JPH02120075U - - Google Patents
Info
- Publication number
- JPH02120075U JPH02120075U JP2811489U JP2811489U JPH02120075U JP H02120075 U JPH02120075 U JP H02120075U JP 2811489 U JP2811489 U JP 2811489U JP 2811489 U JP2811489 U JP 2811489U JP H02120075 U JPH02120075 U JP H02120075U
- Authority
- JP
- Japan
- Prior art keywords
- prober base
- prober
- inspected
- locking
- cam body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 3
Landscapes
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
Description
第１図は本考案の一実施例を示すプローバー装
置の平面図、第２図は同装置の正面図、第３図は
同装置の左側面図、第４図〜第６図は動作過程を
示す上記プローバー装置の部分的な平面図、第７
図は従来例として示したプローバー装置の簡略平
面図である。
２１……スライダベース、２２……直進スライ
ダ、２３……プローバーベース、２４，２５……
ストツパー、２８……アクチユエータ、２９……
係止レバー、３１……カムフオロア、３６……プ
ローブ板、３７……カム杆、３７ａ……カム部、
３８，３９……プローブピン。
Fig. 1 is a plan view of a prober device showing an embodiment of the present invention, Fig. 2 is a front view of the same device, Fig. 3 is a left side view of the same device, and Figs. 4 to 6 show the operating process. FIG. 7 is a partial plan view of the prober device shown in FIG.
The figure is a simplified plan view of a prober device shown as a conventional example. 21... Slider base, 22... Straight slider, 23... Prober base, 24, 25...
Stopper, 28... Actuator, 29...
Locking lever, 31... cam follower, 36... probe plate, 37... cam rod, 37a... cam part,
38, 39...probe pin.
Claims (1)
退する構成としたプローバーベースと、このプロ
ーバーベースに備えたアクチユエータにより駆動
して、当該プローバーベースと同方向に移動させ
る移動部材に設けたカム体と、上記移動部材の移
動下に上記カム体によつて押動され、ばね勢力に
抗して第１位置から第２位置へ変位する上記プロ
ーバーベースに設けた被検査物係止用の係止部材
と、上記移動部材に設けて上記係止部材によつて
係止された被検査物に対接自在とすると共に、常
時突出勢力を与えたプローブピンとより構成した
ことを特徴とするプローバー装置。 A prober base configured to move linearly forward and backward on a fixed body using a slider mechanism, and a cam body provided on a movable member that is driven by an actuator provided on the prober base to move in the same direction as the prober base. , a locking member for locking the object to be inspected, which is provided on the prober base and is pushed by the cam body while the moving member moves, and is displaced from the first position to the second position against a spring force; and a probe pin provided on the movable member so as to be able to freely come into contact with the object to be inspected that is locked by the locking member and constantly applying a protruding force.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2811489U JPH02120075U (en) | 1989-03-14 | 1989-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2811489U JPH02120075U (en) | 1989-03-14 | 1989-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02120075U true JPH02120075U (en) | 1990-09-27 |
Family
ID=31251205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2811489U Pending JPH02120075U (en) | 1989-03-14 | 1989-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02120075U (en) |
-
1989
- 1989-03-14 JP JP2811489U patent/JPH02120075U/ja active Pending