JPH02128546U - - Google Patents
Info
- Publication number
- JPH02128546U JPH02128546U JP3523889U JP3523889U JPH02128546U JP H02128546 U JPH02128546 U JP H02128546U JP 3523889 U JP3523889 U JP 3523889U JP 3523889 U JP3523889 U JP 3523889U JP H02128546 U JPH02128546 U JP H02128546U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pressure transducer
- semiconductor
- reference chamber
- temperature characteristic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の具体的な一実施例に係る圧力
変換器を示し縦断面図。第２図ａは同実施例に係
る圧力変換器に使用された半導体圧力変換素子単
体の圧力換算出力の温度特性を示した説明図。第
２図ｂは同実施例に係る圧力変換器の圧力基準室
の温度特性を示した説明図。第２図ｃは同実施例
に係る圧力変換器の温度特性を示した説明図。第
３図は本考案に係る圧力変換器の他の実施例を示
した縦断面図。第４図は従来の圧力変換器におい
て温度補償のために設けられた外付け固定抵抗素
子を示した回路図である。
１０……圧力変換器、１１……ハウジング、１
３……圧力導入パイプ、１５……半導体圧力変換
素子、１６……台座、１７……基台、Ｐ……被測
定圧力。
FIG. 1 is a vertical sectional view showing a pressure transducer according to a specific embodiment of the present invention. FIG. 2a is an explanatory diagram showing the temperature characteristics of the pressure conversion output of a single semiconductor pressure transducer element used in the pressure transducer according to the same embodiment. FIG. 2b is an explanatory diagram showing the temperature characteristics of the pressure reference chamber of the pressure transducer according to the same embodiment. FIG. 2c is an explanatory diagram showing the temperature characteristics of the pressure transducer according to the same example. FIG. 3 is a longitudinal sectional view showing another embodiment of the pressure transducer according to the present invention. FIG. 4 is a circuit diagram showing an external fixed resistance element provided for temperature compensation in a conventional pressure transducer. 10...Pressure transducer, 11...Housing, 1
3... Pressure introduction pipe, 15... Semiconductor pressure conversion element, 16... Pedestal, 17... Base, P... Pressure to be measured.
Claims (1)
にてブリツジ回路を構成した半導体圧力変換素子
と該半導体圧力変換素子のダイヤフラム受圧側と
反対側のダイヤフラム背圧側に圧力基準室とを有
する圧力変換器において、 前記圧力基準室に気体を封止し、その封止され
た気体の圧力の温度特性が前記半導体圧力変換素
子における出力電圧の圧力換算の温度特性の傾き
と等しくなるように設定した ことを特徴とする圧力変換器。[Claims for Utility Model Registration] A semiconductor pressure transducer element that constitutes a bridge circuit using a pressure-sensitive resistance element whose resistance value changes with pressure changes, and a diaphragm back pressure side opposite to the diaphragm pressure receiving side of the semiconductor pressure transducer element. In the pressure transducer having a reference chamber, gas is sealed in the pressure reference chamber, and the temperature characteristic of the pressure of the sealed gas is the slope of the temperature characteristic of the pressure conversion of the output voltage in the semiconductor pressure conversion element. A pressure transducer characterized in that the pressure transducer is set to be equal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3523889U JPH02128546U (en) | 1989-03-27 | 1989-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3523889U JPH02128546U (en) | 1989-03-27 | 1989-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02128546U true JPH02128546U (en) | 1990-10-23 |
Family
ID=31540421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3523889U Pending JPH02128546U (en) | 1989-03-27 | 1989-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02128546U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57178121A (en) * | 1981-04-27 | 1982-11-02 | Hitachi Ltd | Absolute pressure transmission device |
| JPS59168331A (en) * | 1983-03-15 | 1984-09-22 | Fuji Electric Co Ltd | Pressure converter |
-
1989
- 1989-03-27 JP JP3523889U patent/JPH02128546U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57178121A (en) * | 1981-04-27 | 1982-11-02 | Hitachi Ltd | Absolute pressure transmission device |
| JPS59168331A (en) * | 1983-03-15 | 1984-09-22 | Fuji Electric Co Ltd | Pressure converter |
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