JPH02108331U - - Google Patents
Info
- Publication number
- JPH02108331U JPH02108331U JP1723489U JP1723489U JPH02108331U JP H02108331 U JPH02108331 U JP H02108331U JP 1723489 U JP1723489 U JP 1723489U JP 1723489 U JP1723489 U JP 1723489U JP H02108331 U JPH02108331 U JP H02108331U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- recess
- holder body
- depth
- fixing means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Magnetic Heads (AREA)
Description
第１図は本考案の第１実施例によるウエハーホ
ルダーを示す平面図および断面図、第２図は第２
実施例を示す平面図および断面図、第３図は従来
のウエハー着荷状態を示す模式図、第４図はカセ
ツトを示す斜視図である。
図において、１はウエハー、１１，２１はホル
ダー本体、１１ａ，２１ａはオリエンテーシヨン
フラツト、１１―１，２１―１は凹部、１１―１
ａは吸引溝、１１―１ｂは孔、１１―２は吸着溝
、２１―１ａは雌ねじ、２１―２は押しねじ、２
１―３は当て板、を示す。
FIG. 1 is a plan view and a sectional view showing a wafer holder according to a first embodiment of the present invention, and FIG.
FIG. 3 is a schematic diagram showing a conventional wafer loading state, and FIG. 4 is a perspective view showing a cassette. In the figure, 1 is a wafer, 11 and 21 are holder bodies, 11a and 21a are orientation flats, 11-1 and 21-1 are recesses, and 11-1
a is a suction groove, 11-1b is a hole, 11-2 is a suction groove, 21-1a is a female thread, 21-2 is a push screw, 2
1-3 indicates a patch plate.
Claims (1)
に、ウエハー１の外形が遊合できるとともに該ホ
ルダー本体１１の表面に対して該ウエハー１の表
面が同一高さ以上となる深さの凹部１１―１を設
け、該ウエハー１の固着手段１１―１ａを該凹部
１１―１に形成してなることを特徴とするウエハ
ーホルダー。 A recess 11 is formed on one surface of the holder body 11 formed into a disk shape, and has a depth such that the outer shape of the wafer 1 can fit loosely therein, and the surface of the wafer 1 is at least the same height as the surface of the holder body 11. -1, and a fixing means 11-1a for the wafer 1 is formed in the recess 11-1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1723489U JPH02108331U (en) | 1989-02-15 | 1989-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1723489U JPH02108331U (en) | 1989-02-15 | 1989-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02108331U true JPH02108331U (en) | 1990-08-29 |
Family
ID=31230836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1723489U Pending JPH02108331U (en) | 1989-02-15 | 1989-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02108331U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0373452U (en) * | 1989-11-20 | 1991-07-24 | ||
| JP2009061568A (en) * | 2007-09-10 | 2009-03-26 | Disco Abrasive Syst Ltd | Plate processing tray and processing apparatus |
-
1989
- 1989-02-15 JP JP1723489U patent/JPH02108331U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0373452U (en) * | 1989-11-20 | 1991-07-24 | ||
| JP2009061568A (en) * | 2007-09-10 | 2009-03-26 | Disco Abrasive Syst Ltd | Plate processing tray and processing apparatus |