JPH02129349U - - Google Patents

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Publication number
JPH02129349U
JPH02129349U JP3875189U JP3875189U JPH02129349U JP H02129349 U JPH02129349 U JP H02129349U JP 3875189 U JP3875189 U JP 3875189U JP 3875189 U JP3875189 U JP 3875189U JP H02129349 U JPH02129349 U JP H02129349U
Authority
JP
Japan
Prior art keywords
driving force
chamber
gear
meshing
gears
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3875189U
Other languages
English (en)
Other versions
JPH0734011Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989038751U priority Critical patent/JPH0734011Y2/ja
Publication of JPH02129349U publication Critical patent/JPH02129349U/ja
Application granted granted Critical
Publication of JPH0734011Y2 publication Critical patent/JPH0734011Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Delivering By Means Of Belts And Rollers (AREA)
  • Branching, Merging, And Special Transfer Between Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)

Description

【図面の簡単な説明】
第１図は本考案の基本的構成を示す図、第２図
は本考案の一実施例による基板搬送機構が適用さ
れた成膜装置の平面図、第３図はその駆動力導入
機構部分を示す図、第４図は第２図の−線断
面図、第５図は本考案の他の実施例を示す図であ
る。 １０……入力室、１１……成膜室、１２……出
口室、１３，３０，４０……駆動力伝達機構、２
２，２４，２７，２９，３６，３８，４９，５１
……ピニオン、５５，５６，６１，６２……駆動
力導入軸、５７，５８，６３，６４……駆動力導
入用歯車、７０，７１，７４……アイドルギヤ、
７２，７５……揺動部材、７３，７６……シリン
ダ、８５，８６……ラツク。

Claims (1)

    【実用新案登録請求の範囲】
  1. 各チヤンバ内及び隣接するチヤンバ間で、ラツ
    ク及びピニオンを用いて基板を搬送する基板搬送
    機構において、各チヤンバの隣接するチヤンバ側
    に設けられチヤンバ内の搬送機構を駆動するため
    の駆動力導入軸と、この駆動力導入軸に固定され
    た駆動力導入用歯車と、隣接するチヤンバの駆動
    力導入用歯車間に設けられ両歯車に噛み合う第１
    の位置及び少なくとも一方の歯車との噛み合いが
    解除される第２の位置をとり得るよう揺動自在に
    配置されたアイドルギヤと、このアイドルギヤを
    揺動させるための揺動手段とを備えた基板搬送機
    構。
JP1989038751U 1989-03-31 1989-03-31 移動成膜装置 Expired - Lifetime JPH0734011Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989038751U JPH0734011Y2 (ja) 1989-03-31 1989-03-31 移動成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989038751U JPH0734011Y2 (ja) 1989-03-31 1989-03-31 移動成膜装置

Publications (2)

Publication Number Publication Date
JPH02129349U true JPH02129349U (ja) 1990-10-25
JPH0734011Y2 JPH0734011Y2 (ja) 1995-08-02

Family

ID=31547042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989038751U Expired - Lifetime JPH0734011Y2 (ja) 1989-03-31 1989-03-31 移動成膜装置

Country Status (1)

Country Link
JP (1) JPH0734011Y2 (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS617104A (ja) * 1984-06-21 1986-01-13 Honda Motor Co Ltd 格納装置
JPS61101507U (ja) * 1984-12-10 1986-06-28
JPS63185712A (ja) * 1987-01-28 1988-08-01 Nippon Soken Inc 真空蒸着装置の搬送機構
JPS63300009A (ja) * 1987-05-28 1988-12-07 Semiconductor Energy Lab Co Ltd 基板搬送機構

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS617104A (ja) * 1984-06-21 1986-01-13 Honda Motor Co Ltd 格納装置
JPS61101507U (ja) * 1984-12-10 1986-06-28
JPS63185712A (ja) * 1987-01-28 1988-08-01 Nippon Soken Inc 真空蒸着装置の搬送機構
JPS63300009A (ja) * 1987-05-28 1988-12-07 Semiconductor Energy Lab Co Ltd 基板搬送機構

Also Published As

Publication number Publication date
JPH0734011Y2 (ja) 1995-08-02

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