram of a conventional photoelectric switch, Figs. Fig. 5 is an explanatory diagram of the operating principle of the embodiment shown in Fig. 1; It is a diagram. l...Light emitter, 2...Light beam, 3...
・Light blocking body, 4... Window, 5... Light receiving part,
9... Object, 10... Diffraction butter ÷ ÷ + ◆ r'-2 'Figure day 'Rin figure
Claims (1)
を受光してこの受光結果に応じた検出動作を行う受光部
とを備え、前記受光部の前記検出動作にもとづき前記光
束を遮光する物体を検出する光学的検出装置において、
前記物体が前記光束を遮光する際に形成される前記光束
の回折パターンに応じた遮光体を前記受光部の前記光束
を受光する窓またはこの窓の前方に配置したことを特徴
とする光学的検出装置。1) An object that includes a light projector that projects a coherent light beam, and a light receiver that receives the light beam and performs a detection operation according to the result of the light reception, and that blocks the light beam based on the detection operation of the light receiver. In an optical detection device that detects
Optical detection characterized in that a light shielding body corresponding to a diffraction pattern of the light flux formed when the object blocks the light flux is disposed in a window of the light receiving section that receives the light flux or in front of this window. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26095288A JPH02106835A (en) | 1988-10-17 | 1988-10-17 | Optical detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26095288A JPH02106835A (en) | 1988-10-17 | 1988-10-17 | Optical detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02106835A true JPH02106835A (en) | 1990-04-18 |
Family
ID=17355051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26095288A Pending JPH02106835A (en) | 1988-10-17 | 1988-10-17 | Optical detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02106835A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010506496A (en) * | 2006-10-05 | 2010-02-25 | デラウェア ステイト ユニバーシティ ファウンデーション,インコーポレイティド | Fiber optic acoustic detector |
-
1988
- 1988-10-17 JP JP26095288A patent/JPH02106835A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010506496A (en) * | 2006-10-05 | 2010-02-25 | デラウェア ステイト ユニバーシティ ファウンデーション,インコーポレイティド | Fiber optic acoustic detector |
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