JPH02122446U - - Google Patents
Info
- Publication number
- JPH02122446U JPH02122446U JP3238589U JP3238589U JPH02122446U JP H02122446 U JPH02122446 U JP H02122446U JP 3238589 U JP3238589 U JP 3238589U JP 3238589 U JP3238589 U JP 3238589U JP H02122446 U JPH02122446 U JP H02122446U
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical body
- coil
- suction nozzle
- center electrode
- insulated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000696 magnetic material Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例に係る測定端子の要
部断面図、第２図イからハは何れも同実施理例の
測定端子を用いた検査工程を説明する要部断面図
である。第３図は従来の半導体ペレツトの吸着治
具の断面図である。
３……筒状本体、３１……吸引用ノズル、３３
……コイル、４……中心電極、４１……絶縁膜。
Fig. 1 is a sectional view of a main part of a measuring terminal according to an embodiment of the present invention, and Fig. 2 A to C are sectional views of main parts explaining an inspection process using a measuring terminal of the same embodiment. . FIG. 3 is a sectional view of a conventional semiconductor pellet suction jig. 3... Cylindrical body, 31... Suction nozzle, 33
... Coil, 4 ... Center electrode, 41 ... Insulating film.
Claims (1)
ると共に上部外周面にコイルを外挿し、該筒状本
体内に磁性体の中心電極を該筒状本体と絶縁状態
で上下動自在に内挿したことを特徴とする測定端
子。 A suction nozzle is provided protruding from the side wall of the conductive cylindrical body, a coil is externally inserted into the upper outer peripheral surface, and a center electrode of a magnetic material is inserted into the cylindrical body so as to be movable up and down while being insulated from the cylindrical body. A measurement terminal characterized by being inserted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3238589U JPH02122446U (en) | 1989-03-22 | 1989-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3238589U JPH02122446U (en) | 1989-03-22 | 1989-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02122446U true JPH02122446U (en) | 1990-10-08 |
Family
ID=31258845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3238589U Pending JPH02122446U (en) | 1989-03-22 | 1989-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02122446U (en) |
-
1989
- 1989-03-22 JP JP3238589U patent/JPH02122446U/ja active Pending