JPH02108728U - - Google Patents
Info
- Publication number
- JPH02108728U JPH02108728U JP1557189U JP1557189U JPH02108728U JP H02108728 U JPH02108728 U JP H02108728U JP 1557189 U JP1557189 U JP 1557189U JP 1557189 U JP1557189 U JP 1557189U JP H02108728 U JPH02108728 U JP H02108728U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- light source
- ultra
- high vacuum
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Particle Accelerators (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1557189U JPH02108728U (ar) | 1989-02-13 | 1989-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1557189U JPH02108728U (ar) | 1989-02-13 | 1989-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02108728U true JPH02108728U (ar) | 1990-08-29 |
Family
ID=31227734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1557189U Pending JPH02108728U (ar) | 1989-02-13 | 1989-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02108728U (ar) |
-
1989
- 1989-02-13 JP JP1557189U patent/JPH02108728U/ja active Pending
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