JPH02118237U - - Google Patents

Info

Publication number
JPH02118237U
JPH02118237U JP2623389U JP2623389U JPH02118237U JP H02118237 U JPH02118237 U JP H02118237U JP 2623389 U JP2623389 U JP 2623389U JP 2623389 U JP2623389 U JP 2623389U JP H02118237 U JPH02118237 U JP H02118237U
Authority
JP
Japan
Prior art keywords
sensor chip
diaphragm
support base
metal
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2623389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0650750Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2623389U priority Critical patent/JPH0650750Y2/ja
Publication of JPH02118237U publication Critical patent/JPH02118237U/ja
Application granted granted Critical
Publication of JPH0650750Y2 publication Critical patent/JPH0650750Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP2623389U 1989-03-08 1989-03-08 振動形差圧センサ Expired - Lifetime JPH0650750Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2623389U JPH0650750Y2 (ja) 1989-03-08 1989-03-08 振動形差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2623389U JPH0650750Y2 (ja) 1989-03-08 1989-03-08 振動形差圧センサ

Publications (2)

Publication Number Publication Date
JPH02118237U true JPH02118237U (th) 1990-09-21
JPH0650750Y2 JPH0650750Y2 (ja) 1994-12-21

Family

ID=31247678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2623389U Expired - Lifetime JPH0650750Y2 (ja) 1989-03-08 1989-03-08 振動形差圧センサ

Country Status (1)

Country Link
JP (1) JPH0650750Y2 (th)

Also Published As

Publication number Publication date
JPH0650750Y2 (ja) 1994-12-21

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