JPH02112328U - - Google Patents

Info

Publication number
JPH02112328U
JPH02112328U JP2255089U JP2255089U JPH02112328U JP H02112328 U JPH02112328 U JP H02112328U JP 2255089 U JP2255089 U JP 2255089U JP 2255089 U JP2255089 U JP 2255089U JP H02112328 U JPH02112328 U JP H02112328U
Authority
JP
Japan
Prior art keywords
raw material
sealed chamber
liquid raw
shielding plate
edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2255089U
Other languages
English (en)
Other versions
JPH0612825Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2255089U priority Critical patent/JPH0612825Y2/ja
Publication of JPH02112328U publication Critical patent/JPH02112328U/ja
Application granted granted Critical
Publication of JPH0612825Y2 publication Critical patent/JPH0612825Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】
第1図はこの考案の一実施例の構成図、第2図
はその要部を示す一部切欠断面図、第3図および
第4図は従来例の構成図である。 10……原料タンク、18……原料取出用配管
、2……密封室、25……底面部、26……ノズ
ル部、27……堰、28……遮蔽板、33……配
管、35……処理室。

Claims (1)

    【実用新案登録請求の範囲】
  1. 液体原料タンクから液体原料供給用配管を延設
    してその先端を密封室の下端に連結するとともに
    、その密封室の下側に加熱手段を設け、上記液体
    原料タンクから送られてくる液体原料を上記密封
    室で加熱蒸発させその気化原料を上記密封室の上
    端から延びる気体原料取出用配管を介して処理室
    に送り込む蒸発器であつて、上記密封室内の底面
    を、上記液体原料供給用配管の先端が連結された
    注入用開口部を中心として、外側に向かつて徐々
    に低くなつた円形の段状に形成するとともに、そ
    の段状の各段の縁部に、その縁部に沿つてリング
    状になつた堰を設け、上記底面の上方に、液体原
    料飛散防止用の円板状遮蔽板を設け、この遮蔽板
    と上記密封室の内周壁および天井面との間を気化
    原料通過用の通路に形成したことをことを特徴と
    する蒸発器。
JP2255089U 1989-02-28 1989-02-28 蒸発器 Expired - Lifetime JPH0612825Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2255089U JPH0612825Y2 (ja) 1989-02-28 1989-02-28 蒸発器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2255089U JPH0612825Y2 (ja) 1989-02-28 1989-02-28 蒸発器

Publications (2)

Publication Number Publication Date
JPH02112328U true JPH02112328U (ja) 1990-09-07
JPH0612825Y2 JPH0612825Y2 (ja) 1994-04-06

Family

ID=31240770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2255089U Expired - Lifetime JPH0612825Y2 (ja) 1989-02-28 1989-02-28 蒸発器

Country Status (1)

Country Link
JP (1) JPH0612825Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0624895A (ja) * 1992-07-06 1994-02-01 Fujikura Ltd Cvd原料気化装置
JPH0747201A (ja) * 1993-08-06 1995-02-21 Toshiba Corp 気化装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0624895A (ja) * 1992-07-06 1994-02-01 Fujikura Ltd Cvd原料気化装置
JPH0747201A (ja) * 1993-08-06 1995-02-21 Toshiba Corp 気化装置

Also Published As

Publication number Publication date
JPH0612825Y2 (ja) 1994-04-06

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