JPH02110084U - - Google Patents

Info

Publication number
JPH02110084U
JPH02110084U JP1670489U JP1670489U JPH02110084U JP H02110084 U JPH02110084 U JP H02110084U JP 1670489 U JP1670489 U JP 1670489U JP 1670489 U JP1670489 U JP 1670489U JP H02110084 U JPH02110084 U JP H02110084U
Authority
JP
Japan
Prior art keywords
magnetic disks
internal atmosphere
atmosphere regulator
throttle valve
expansion chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1670489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1670489U priority Critical patent/JPH02110084U/ja
Publication of JPH02110084U publication Critical patent/JPH02110084U/ja
Pending legal-status Critical Current

Links

JP1670489U 1989-02-15 1989-02-15 Pending JPH02110084U (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1670489U JPH02110084U (2) 1989-02-15 1989-02-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1670489U JPH02110084U (2) 1989-02-15 1989-02-15

Publications (1)

Publication Number Publication Date
JPH02110084U true JPH02110084U (2) 1990-09-03

Family

ID=31229863

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1670489U Pending JPH02110084U (2) 1989-02-15 1989-02-15

Country Status (1)

Country Link
JP (1) JPH02110084U (2)

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