JPH02130882A - solid state laser device - Google Patents

solid state laser device

Info

Publication number
JPH02130882A
JPH02130882A JP28357788A JP28357788A JPH02130882A JP H02130882 A JPH02130882 A JP H02130882A JP 28357788 A JP28357788 A JP 28357788A JP 28357788 A JP28357788 A JP 28357788A JP H02130882 A JPH02130882 A JP H02130882A
Authority
JP
Japan
Prior art keywords
rod
laser
output
light
yag
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28357788A
Other languages
Japanese (ja)
Inventor
Takeoki Miyauchi
宮内 建興
Mitsuhiro Morita
光洋 森田
Mikio Hongo
幹雄 本郷
Katsuro Mizukoshi
克郎 水越
Shigenobu Maruyama
重信 丸山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP28357788A priority Critical patent/JPH02130882A/en
Publication of JPH02130882A publication Critical patent/JPH02130882A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To obtain a high laser output which cannot be heretofore obtained by densely disposing exciting semiconductor lasers around the rod of a solid state laser. CONSTITUTION:An assembly of semiconductor lasers 2 is so gathered as to surround a YAG rod 1 disposed at its center, and its light emitting port is directed in a direction of the rod 1. A rear mirror 3 near total reflection and an output mirror 4 partly transmitting are disposed at both ends of the rod 1. When the lasers 2 simultaneously irradiate the rod with excited light, a laser oscillation is generated by the operation of a resonator composed of both the mirrors. Since its output is larger as the input light of the laser is larger, a high output which cannot be heretofore obtained can be attained.

Description

【発明の詳細な説明】 (産業上の利用分野] 本発明はレーザ発振器、特に半導体レーザで励起をする
YAGレーザ等の固体レーザ装置に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a laser oscillator, and particularly to a solid-state laser device such as a YAG laser that is excited by a semiconductor laser.

〔従来の技術〕[Conventional technology]

従来、半導体レーザ励起の固体レーザについては、コン
ファレンス・オン・レーザアンドエレクトロオプティク
ス1988テクニカルダイジェストシリース、ホリュー
ム7、コンファレンスエデイジョン298頁から299
頁(Confarence onLasers and
 Electro−Optics 1988  Tec
h−nfcal Digest 5eries、 Vo
lume7.ConferenceEdition p
p298−299)において示されている。
Conventionally, regarding solid-state lasers pumped by semiconductor lasers, see Conference on Laser and Electro-Optics 1988 Technical Digest Series, Volume 7, Conference Edition, pages 298 to 299.
Page (Conference on Lasers and
Electro-Optics 1988 Tec
h-nfcal Digest 5eries, Vo
lume7. Conference Edition p
p298-299).

すなわち、第5図に示すように半導体レーザ(図示せず
)より出た発振光(波畏0.81μm)はファイバー1
1で導かれて入射レンズ12に入り、YAGロッド13
に入射す、このYAGロッド13に入射した光はYAG
ロッド13を励起させる。YAGロッド13の片側には
半導体レーザ光(0,81μm)は通すが1.06μm
光には高い反射率を持つ反射11114がつけられてお
り、他端には1.06μ■を通す反射防止膜15がつい
ている。またその先には外部ミラー16が設けられてお
り、1.06μ菖光の一部を通し他は全部反射させるよ
うになっている。
That is, as shown in Fig. 5, the oscillation light (wavelength: 0.81 μm) emitted from the semiconductor laser (not shown) is transmitted through the fiber 1.
1, enters the input lens 12, and enters the YAG rod 13.
The light incident on this YAG rod 13 is YAG
Excite the rod 13. The semiconductor laser beam (0.81 μm) passes through one side of the YAG rod 13, but the diameter is 1.06 μm.
A reflector 11114 having a high reflectance is attached to the light, and an anti-reflection film 15 that allows 1.06 .mu.m to pass is attached at the other end. Further, an external mirror 16 is provided beyond that, so that a part of the 1.06μ irises is passed through and all the others are reflected.

このようになっているため1反射鏡14と外部ミラー1
6で共振器が構成され、半導体レーザの光がYAGロッ
ド13に入射すると1.06μ腸光のレーザ発振が起り
、YAGレーザとして用いることができる。
Because it is like this, 1 reflecting mirror 14 and external mirror 1
6 constitutes a resonator, and when the semiconductor laser light enters the YAG rod 13, laser oscillation of 1.06 μm light occurs, and it can be used as a YAG laser.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上記従来技術では、励起光をYAGロッドの光軸方向か
ら入れるため、入射光量に制限が生じ、高出力のものに
する点について配慮がされていなかった。
In the above-mentioned conventional technology, since the excitation light is input from the optical axis direction of the YAG rod, the amount of incident light is limited, and no consideration is given to achieving high output.

本発明の目的は、従来技術の課題を解決すべく。An object of the present invention is to solve the problems of the prior art.

入射光量を大幅に増大させ、高出力の半導体レーザ励起
YAG等の固体レーザを実現できるようにした固体レー
ザ装置を提供することにある。
An object of the present invention is to provide a solid-state laser device that can significantly increase the amount of incident light and realize a high-output solid-state laser such as semiconductor laser-excited YAG.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的を達成するために、本発明は、固体ロッドの側
面から励起用半導体レーザ光を入射させるようにしたも
のである。
In order to achieve the above object, the present invention allows excitation semiconductor laser light to be incident on the side surface of a solid rod.

〔作用〕[Effect]

例えばYAGロッドの場合、直径6m、長さ60mとす
ると端面入射の場合、入射面積は3.14 x (4)
”与28■2 であるのに対し、側面入射の場合は、入射面積は3.1
4x6X60キ1130rrr となり、約40倍の入射面積が得られる。従って従来よ
り、ずっと大きな入力光を入れることができるようにな
る。
For example, in the case of a YAG rod, if the diameter is 6m and the length is 60m, the incident area is 3.14 x (4)
``Gives 28
4 x 6 x 60 x 1130 rrr, and an incident area approximately 40 times larger is obtained. Therefore, much larger input light can be input than before.

〔実施例〕〔Example〕

以下、本発明の一実施例を第1図により説明する。第1
図(A)は本発明のレーザ装置の断面図である。また第
1図(B)はその斜視図である。
An embodiment of the present invention will be described below with reference to FIG. 1st
Figure (A) is a sectional view of the laser device of the present invention. Further, FIG. 1(B) is a perspective view thereof.

中心に置かれたYAGロッド1をとり囲むようにして半
導体レーザ2の集合体が集まっており、その光出射口は
YAGロッド1の方向を向いている。
An assembly of semiconductor lasers 2 is gathered to surround a YAG rod 1 placed at the center, and the light emitting ports thereof face the direction of the YAG rod 1.

YAGロッド1の両端には、1.06μmに対し全反射
に近い後部ミラー3と一部(数%)を透過させる出力ミ
ラー4が配設されている。半導体レーザ2が一斉にYA
Gロッド1に励起光を照射させると、両ミラーで構成さ
れる共振器の作用でレーザ発振が起り、その出力は半導
体レーザの入力光が大きい程大きいため、従来では得ら
れなかった高出力を得られるようになった。
At both ends of the YAG rod 1, there are disposed a rear mirror 3 that almost completely reflects light of 1.06 μm, and an output mirror 4 that partially (several percent) transmits light. Semiconductor laser 2 simultaneously performs YA
When the G rod 1 is irradiated with excitation light, laser oscillation occurs due to the action of the resonator made up of both mirrors, and the output increases as the input light of the semiconductor laser increases, making it possible to achieve high output that could not be obtained conventionally. Now you can get it.

また第2図は本発明の他の一実施例を示したものである
。半導体レーザ2は平面状に何列にも並べられており、
その出力光はファイバー5でYAGロッド1のそばまで
導かれ、YAGロッド1を励起する。このようにすると
、YAGロッド1の回りに集まるファイバーの密度を増
すことにより、より大きな入力を与えることができるた
め、より大きなYAGレーザ出力を取り出すことができ
る。
Further, FIG. 2 shows another embodiment of the present invention. The semiconductor lasers 2 are arranged in many rows in a plane.
The output light is guided by a fiber 5 to the vicinity of the YAG rod 1 and excites the YAG rod 1. In this way, by increasing the density of fibers gathered around the YAG rod 1, a larger input can be given, and therefore a larger YAG laser output can be extracted.

また、半導体レーザの発振を時間制御または空間位置制
御してやることにより、任意の時間波形空間変化をもっ
たYAGレーザ出力を取り出すことができる。第3図(
a)〜(g)はその例を示したものである。
Moreover, by controlling the time or spatial position of the oscillation of the semiconductor laser, it is possible to extract a YAG laser output having arbitrary temporal and spatial changes in waveform. Figure 3 (
a) to (g) show examples thereof.

第4図(b)は第4図(a)に示すYAGロッドの円筒
部に光沢面を用いる代りにスリガラス面を用いた場合の
実施例を示す図である。光沢面6の場合、YAGロッド
1に入った半導体レーザ光は、吸収、反射をランダムに
繰返し一定割合のロスを出して、他は励起光として使わ
れる。この代りにスリガラス面7にすると入射する半導
体レーザ光はゆるやかな分布8を示してYAGロッド1
に入射し、均質にYAGロッド1内で吸収される。
FIG. 4(b) is a diagram showing an embodiment in which a ground glass surface is used instead of a glossy surface on the cylindrical portion of the YAG rod shown in FIG. 4(a). In the case of the glossy surface 6, the semiconductor laser light that enters the YAG rod 1 repeats absorption and reflection at random, resulting in a certain percentage of loss, and the rest is used as excitation light. If the ground glass surface 7 is used instead, the incident semiconductor laser light will have a gentle distribution 8 and the YAG rod 1 will have a gentle distribution 8.
is incident on the YAG rod 1 and is absorbed homogeneously within the YAG rod 1.

入射時10%程度のロスを出すが入射してからはむしろ
−様な吸収光分布が進み、全体としてもロッド内の励起
状態の一様性を著しく増す。このためYAGの発振光も
安定した発振モードが得られ。
Although there is a loss of about 10% at the time of incidence, the absorption light distribution progresses in a rather -like manner after the incidence, and the uniformity of the excited state within the rod as a whole is significantly increased. Therefore, a stable oscillation mode can be obtained for YAG oscillation light.

工業的応用にも適したものになっている。It is also suitable for industrial applications.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば、固体レーザのロッ
ドの周りに励起用半導体レーザを密に配することにより
、従来得られなかった高いレーザ出力を得られるように
なった。またロッドの局面をスリガラス化することによ
り、励起を均一にする効果があり、固体レーザの発振モ
ードを大幅に改善することができるようになった。
As explained above, according to the present invention, by densely arranging the excitation semiconductor lasers around the rod of the solid-state laser, it has become possible to obtain a high laser output that could not be obtained conventionally. Furthermore, by making the surface of the rod into ground glass, it has the effect of making the excitation uniform, making it possible to significantly improve the oscillation mode of the solid-state laser.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の半導体レーザ励起固体レーザ装置の一
実施例を示す構成図、第2図は本発明の他の一実施例を
示す構成図、第3図は本発明の構成での時間、空間モー
ドを自由に制御したYAG出力を示した図、第4図はY
AGロッド外周面をスリガラス状にした本発明の他の一
実施例を示した説明図、第5図は従来のYAGレーザ発
振器を示した構成図である。 1・・・YAGロッド、2・・・半導体レーザ、3・・
・後部ミラー、4・・・出力ミラー、5・・・ファイバ
7・・・スリガラス面。 纂 図 1  YAeロー1ド 2 半導体レーザ゛ 3、 機部ミラー 4 出力ミラー 5、 ファイノく 第 1 (A> /  TACrO”yド    39枚佛ミラー2、半
13本し−丈−4,出力ミラー 第4−図 第 5 図 11、  ファイバ゛− 72、入射しンス゛ /3 TAcTロッド /4.反]寸娩 /S、 yjcfj防止項 /乙 タト郁ξラ−
FIG. 1 is a block diagram showing one embodiment of the semiconductor laser pumped solid-state laser device of the present invention, FIG. 2 is a block diagram showing another embodiment of the present invention, and FIG. 3 is a diagram showing the time in the configuration of the present invention. , a diagram showing the YAG output with free control of the spatial mode, Figure 4 is Y
FIG. 5 is an explanatory view showing another embodiment of the present invention in which the outer circumferential surface of the AG rod is made of ground glass, and FIG. 5 is a configuration diagram showing a conventional YAG laser oscillator. 1... YAG rod, 2... semiconductor laser, 3...
- Rear mirror, 4... Output mirror, 5... Fiber 7... Ground glass surface. Estimated diagram 1 YAe load 1 2 Semiconductor laser 3, Machine mirror 4 Output mirror 5, Phino 1st (A> / TACrO”y) 39-piece Buddha mirror 2, half 13 pieces - length - 4, output mirror Fig. 4-Fig. 5 Fig. 11, Fiber 72, incidence angle/3 TAcT rod/4.

Claims (1)

【特許請求の範囲】 1、半導体レーザを円筒状に配設し、円筒内に置いた固
体ロッドを励起するようにしたことを特徴とした固体レ
ーザ装置。 2、半導体レーザの出力光を他端から入れたファイバー
の先端を円筒状に配設し、円筒内に置いた固体ロッドを
励起するようにしたことを特徴とした固体レーザ装置。 3、固体ロッドの円筒面をスリガラス状にしたことを特
徴とする請求項1または2記載の固体レーザ装置。
[Claims] 1. A solid-state laser device characterized in that a semiconductor laser is arranged in a cylindrical shape and excites a solid rod placed inside the cylinder. 2. A solid-state laser device characterized in that the tip of a fiber into which output light from a semiconductor laser enters from the other end is arranged in a cylindrical shape, and excites a solid rod placed inside the cylinder. 3. The solid-state laser device according to claim 1 or 2, wherein the cylindrical surface of the solid rod is ground glass-like.
JP28357788A 1988-11-11 1988-11-11 solid state laser device Pending JPH02130882A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28357788A JPH02130882A (en) 1988-11-11 1988-11-11 solid state laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28357788A JPH02130882A (en) 1988-11-11 1988-11-11 solid state laser device

Publications (1)

Publication Number Publication Date
JPH02130882A true JPH02130882A (en) 1990-05-18

Family

ID=17667325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28357788A Pending JPH02130882A (en) 1988-11-11 1988-11-11 solid state laser device

Country Status (1)

Country Link
JP (1) JPH02130882A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4447355A1 (en) * 1994-12-20 1996-06-27 Max Born Inst Fuer Nichtlinear Optically-pumped solid-state laser
JP2002198595A (en) * 2000-12-26 2002-07-12 Toshiba Corp Solid state laser device and method of manufacturing the same
EP1278278A1 (en) * 2001-07-18 2003-01-22 Nanyang Technological University Diode pumped solid state laser

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50143491A (en) * 1974-05-08 1975-11-18
JPS5886785A (en) * 1981-11-06 1983-05-24 アライド・コ−ポレ−シヨン Alexandrite laser ponped by light emitting diode
JPS59150488A (en) * 1983-02-15 1984-08-28 Toshiba Corp Solid-state laser oscillating device
JPH01100983A (en) * 1987-10-14 1989-04-19 Komatsu Ltd Laser rod excitation device in solid-state laser
JPH01205484A (en) * 1988-02-10 1989-08-17 Mitsubishi Electric Corp Laser equipment
JPH0298180A (en) * 1988-10-04 1990-04-10 Toshiba Corp Laser oscillator

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50143491A (en) * 1974-05-08 1975-11-18
JPS5886785A (en) * 1981-11-06 1983-05-24 アライド・コ−ポレ−シヨン Alexandrite laser ponped by light emitting diode
JPS59150488A (en) * 1983-02-15 1984-08-28 Toshiba Corp Solid-state laser oscillating device
JPH01100983A (en) * 1987-10-14 1989-04-19 Komatsu Ltd Laser rod excitation device in solid-state laser
JPH01205484A (en) * 1988-02-10 1989-08-17 Mitsubishi Electric Corp Laser equipment
JPH0298180A (en) * 1988-10-04 1990-04-10 Toshiba Corp Laser oscillator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4447355A1 (en) * 1994-12-20 1996-06-27 Max Born Inst Fuer Nichtlinear Optically-pumped solid-state laser
JP2002198595A (en) * 2000-12-26 2002-07-12 Toshiba Corp Solid state laser device and method of manufacturing the same
EP1278278A1 (en) * 2001-07-18 2003-01-22 Nanyang Technological University Diode pumped solid state laser

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