JPH0211330U - - Google Patents
Info
- Publication number
- JPH0211330U JPH0211330U JP8852688U JP8852688U JPH0211330U JP H0211330 U JPH0211330 U JP H0211330U JP 8852688 U JP8852688 U JP 8852688U JP 8852688 U JP8852688 U JP 8852688U JP H0211330 U JPH0211330 U JP H0211330U
- Authority
- JP
- Japan
- Prior art keywords
- movable
- guide
- feed screw
- plate
- movable plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Transmission Devices (AREA)
- Wire Bonding (AREA)
- Die Bonding (AREA)
Description
第１図は本発明の実施例の、分離状態の斜視図
である。
１……ガイドブロツク、２……下方移動板、３
……ガイドレール、４……送りネジ、５……ナツ
ト部材、６……上方移動板、７……ガイドレール
、８……連結バー、９……リニアガイド、１０…
…移動台、１１……送りネジ、１２……ナツト部
材、１３……軸受。
FIG. 1 is a perspective view of an embodiment of the present invention in a separated state. 1...Guide block, 2...Downward moving plate, 3
... Guide rail, 4 ... Feed screw, 5 ... Nut member, 6 ... Upward moving plate, 7 ... Guide rail, 8 ... Connection bar, 9 ... Linear guide, 10 ...
...Moving table, 11...Feed screw, 12...Nut member, 13...Bearing.
Claims (1)
てガイドブロツクに対してＸ方向に移動可能に支
持し、下方移動板の上方には上方移動板をＹ方向
に移動自在に支持し、前記ガイドブロツクに対し
て直交方向にリニアガイドを設け、該リニアガイ
ドに座乗され、送りネジによりＹ方向に移動可能
とされた移動台を設け、該移動台と前記上方移動
板とをＸ方向には互いに移動自在に、Ｙ方向には
移動不能に連結したことを特徴とするボンデイン
グ装置におけるＸＹテーブル。 A downwardly movable plate is supported movably in the X direction with respect to a guide block via a feed screw provided below, an upwardly movable plate is supported above the downwardly movable plate so as to be movable in the Y direction, and the guide A linear guide is provided in a direction perpendicular to the block, a moving table is provided which is seated on the linear guide and is movable in the Y direction by a feed screw, and the moving table and the upward moving plate are moved in the X direction. An XY table in a bonding apparatus, characterized in that the XY tables are connected to each other so as to be movable with respect to each other, but not to be movable in the Y direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988088526U JPH079377Y2 (en) | 1988-07-05 | 1988-07-05 | XY table in bonding equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988088526U JPH079377Y2 (en) | 1988-07-05 | 1988-07-05 | XY table in bonding equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0211330U true JPH0211330U (en) | 1990-01-24 |
| JPH079377Y2 JPH079377Y2 (en) | 1995-03-06 |
Family
ID=31313085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988088526U Expired - Lifetime JPH079377Y2 (en) | 1988-07-05 | 1988-07-05 | XY table in bonding equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079377Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0630004U (en) * | 1992-09-24 | 1994-04-19 | 株式会社石津製作所 | Strainer pack |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5371569A (en) * | 1976-12-08 | 1978-06-26 | Hitachi Ltd | X y moving table |
| JPS5952540A (en) * | 1982-09-20 | 1984-03-27 | 株式会社富士電機総合研究所 | Electromagnetic type crushing and mixing apparatus |
| JPS62147737A (en) * | 1985-12-23 | 1987-07-01 | Toshiba Corp | X-y table for wire bonder |
-
1988
- 1988-07-05 JP JP1988088526U patent/JPH079377Y2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5371569A (en) * | 1976-12-08 | 1978-06-26 | Hitachi Ltd | X y moving table |
| JPS5952540A (en) * | 1982-09-20 | 1984-03-27 | 株式会社富士電機総合研究所 | Electromagnetic type crushing and mixing apparatus |
| JPS62147737A (en) * | 1985-12-23 | 1987-07-01 | Toshiba Corp | X-y table for wire bonder |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0630004U (en) * | 1992-09-24 | 1994-04-19 | 株式会社石津製作所 | Strainer pack |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH079377Y2 (en) | 1995-03-06 |