JPH0212327B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a combustion device that treats exhaust gases harmful to the human body and dangerous, particularly silane gas, to render them harmless.

[Technical background] Among exhaust gases that are harmful and dangerous to the human body, silane gas in particular is produced during the manufacturing process of semiconductors, etc. This silane gas is harmful to the human body, and the gas itself comes into contact with the air. Silane gas is explosive, highly flammable, and has a strong odor, and strict regulations are in place for its release into the atmosphere.

Furthermore, when silane gas is produced in large quantities, it may be used not only as exhaust gas but also as a raw material for other substances.

[Prior Art] There are generally two types of methods used to dispose of silane gas.

The first method is to mix silane gas with a different gas, such as an inert gas, and then, when explosions and spontaneous combustion phenomena no longer occur, add atmospheric air to dilute the silane gas until material safety is guaranteed. means to release it into the atmosphere.

The second means is to employ a system that releases the gas that has been combusted into a harmless state into the atmosphere.

[Problems to be Solved by the Invention] The former of the two conventional silane gas treatment means described above has a strong odor as described above, and is not released into the atmosphere. As a guideline for dilution standards, the gas to be diluted must be diluted until the above-mentioned unpleasant odor is no longer observed, and the dilution ratio required to reach this state is from several thousand times to 10,000 times. However, these dilution methods are impractical because they must be carried out in a fixed container, and as mentioned above, combustion occurs when exposed to the atmosphere. It was difficult.

The latter combustion means described above involves inserting the atmosphere into a certain sealed container, inserting a pipe for introducing the silane gas, and ejecting it from a nozzle provided at the tip of the pipe, which causes the silane gas to come into contact with the atmosphere. It burns, but during the combustion, a large amount of combustion residue is produced, and the residue closes the nozzle opening and obstructs the ejection of silane gas, so after confirming safety, open the container and prevent it from clogging. Currently, work is being carried out to remove the remaining debris.

As described above, this invention was developed in order to eliminate the complexity of silane gas processing means.In particular, in a sealed combustion cylinder, a water seal combustor is used as a silane gas combustion means, and the nozzle structure means is The main purpose of this system is to simultaneously achieve the two purposes of eliminating flashback to the silane gas supply pipe and preventing flashback to the silane gas supply pipe.

[Means for Solving the Problems] As a means for achieving the above object, the present invention provides an exhaust gas injection nozzle in a tank of a water-sealed combustor that can send exhaust gas to an airtight combustion tube. When inserted and opened, an air supply pipe is connected and opened at the middle part of the combustion cylinder, and an exhaust pipe is provided at the upper part of the combustion cylinder.

[Function] As a detoxifying means for releasing the exhaust gas, especially silane gas, treated by the apparatus of the present invention into the atmosphere as a harmless gas, it basically burns to remove and eliminate harmful substances.

As mentioned above, the silane gas itself exhibits an explosive combustion state when it comes into contact with air, and at the same time produces a large amount of solidified combustion residue. The basic technical idea is to bring the gas floating on the water surface into contact with air in a sealed container and combust it.The action of these water seal combustors is to reverse the combustion phenomenon to the silane gas supply pipe. The first purpose is to prevent fire, and the second purpose is to prevent clogging due to adhesion of combustion residue produced during combustion by providing a means for bringing the silane gas discharged from the water-sealed combustor into contact with the atmosphere. The point is that the use of nozzles has been completely eliminated for the purpose of

As mentioned above, when silane gas is burned, a large amount of residue is produced, and in order to remove the residue contained in the exhaust gas that has been rendered harmless by combustion and is sucked out to the outside through the exhaust pipe, In order not to interfere with the configuration of a filter connected to the outside of the combustion cylinder, which is outside the scope of the present invention, the structure is such that the exhaust gas that has become hot due to the combustion action can be simultaneously cooled inside the combustion cylinder.

Additionally, as mentioned above, silane gas itself burns when it comes into contact with the atmosphere.
Inert gas may be used in the process at the work site where the silane gas is generated. in this case,
The silane gas to be treated may be slightly diluted, and incomplete combustion may occur due to mere contact with the atmosphere in the combustion cylinder. This device is equipped with a device that can be expected to have a combustion-assisting effect.

[Example] Now, the example will be explained with reference to the drawings.
The one shown in the figure has several ribs 6 radially attached to the inside of a combustion cylinder 1 formed in an airtight manner, facing inward, and a water tank 7 whose lower surface is closed is placed and fixed on the ribs 6. A water seal combustor 2 is formed by filling a water tank 7 with water. A cylindrical exhaust gas injection nozzle 3 with a closed top, which has numerous small holes 9 in the side plate 8, is inserted into the water seal combustor 2, and an exhaust gas supply pipe 10 is connected and opened to the upper part of the injection nozzle 3, and the exhaust gas The air supply pipe 10 is opened to protrude from the side surface of the combustion cylinder 1. A drain pipe 4, which also serves as an air inlet, is connected and opened below the installation location of the rib 6 provided for mounting and supporting the combustion cylinder 1.

Furthermore, an exhaust pipe 5 is connected and opened at the upper part of the combustion tube 1, and a water injection nozzle 11 is provided slightly below the exhaust pipe 5 to form the whole.

12 is a viewing window provided in the combustion tube 1, 13 is a water supply pipe, and 14 is a discharge pipe.

With the above configuration, exhaust gas (hereinafter described as silane gas) is sent from the exhaust gas supply pipe 10, and the exhaust gas is injected into the water from the small hole 9 of the injection nozzle 3, and air is sent from the drain pipe 4, which also serves as the air insertion port. When the air passes between the ribs 6, the water tank 7 and the combustion tube 1 and rises, the silane gas injected from the water seal combustor 2 will burn when it comes into contact with the air, so the burned combustion gas will flow into the water at the top. It is cooled by the water injected from the injection nozzle 11 and exhausted to the outside from the exhaust pipe 5.

The combustion tube 1 is divided into upper and lower parts at the middle part where the water tank 7 is located, and a flange 15 is attached to the divided end, and the flange 15 is fixed with bolts and nuts. If formed, the combustion tube 1 can be repaired easily.

In the case of Fig. 2, a drain pipe 4 which also serves as an air inlet is connected and opened near the bottom of the combustion tube 1 which is formed airtight, and the drain pipe 4 is filled with water up to its lower circumference to form a water-sealed combustor. At the same time, an exhaust gas injection nozzle 3 is inserted into the water seal combustor 2 and an exhaust gas feed pipe 10 connected to the exhaust gas injection nozzle 3 is made to protrude from the upper part of the combustion tube 1. An air inlet pipe 16 is inserted inward, and a demister 17 is attached to the lower end of the air inlet pipe 16.

Furthermore, an exhaust pipe 5 is connected and opened at the upper part of the combustion tube 1.

12 is a window, and 18 is a water injection nozzle.

With the above configuration, when the exhaust gas is injected into the water of the water seal combustor 2 from the injection nozzle 3 via the exhaust gas supply pipe 10, the exhaust gas is sent to the water surface, and air is sent from the drain pipe 4, the silane gas (exhaust gas) comes into contact with the air. Burn. In the combustion tube 1 exhibiting these combustion effects, water droplets injected from the water injection nozzle 18' stop at the mesh forming the outer periphery of the demister 17 located in the middle, and are ejected radially from the demister 17. A spray-like atmosphere is formed by being blown away by compressed air, which is vaporized and cooled by the combustion heat of the silane gas, and the exhaust gas rendered harmless by the combustion action is exhausted to the outside through the exhaust pipe 5.

The one in Figure 3 is basically the same as the one shown in Figures 1 and 2, but the structure is slightly different, so I will explain it now. Exhaust gas air pipe 19 at the bottom of 1
A drain pipe 4 is connected and opened at the bottom just after the exhaust gas feed pipe 19 is connected to the bottom surface of the combustion cylinder 1. The lower end of the exhaust gas air pipe 19 is connected to the center of the upper part of the water seal tank 20 which is formed airtight.
Water is poured into the tank to form a water seal combustor 2, an exhaust gas injection nozzle 3 is inserted into the water bed 2, and an exhaust gas air pipe 10 connected to the injection nozzle 3 is projected to the outside of the water seal tank 20. It is something.

Reference numeral 21 denotes a safety device, which has a cylindrical shape and is airtight, into which an exhaust gas pipe 22 provided in the water seal tank 20 is inserted and opened near the lower end. A drain pipe 23 is open and connected to the center of the side of the safety device 21, and one end of the drain pipe 23 is bent downward.

25 is a valve that adjusts the amount of exhaust gas.

Reference numeral 26 is a pilot burner in which an ignition part is located near where exhaust gas and air are mixed and combusted.

27 is a heat insulating layer surrounding the combustion tube 1, 28 is a heat insulating layer 2
It is an outer cylinder surrounding 7. Reference numeral 29 indicates an umbrella provided at the upper end of the exhaust pipe 18.

With the above configuration, silane gas is sent into the water seal combustor 2 via the exhaust gas supply pipe 10 and injected from the injection nozzle 3 through a small hole, etc., and the silane gas injected onto the water surface is sent to the combustion tube via the exhaust gas supply pipe 19. At this time, air is sent from the drain pipe 4 to the upper end of the exhaust gas pipe 19 via a pump, and the silane gas comes into contact with the air and burns, and the silane gas is injected into the lower part of the exhaust pipe 1.
It is exhausted from 8.

The amount of silane gas to be injected is adjusted by adjusting the valve 25 to ensure complete combustion by the air being sent.Furthermore, the amount of silane gas to be injected is determined to be an inert gas depending on the type of work of the silane gas generation source. In some cases, silane gas containing an inert gas may cause incomplete combustion if it only comes into contact with air in the combustion tube 1, so in order to prevent this incomplete combustion, silane gas containing an inert gas may cause incomplete combustion. By igniting the pilot burner 26, which is provided in such a way that it can be expected, combustion can be ensured.

Reference numeral 30 denotes an air intake pipe with small holes provided on the bottom surface of the combustion tube 1 through the heat insulating layer 27, and several of these are provided on the bottom surface to ensure that the combusted exhaust gas is sent out from the exhaust tube 18. be.

[Effects of the Invention] In the present application, highly flammable exhaust gas, especially silane gas, which has passed through the water of the water seal combustor, is combusted by contact with the atmosphere in the combustion cylinder, so the combustion flame travels backward through the water and the exhaust gas is The phenomenon of igniting the exhaust gas in the air pipe can be completely prevented, and by completely eliminating the installation of injection nozzles, which were used as a means of bringing the exhaust gas into contact with the atmosphere, the phenomenon of nozzle clogging that previously occurred can be further reduced. There is no need for these removal operations, and hazardous substances can be automatically and continuously converted into safe and detoxified substances through combustion and released into the atmosphere with almost no maintenance required. It's effective.

[Brief explanation of drawings]

1 to 3 are cross-sectional views showing embodiments of the present application.

Claims (1)

[Claims] 1. Insert the exhaust gas injection nozzle into the tank of the water-sealed combustor that allows exhaust gas to be sent to the airtight combustion tube, open it, and connect and open the air supply pipe to the middle part of the combustion tube. An exhaust gas combustion device characterized in that an exhaust pipe is provided at the top of a combustion tube.