JPH02122368U - - Google Patents

Info

Publication number
JPH02122368U
JPH02122368U JP8256488U JP8256488U JPH02122368U JP H02122368 U JPH02122368 U JP H02122368U JP 8256488 U JP8256488 U JP 8256488U JP 8256488 U JP8256488 U JP 8256488U JP H02122368 U JPH02122368 U JP H02122368U
Authority
JP
Japan
Prior art keywords
semiconductor device
measuring device
back surface
pallet board
socket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8256488U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8256488U priority Critical patent/JPH02122368U/ja
Publication of JPH02122368U publication Critical patent/JPH02122368U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は考案の一実施例である半導体装置の測
定装置示す正面断面図、第２図ａ，ｂは接触子と
接触板との開離および接触状態を示した動作説明
図、第３図ａ，ｂ，ｃはパレツトボードのハンド
リング状態を示す断面正面図、第３図ｄはパレツ
トボードの斜視図、第４図ａ，ｂはこの考案の他
の実施例を示す半導体装置の測定装置の斜視図お
よび正面断面図、第５図は従来の半導体装置の測
定装置の正面断面図を示す。 図において、１……半導体装置、２……定盤、
３……ＩＣソケツト、４……パレツトボード、５
……ソケツトボード、９……計測機、１０……ピ
ンソケツト、１１……接触子、１２……接触子台
、１３……アクチエータ、１４……駆動アーム、
１５……接触板、１６……板、１７……円板を示
す。なお、図中、同一符号は同一、または相当部
分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 表面にＩＣソケツトを複数個実装し、裏面に各
    ＩＣソケツト対応で半導体装置の電極リードと接
    続される電極パターンを備えたパレツトボードを
    ハンドリングして計測機部に脱着させる半導体装
    置の測定装置において、前記パレツトボードの裏
    面パターンの外部電極部を半導体装置の接触子配
    列にかかわらず統一させたことを特徴とする半導
    体装置の測定装置。
JP8256488U 1988-06-21 1988-06-21 Pending JPH02122368U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8256488U JPH02122368U (ja) 1988-06-21 1988-06-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8256488U JPH02122368U (ja) 1988-06-21 1988-06-21

Publications (1)

Publication Number Publication Date
JPH02122368U true JPH02122368U (ja) 1990-10-05

Family

ID=31307314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8256488U Pending JPH02122368U (ja) 1988-06-21 1988-06-21

Country Status (1)

Country Link
JP (1) JPH02122368U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04343485A (ja) * 1991-05-21 1992-11-30 Dowa Mining Co Ltd 半導体ペレット選別装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6234383B2 (ja) * 1979-06-21 1987-07-27 Emu Guriin Uiriamu
JPS62298781A (ja) * 1986-06-18 1987-12-25 Mitsubishi Electric Corp デバイス特性測定用ハンドラ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6234383B2 (ja) * 1979-06-21 1987-07-27 Emu Guriin Uiriamu
JPS62298781A (ja) * 1986-06-18 1987-12-25 Mitsubishi Electric Corp デバイス特性測定用ハンドラ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04343485A (ja) * 1991-05-21 1992-11-30 Dowa Mining Co Ltd 半導体ペレット選別装置

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