JPH02108330U - - Google Patents
Info
- Publication number
- JPH02108330U JPH02108330U JP1989015803U JP1580389U JPH02108330U JP H02108330 U JPH02108330 U JP H02108330U JP 1989015803 U JP1989015803 U JP 1989015803U JP 1580389 U JP1580389 U JP 1580389U JP H02108330 U JPH02108330 U JP H02108330U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- substrate
- inlet
- coating
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989015803U JPH02108330U (th) | 1989-02-15 | 1989-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989015803U JPH02108330U (th) | 1989-02-15 | 1989-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02108330U true JPH02108330U (th) | 1990-08-29 |
Family
ID=31228177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989015803U Pending JPH02108330U (th) | 1989-02-15 | 1989-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02108330U (th) |
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1989
- 1989-02-15 JP JP1989015803U patent/JPH02108330U/ja active Pending