JPH02120844U - - Google Patents
Info
- Publication number
- JPH02120844U JPH02120844U JP2923989U JP2923989U JPH02120844U JP H02120844 U JPH02120844 U JP H02120844U JP 2923989 U JP2923989 U JP 2923989U JP 2923989 U JP2923989 U JP 2923989U JP H02120844 U JPH02120844 U JP H02120844U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- line sensor
- orientation flat
- positioning device
- wafer positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
Description
第１図および第２図は本考案の一実施例の構成
を示す構成図、第３図は本考案の他の実施例の構
成を示す構成図、第４図は従来例の構成を示す構
成図である。
主要部分の符号の説明、１……ウエハ、１ａ…
…オリエンテーシヨンフラツト、６，１０……ラ
インセンサ、７……制御回路、９……２分割デイ
テクタ。
1 and 2 are configuration diagrams showing the configuration of one embodiment of the present invention, FIG. 3 is a configuration diagram showing the configuration of another embodiment of the present invention, and FIG. 4 is a configuration diagram showing the configuration of a conventional example. It is a diagram. Explanation of symbols of main parts, 1...Wafer, 1a...
... Orientation flat, 6, 10 ... Line sensor, 7 ... Control circuit, 9 ... Two-part detector.
Claims (1)
ンフラツトの位置決めを行うウエハ位置決め装置
であつて、前記ラインセンサとの間隔が前記オリ
エンテーシヨンフラツトの長さより小さくなるよ
うに予め設定された所定間隔で設置され、前記ウ
エハの投影の境界位置を検出する光検出器を有す
ることを特徴とするウエハ位置決め装置。 A wafer positioning device that positions a wafer on an orientation flat using a line sensor, the wafer positioning device being installed at a predetermined interval so that the distance from the line sensor is smaller than the length of the orientation flat. , a wafer positioning apparatus comprising a photodetector for detecting a boundary position of the projection of the wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2923989U JPH02120844U (en) | 1989-03-15 | 1989-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2923989U JPH02120844U (en) | 1989-03-15 | 1989-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02120844U true JPH02120844U (en) | 1990-09-28 |
Family
ID=31253280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2923989U Pending JPH02120844U (en) | 1989-03-15 | 1989-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02120844U (en) |
-
1989
- 1989-03-15 JP JP2923989U patent/JPH02120844U/ja active Pending
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