JPH02125733U - - Google Patents
Info
- Publication number
- JPH02125733U JPH02125733U JP3591389U JP3591389U JPH02125733U JP H02125733 U JPH02125733 U JP H02125733U JP 3591389 U JP3591389 U JP 3591389U JP 3591389 U JP3591389 U JP 3591389U JP H02125733 U JPH02125733 U JP H02125733U
- Authority
- JP
- Japan
- Prior art keywords
- path
- vacuum chamber
- vacuum container
- vacuum
- air passes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Degasification And Air Bubble Elimination (AREA)
Description
第１図は本考案の第一の実施例に係る真空容器
を示す斜視図、第２図は第二の実施例に係る真空
容器を示す側面図、第３図は第二の実施例に係る
三方コツクの詳細を示す平面図である。
１：真空室、２：圧力計、３：吸引バルブ、４
：第１リークバルブ、５：第２リークバルブ、６
：開閉具、７：三方コツク、８：真空ポンプ側パ
イプ、９：真空室側パイプ、１０：大気側パイプ
、１１Ａ，１１Ｂ：太径穴、１２：細径穴、１３
：アクリル製デシケータ、１４：ガラス製デシケ
ータ。
FIG. 1 is a perspective view showing a vacuum container according to a first embodiment of the present invention, FIG. 2 is a side view showing a vacuum container according to a second embodiment, and FIG. 3 is a side view showing a vacuum container according to a second embodiment. FIG. 3 is a plan view showing details of the three-sided kotuku. 1: Vacuum chamber, 2: Pressure gauge, 3: Suction valve, 4
: 1st leak valve, 5: 2nd leak valve, 6
: Opening/closing tool, 7: Three-way socket, 8: Vacuum pump side pipe, 9: Vacuum chamber side pipe, 10: Atmosphere side pipe, 11A, 11B: Large diameter hole, 12: Small diameter hole, 13
: Acrylic desiccator, 14: Glass desiccator.
Claims (1)
空気が通過する減圧経路を備えた真空容器におい
て、減圧経路は、空気が小流量通過する低速減圧
経路と、空気が大流量通過する高速減圧経路との
２系統の経路を有していることを特徴とする真空
容器。 In a vacuum container equipped with a depressurization path that communicates with the vacuum chamber and allows air to pass through to return the vacuum chamber to atmospheric pressure, the depressurization path consists of a slow decompression path through which a small flow of air passes, and a high-speed decompression path through which a large flow of air passes. A vacuum container characterized by having two routes:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3591389U JPH02125733U (en) | 1989-03-29 | 1989-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3591389U JPH02125733U (en) | 1989-03-29 | 1989-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02125733U true JPH02125733U (en) | 1990-10-17 |
Family
ID=31541680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3591389U Pending JPH02125733U (en) | 1989-03-29 | 1989-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02125733U (en) |
-
1989
- 1989-03-29 JP JP3591389U patent/JPH02125733U/ja active Pending