JPH02124537U - - Google Patents
Info
- Publication number
- JPH02124537U JPH02124537U JP3236989U JP3236989U JPH02124537U JP H02124537 U JPH02124537 U JP H02124537U JP 3236989 U JP3236989 U JP 3236989U JP 3236989 U JP3236989 U JP 3236989U JP H02124537 U JPH02124537 U JP H02124537U
- Authority
- JP
- Japan
- Prior art keywords
- ray
- ray analyzer
- irradiating
- rays
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は本考案に係るＸ線分析装置の一例を示
す構成図である。
１……試料室、９……Ｘ線検出器、１０……Ｘ
線管、１１……Ｘ線導管、Ｓ……試料。
FIG. 1 is a configuration diagram showing an example of an X-ray analyzer according to the present invention. 1...sample chamber, 9...X-ray detector, 10...X
Ray tube, 11...X-ray conduit, S...sample.
Claims (1)
Ｘ線検出器を設けたＸ線分析装置において、前記
試料室内に設けられる試料に対して、Ｘ線管から
のＸ線を全反射を利用したＸ線導管を介して照射
できるようにしたことを特徴とするＸ線分析装置
。 In an X-ray analyzer equipped with an X-ray detector facing into the specimen chamber of a scanning electron microscope, an An X-ray analyzer characterized in that it is capable of irradiating through the X-rays.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989032369U JPH082603Y2 (en) | 1989-03-22 | 1989-03-22 | X-ray analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989032369U JPH082603Y2 (en) | 1989-03-22 | 1989-03-22 | X-ray analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02124537U true JPH02124537U (en) | 1990-10-15 |
| JPH082603Y2 JPH082603Y2 (en) | 1996-01-29 |
Family
ID=31535334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989032369U Expired - Fee Related JPH082603Y2 (en) | 1989-03-22 | 1989-03-22 | X-ray analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH082603Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5111955A (en) * | 1974-07-17 | 1976-01-30 | Toyo Boseki | Bosekishino fumenhatsuseidohyokahoho |
| JPS6378056A (en) * | 1986-09-20 | 1988-04-08 | Rigaku Denki Kogyo Kk | Total reflection fluorescent x-ray analyzer |
-
1989
- 1989-03-22 JP JP1989032369U patent/JPH082603Y2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5111955A (en) * | 1974-07-17 | 1976-01-30 | Toyo Boseki | Bosekishino fumenhatsuseidohyokahoho |
| JPS6378056A (en) * | 1986-09-20 | 1988-04-08 | Rigaku Denki Kogyo Kk | Total reflection fluorescent x-ray analyzer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH082603Y2 (en) | 1996-01-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |