JPH02113145U - - Google Patents
Info
- Publication number
- JPH02113145U JPH02113145U JP2235989U JP2235989U JPH02113145U JP H02113145 U JPH02113145 U JP H02113145U JP 2235989 U JP2235989 U JP 2235989U JP 2235989 U JP2235989 U JP 2235989U JP H02113145 U JPH02113145 U JP H02113145U
- Authority
- JP
- Japan
- Prior art keywords
- container
- probe gas
- standard
- leak device
- leakage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Examining Or Testing Airtightness (AREA)
Description
第１図はこの考案による標準リーク器の構成を
示す図、第２図は変形例を示す図、第３図は従来
の構成を示す図である。
１，１Ｌ，１Ｒ…容器、２…流出管、３…ベロ
ーズ、４…支持杆、５，６…支持板、７…プねじ
杆、８…調整用ナツト、９…ダイヤフラム、１０
…圧力計、Ｇ…プローブガス、Ｒ…接続具、Ｖ…
開閉弁。
FIG. 1 is a diagram showing the configuration of a standard leak device according to this invention, FIG. 2 is a diagram showing a modified example, and FIG. 3 is a diagram showing a conventional configuration. 1, 1L, 1R... Container, 2... Outflow pipe, 3... Bellows, 4... Support rod, 5, 6... Support plate, 7... Screw rod, 8... Adjustment nut, 9... Diaphragm, 10
...Pressure gauge, G...Probe gas, R...Connection, V...
Open/close valve.
Claims (1)
プローブガスを一定量ずつ流出させる手段を具備
し、この一定量の流出を標準のリーク量として利
用するようにしたリーク器において、前記容器の
容積を可変させる可変機構を設け、容器内のプロ
ーブガス圧力を調整できるようにしたことを特徴
とする標準リーク器。 A leak device is equipped with a container filled with a probe gas and a means for causing the probe gas in the container to flow out in fixed amounts, and this fixed amount of leakage is used as a standard leakage amount. A standard leak device characterized by being equipped with a variable mechanism to adjust the probe gas pressure inside the container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2235989U JPH02113145U (en) | 1989-02-27 | 1989-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2235989U JPH02113145U (en) | 1989-02-27 | 1989-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02113145U true JPH02113145U (en) | 1990-09-11 |
Family
ID=31240405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2235989U Pending JPH02113145U (en) | 1989-02-27 | 1989-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02113145U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014080798A1 (en) * | 2012-11-21 | 2014-05-30 | 独立行政法人産業技術総合研究所 | Reference leak generating device and ultra-fine leak testing device using same |
| JP2015519580A (en) * | 2012-06-14 | 2015-07-09 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングＩｎｆｉｃｏｎ ＧｍｂＨ | Inspection device having a gas container for inspection |
| JP2015537209A (en) * | 2012-11-05 | 2015-12-24 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングＩｎｆｉｃｏｎ ＧｍｂＨ | How to inspect a leak detection system |
| JP2016528492A (en) * | 2013-08-02 | 2016-09-15 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングＩｎｆｉｃｏｎ ＧｍｂＨ | Leak tester with integrated pressure sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3516278A (en) * | 1967-04-17 | 1970-06-23 | Euratom | Apparatus for producing calibrated leaks |
| JPS6122245A (en) * | 1984-07-10 | 1986-01-30 | Sanyo Electric Co Ltd | Humidity sensor |
-
1989
- 1989-02-27 JP JP2235989U patent/JPH02113145U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3516278A (en) * | 1967-04-17 | 1970-06-23 | Euratom | Apparatus for producing calibrated leaks |
| JPS6122245A (en) * | 1984-07-10 | 1986-01-30 | Sanyo Electric Co Ltd | Humidity sensor |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015519580A (en) * | 2012-06-14 | 2015-07-09 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングＩｎｆｉｃｏｎ ＧｍｂＨ | Inspection device having a gas container for inspection |
| JP2015537209A (en) * | 2012-11-05 | 2015-12-24 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングＩｎｆｉｃｏｎ ＧｍｂＨ | How to inspect a leak detection system |
| WO2014080798A1 (en) * | 2012-11-21 | 2014-05-30 | 独立行政法人産業技術総合研究所 | Reference leak generating device and ultra-fine leak testing device using same |
| JPWO2014080798A1 (en) * | 2012-11-21 | 2017-01-05 | 国立研究開発法人産業技術総合研究所 | Reference leak generator and ultra-fine leak test apparatus using the same |
| JP2016528492A (en) * | 2013-08-02 | 2016-09-15 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングＩｎｆｉｃｏｎ ＧｍｂＨ | Leak tester with integrated pressure sensor |
| US10101237B2 (en) | 2013-08-02 | 2018-10-16 | Inficon Gmbh | Test leak device having integrated pressure sensor |