JPH02118930U - - Google Patents
Info
- Publication number
- JPH02118930U JPH02118930U JP2777689U JP2777689U JPH02118930U JP H02118930 U JPH02118930 U JP H02118930U JP 2777689 U JP2777689 U JP 2777689U JP 2777689 U JP2777689 U JP 2777689U JP H02118930 U JPH02118930 U JP H02118930U
- Authority
- JP
- Japan
- Prior art keywords
- turntable
- carrier
- wafer
- wafers
- high speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 11
- 239000000969 carrier Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2777689U JPH02118930U (cs) | 1989-03-09 | 1989-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2777689U JPH02118930U (cs) | 1989-03-09 | 1989-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02118930U true JPH02118930U (cs) | 1990-09-25 |
Family
ID=31250567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2777689U Pending JPH02118930U (cs) | 1989-03-09 | 1989-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02118930U (cs) |
-
1989
- 1989-03-09 JP JP2777689U patent/JPH02118930U/ja active Pending
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