JPH02125330U - - Google Patents

Info

Publication number: JPH02125330U
Authority: JP; Japan
Prior art keywords: sample; plasma; ashing device; plasma ashing; partition wall
Prior art date: 1989-03-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP3307889U

Other languages

English (en)

Japanese (ja)

Other versions

JPH0737314Y2 (ja

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-03-22

Filing date

1989-03-22

Publication date

1990-10-16

1989-03-22 Application filed filed Critical

1989-03-22 Priority to JP1989033078U priority Critical patent/JPH0737314Y2/ja

1990-10-16 Publication of JPH02125330U publication Critical patent/JPH02125330U/ja

1995-08-23 Application granted granted Critical

1995-08-23 Publication of JPH0737314Y2 publication Critical patent/JPH0737314Y2/ja

2004-03-22 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

238000004380 ashing Methods 0.000 claims description 7
238000005192 partition Methods 0.000 claims description 3

Landscapes

Drying Of Semiconductors (AREA)

JP1989033078U 1989-03-22 1989-03-22 プラズマアッシング装置 Expired - Lifetime JPH0737314Y2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1989033078U JPH0737314Y2 (ja)	1989-03-22	1989-03-22	プラズマアッシング装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1989033078U JPH0737314Y2 (ja)	1989-03-22	1989-03-22	プラズマアッシング装置

Publications (2)

Publication Number	Publication Date
JPH02125330U true JPH02125330U (mo)	1990-10-16
JPH0737314Y2 JPH0737314Y2 (ja)	1995-08-23

Family

ID=31536447

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1989033078U Expired - Lifetime JPH0737314Y2 (ja)	1989-03-22	1989-03-22	プラズマアッシング装置

Country Status (1)

Country	Link
JP (1)	JPH0737314Y2 (mo)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH02188916A (ja) *	1989-01-17	1990-07-25	Dainippon Screen Mfg Co Ltd	乾式表面処理装置

1989
- 1989-03-22 JP JP1989033078U patent/JPH0737314Y2/ja not_active Expired - Lifetime

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH02188916A (ja) *	1989-01-17	1990-07-25	Dainippon Screen Mfg Co Ltd	乾式表面処理装置

Also Published As

Publication number	Publication date
JPH0737314Y2 (ja)	1995-08-23

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Legal Events

Date	Code	Title	Description
2004-03-22	EXPY	Cancellation because of completion of term