JPH02127032U - - Google Patents
Info
- Publication number
- JPH02127032U JPH02127032U JP3708889U JP3708889U JPH02127032U JP H02127032 U JPH02127032 U JP H02127032U JP 3708889 U JP3708889 U JP 3708889U JP 3708889 U JP3708889 U JP 3708889U JP H02127032 U JPH02127032 U JP H02127032U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- partition wall
- sample
- processing chamber
- sample processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004380 ashing Methods 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 3
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3708889U JPH02127032U (cs) | 1989-03-28 | 1989-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3708889U JPH02127032U (cs) | 1989-03-28 | 1989-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02127032U true JPH02127032U (cs) | 1990-10-19 |
Family
ID=31543885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3708889U Pending JPH02127032U (cs) | 1989-03-28 | 1989-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02127032U (cs) |
-
1989
- 1989-03-28 JP JP3708889U patent/JPH02127032U/ja active Pending
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