JPH02133737A - clean room equipment - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a clean room apparatus for creating a clean working environment necessary for semiconductor manufacturing and the like.

[Background of the invention]

FIG. 1 shows a typical example of a clean room (full-scale downflow clean room) conventionally used in semiconductor manufacturing processes. (a) is a cutaway plan view, (1)) is a side sectional view, 1
is a building, 2 is a clean room interior, 3 is a high-performance filter, 4 is a lighting lamp, 5 is a ceiling perforated plate, 6 is a floor perforated plate, 7
8 is an air conditioning air supply duct, 8 is an air conditioning return duct), 9 is equipment for the production line for exposure, etching, diffusion, metallization, etc., and 10 is piping for supplying water, waste, etc. to the production line. As shown by arrows in the figure, clean air treated by the high-performance filter 3 is blown into the room 2 from the entire surface of the ceiling, and the room air is exhausted through the floor. As a result, the entire room can be maintained at an approximately -like high level of cleanliness, and all processes can be carried out in this clean atmosphere. This full-scale downflow clean room was considered the best method for increasing the cleanliness of the entire room, as the dimensions from the floor to the ceiling are the same in each part, so workers can stand anywhere. Because they had to be high enough to allow traffic, the space that had to be cleaned was large, and expensive high-performance filters had to be used in large quantities. For this reason, the installed capacity was 4 mtl, which was extremely high.

This high-performance filter does not just need to be installed once; it gradually becomes clogged with use, so it must be replaced with a new one.

The larger the space, the greater the amount of air that must be filtered through the high-performance filter, which means that the time to replace the high-performance filter will come sooner.

In addition, since workers often work while sitting on chairs, the height dimension from the ceiling, which is the clean air outlet, to the surface on which they are working becomes large. However, it is also possible that dust gets stuck in the grooves before the clean air reaches the work surface.

The center of the ceiling of the cleaning workshop is made higher than the surrounding area, and a tall machine is placed here to reduce the space that must be cleaned. It is publicly known.

However, in this known example, the floor-to-ceiling space is made smaller in the work space than in the aisle space, making it easier for workers to pass through by cleaning the smaller space, and obtaining sufficient air cleanliness in the work space. Nothing is disclosed regarding how this will be done. In addition, as other related matters,
May 27, 1980, I1 Nikkei Sangyo Hosoma's article "Low-cost dust-free room sales for Hitachi Brandt semiconductor factory" and October 20, 1980, published by Ohmsha Co., Ltd., Japan Air Cleaning Foundation “Air Purifying Hashi 1ζ Book” edited by the War Association
476 to 479 are known, but these are constructed in close connection with the construction of the building, and have excellent flexibility and ease of installation work (to change the line length as the aim of the present invention). There is no mention or suggestion of improving the airflow within the clean room.

Also, an article in the Nikkei Sangyo Shimbun dated May 27, 1980, “
The configuration described in "Low-cost dust-free room sales for Hitachi Brandt semiconductor factory" has a pressure chamber installed in the ceiling above the passage space, and this pressure chamber is connected to the ventilation duct installed in the work space. The pressure chamber is connected to a pressure chamber, and is configured to supply clean air to the passage space through a filter arranged at the bottom of the pressure chamber. Therefore,
If the height of the passage space is increased to make it easier for workers to pass through, the external height of the equipment will increase, and there is a problem that if the equipment is installed in an existing building, it cannot be installed if the ceiling height of the building is low. In addition, if installed in a building with a low ceiling height, the height of the aisle space will be low, which will reduce work efficiency as workers will feel pressure gaps and have to bend their backs to pass. There's a problem. Additionally, since there is a chamber above the passage space filled with air that has not passed through the filter, air that has not passed through the filter flows into the passage space from the connection between the chamber and the pressure chamber, reducing the cleanliness of the passage space. There is a problem in that there is a risk of deterioration.

Further, since the chamber and the filter are located above the passage space, there is a problem that the weight of the ceiling of the passage space increases and that it is difficult to absorb dimensional errors during installation, resulting in poor workability.

[Purpose of the invention]

Even when a clean room device according to the present invention is installed inside an existing building, the height of the passage space can be increased without increasing the external dimensions of the clean room device in the height direction. A clean system that improves workability, maintains a high level of cleanliness by preventing deterioration of cleanliness due to the inflow of contaminated air, and is easy to install on a single unit, reducing equipment costs. Our purpose is to provide room equipment.

[Summary of the invention]

The clean room device of the present invention surrounds a production line consisting of work equipment arranged in a predetermined direction so as to isolate it from the building space, thereby forming a clean space (12) independent from the building. is the work space where work equipment is installed (12
a) and a passage space (12b) formed in parallel with the work space (12a,), and
12) Air purifying means (120) for supplying clean static electricity inside
is disposed only on one side of the working space (12a), and the air purifying means (120) is an air discharge unit that supplies clean air toward the working space (2a) and the passage space (12b). (122, 124).

[Embodiments of the invention]

FIG. 2 is a diagram showing an example of construction of the clean hole device according to the present invention.
(a) is a cutaway plan view, (b) is a side sectional view, and the first
The same reference numerals as in the figures indicate corresponding parts.

The manufacturing line equipment 9 is installed facing each other in the building in which the air conditioning supply air duct 7 and the return duct 8 are installed, and the two lines are set at 1 Mi, and the upper surface is separated by a partition wall composed of both sides plates 20 and the top plate 19. and cover both sides. The details will be described later, but the second zone 1 serves as a work space in which work equipment 9 such as production line equipment such as manufacturing equipment and inspection equipment is installed.
Air purification means 120 that supplies clean air to the ceiling of 2a
As shown by the arrow in the figure, clean air is supplied from the ceiling surface to form a clean space shown by the second zone 12a as a working space and the first zone 12b as a passage space (explanation in FIG. 3). Blow air into the zone 12 to clean the inside of the zone. The air in the zone 12 is discharged through a side outlet 14 provided below the side plate 20.
It is discharged to the surrounding area [6], thereby cleaning the conservation area 16 to some extent, but the degree of cleanliness is lower than that in the zone 12.

End panels 11a with doors 80 are attached to both ends of the zone 12 to partition the inside of the zone 12 from the conservation area 1G. Pipes 10 for water, gas, etc., electric wires, etc. used in the production line are installed in a conservation area 16 and are drawn into the production line equipment 9 through a side outlet 14. To do this; from here,
Maintenance of piping 10, electric wires, etc. can be performed in the maintenance area 16. Further, as will be described later, since the side plate 20 can be partially removed, most of the repairs to the production line equipment 9 can be performed from the maintenance area 16.

In addition, even if manufacturing equipment in a certain process is repaired, the dust generated by the maintenance work will affect other manufacturing lines (processes) because the process will only be carried out within zone 12 of that process. Very rarely.

Furthermore, by connecting the air inlet 5 of the air chamber 90 (see FIG. 3) to the air conditioning supply duct 7,
a, 121], and it is also possible to control the air conditioning temperature for each manufacturing line (each process). Even in this case, in order to increase the indoor cleanliness, a part of the air flowing out from the zone 12 through the side outlet 14 is transferred to another air inlet 13.
It is better to take it in and recirculate it.

As described above, the cleaning hole device according to the present invention separates and cleans only the production line section that requires high cleanliness from the surrounding maintenance area, so compared to the conventional method shown in FIG. In addition to significantly reducing the target area, it has many advantages.

FIG. 3 shows one example of the configuration of the clean hole device 11.

This figure is a sectional view perpendicular to the longitudinal direction of the clean hole device 11, in which the support 17 and the cross beam 18 form the second zone 12a and the first zone 1.
2b is constructed, and this frame body is provided at a predetermined interval along the depth direction of the clean space, and a top plate 19 and side plates 20 on both sides are attached as partition walls to this frame body, and the interior of the building and the clean space are covered. The interior of the space 12 is isolated from the inside of the space 12 by a plane and both sides, thereby forming a clean room provided independently from the building. A zone 12 surrounded by the partition wall and the floor includes a second zone 12a where production line equipment 9 is installed and a first zone 1 through which workers pass.
21] continuously in the longitudinal direction of the zone 12, that is, the side plate 2
Set parallel to 0.

The clean air supply means 120 as an air purification means has a pressure chamber and a lower first chamber 26, a first blower 23 that supplies air in the air chamber 90 to the chamber 26, and a first chamber 26 connected to the chamber 26. It is equipped with a high-performance filter 25 and a first air discharge part 122 provided at the outlet of the first high-performance filter 25, and serves as a pressure chamber partitioned off from the chamber 26 at the upper part of the chamber 26. Second
a second blower 96 that supplies air in the air chamber 90 to the chamber 95; a second high-performance filter 24 connected to the chamber 95; and a second blower 96 provided at the outlet of the second high-performance filter 24. 2, and is provided between the second zone clean air outlet 101 provided above the second zone and the top plate 19.

The clean air blown out from the first air discharge part 122 is used for the second zone tt! provided below. j Clean air outlet 1
01 to the second zone 121), and the clean air from the second air discharge part 12/1 is connected between the top plate 19 and the LRI clean air outlet 102 for the first zone above the first zone 12a. The air is blown out from the side into the space between, changes direction within this space, and is supplied to the first zone 12a via the first zone clean air outlet 102.

In this embodiment, a working section illumination lamp 27 is provided between the first air discharge section 122 and the second zone clean air outlet 101, and the second zone clean air outlet 101 is formed in a grid shape. It functions as a light scattering plate 28 for the work section. ” These pieces of equipment are suspended and supported from the cross beam 18 by a method described later. Reference numeral 30 denotes a decorative plate that acts as a partition between the clean air outlet 101 for the second zone and the clean air outlet 102 for the first zone. An air passage is provided between the clean air outlet 102 for the first zone and the top plate 19, and a day light 22 for the first zone is housed therein, and a lattice-shaped light scattering plate 29 is installed below it. The height of the air outlet/mouth of the first zone 12b or the passage section is high enough for workers to stand and pass through, and the height of the air outlet/mouth of the second zone 12a, that is, the working area, does not interfere with work. (-For example, the height of the clean air outlet 102 for the first zone is 2.
200mm, t* for second band? ! Air outlet 101
height is 1800mm).

This is because the lower the height of the air outlet L/port 101 for the second zone, the less turbulence of the airflow in the second zone 12a, that is, the working space, and the better the cleanliness maintenance performance.

In this case, since a high-performance filter and a blower are not housed above the clean air outlet 102 for the first band,
Even if the height of the first zone clean air outlet 102 is increased, the entire top plate 19 can be kept at approximately the same height, and the overall height can be reduced. As a result, even if the ceiling of the building in which the clean room equipment is installed is low, the height of the aisle space can be set to a height that allows workers to pass through in a normal posture and that does not put pressure on the workers. This can improve work efficiency in a clean room.

By operating the blower 23, external air is passed through the prefilter 21.
The air is sucked in from the air suction port 13 through the air. Blower 23
The air sent from
Air is blown downward from the second zone 12a to the second zone 12a, and the air sent out from the second blower 96 is purified by the second high performance filter 24, and then sent from the first zone clean air outlet 102 to the first zone. 121).

The arrows in the figure indicate this air flow. Diffusing plate 28
．． 29 is provided for diffused illumination and +iI clean air flow.

In this embodiment, the air purifying means 120 is connected to the first air discharge section 1
22 and a second air discharge part 124 °C
Clean air can be supplied to both the working space 12a and the passage space 121) by installing the air layer heating means 120 on one side of the working space 12a.

Since it is supported by the frame body via the cross beams 49, the weight applied to the ceiling can be reduced.Furthermore, since the weight is applied not to the center of the ceiling but near the pillars 17, the deflection of the top plate 19 can be reduced, and the ceiling It is possible to prevent the occurrence of gaps in the parts and also to prevent the appearance of the product from being impaired.

Furthermore, since the filter 24 that supplies clean air to the passage space 121) is provided above the work space 12a,
The area above the aisle space 121] can be simply a space, and this space can be used to absorb dimensional errors during installation, and since this space is filled with clean air, installation can be done easily. Even if a gap occurs between the ceiling of the passage space 12b and the ceiling of the work space 12a, the filter 2
4 can be prevented from entering the passage space 121]. This greatly simplifies the work of sealing the ceiling, improves the workability during installation, and prevents the cleanliness of the passage space 12b from deteriorating.

The wind speed of the clean air flow is, for example, the second zone 12 which is the working part.
0.4 m/s at a, 0 at the first zone 121) which is the passage section
．． The speed is set according to the required cleanliness of each part, such as 2 m/s. By doing so, the cleanliness of the second zone 12a can be made higher than fFji1 degrees of the first zone +21-).

The clean airflow blown into the zones 12a and 12b flows as shown by the arrows in the figure, and flows out from the side outlet 14 provided at the lower part of the side plate 20 to the outside (maintenance area). Since the pressure within the zone becomes positive with respect to the outside air by the pressure loss at the side outlet 14, the inflow of contaminated air from the outside can be prevented.

The side outlet 14 is also used for drawing water, waste, etc., piping, electric wires, etc. into the production line. The side plate 20 is made partially removable using screws or hooks for repairing piping or equipment.

In addition, a part of the second side plate 20 may be made of a transparent plate in order to improve the working environment within the band and to manage work from the outside.

FIG. 4 shows the appearance of a clean room according to the present invention, which is constructed by connecting a plurality of modularized gate-shaped frames in the extending direction of the first zone and the second zone.

Fig. 5 ('! A configuration example where the production line is located on one side of the passage is shown in a cross section perpendicular to the longitudinal direction.
In the figure, the same reference numerals as in FIG. 3 indicate corresponding parts, and the outside of the point where the first band 12F) is covered by the side plate 20 is substantially the same as the configuration example in FIG. 3.4. There is no difference.

Figure 6 shows another configuration example of a work chamber with further improved cleanliness (determination performance).In this example, there is a single flow on the floor of the central passageway in the work chamber, and a crating (1) at the outlet. GRAT T
NG) 34 is installed, and the air is exhausted from three locations including the side outlet ports 14 provided at the bottom of both side plates 20. In particular, the clean airflow in the second zone 12a flows into two locations as shown by the arrows. The gap is such that dust generated from workers passing through the first zone 121 is discharged from both the floor method outlet 34 and the side outlet 14 into the second zone 1 where the production line equipment 9 is installed.
It is possible to prevent the water from flowing into 2a, thereby improving cleanliness retention performance. For this purpose, it is desirable to maintain the wind speed of the air current in the relationship: average wind speed in the first zone ≦average wind speed in the second zone. In addition, if it is necessary to increase the opening size of the side outlet 14 in order to draw in various types of piping, a soft partition cover is installed at the side outlet 14 in order to prevent the exhaust volume of the floor method outlet 34 from decreasing. 3
Attach 6 and adjust the 111 air volume. Partition cover 3
If 6 is made of a soft material such as a rubber plate, the opening dimension of the side outflow hole 140 can be partially enlarged to allow piping to pass through.

In conventional down-flow clean rooms, the entire floor is made of perforated plates, so the first zone 12 serves as a passageway space.
1) Clean air blown out may flow back through the floor of the area where work equipment that is maintained at a higher level of cleanliness is installed, and work equipment that requires a higher level of cleanliness may The installed second zone 12a may become contaminated downstream of the first zone 121, which is likely to be contaminated by workers and the like.

In addition, since the entire floor is made of a perforated plate for air to pass through, vibrations from outside the clean room, vibrations from the blower of the clean room equipment, and vibrations from other work equipment inside the clean room are transmitted to the second band 1.
There was a problem in that it was easily transmitted to the work equipment installed at 2a. This has been a big problem, especially when highly accurate work is required, such as on a semiconductor manufacturing line.

In this embodiment, the airflow shielding portion 12C has sufficient strength to place the working equipment 9 on the floor along the second zone 12a.
The floor surface along the first zone 121) is made up of a clay tink 34 as an air circulation part for the recirculated air.

Further, when a plurality of clean rooms are arranged in parallel in multiple rows as shown in FIG. 8, a second air circulation section 37 is formed on the floor between adjacent clean rooms. With this configuration, a part of the clean air supplied from the clean air supply means 120 to the second zone 12a is guided from the clay tink 3.1 to the reflux part 35, The air is returned to the clean air supply means 120 from the air circulation section 37 through the conservation area formed in each adjacent clean space. As a result, the first band 121
] The worker in the second zone 12a
The second zone 12a is located downstream of the purified air to prevent contamination of the work equipment 9, and the floor surface of the second zone 12a is strong enough to place the work equipment 9 on, ensuring high accuracy. It can be expected to perform a lot of work, and is also excellent in preventing vibrations in semiconductor manufacturing equipment that performs microfabrication.

In addition, in FIG. 6, an outer side plate 31 is further provided on the outside of the inner side plate 20, and the side return air ducts 3 and 2 connected to the side outlet 14 and the underfloor return air duct 35 constituting the recirculation part are connected to the inner side plate 20. It is formed between the outer side panels 31 and one end thereof is connected to the air chamber 90 in which the inlet of the blower 23.96 is located. Only the portion corresponding to the amount of air flowing back to the air intake port 13 through the filter 21 and supplied to the air intake port 15 from the air conditioning supply duct is released from the outlet 33 provided at the lower part of the outer side plate 31 to the outside ( (protected area). Since this system circulates most of the air locally, it is also separated from the conservation area, making it highly effective in ultra-purifying indoor air and making air conditioning more energy efficient.

FIG. 7 is a perspective view showing the appearance of the work chamber shown in FIG. 6. The structure shown in Figures 6 and 7 is the most expensive of the previous embodiments, but it still uses an expensive high-performance filter only in band 12, so compared to the all-down flow one-way type. It's cheap.

The structure shown in Fig. 8 is a modification of the structure shown in Fig. 6.7, and is very special in that the conservation area 16 between adjacent work rooms 110 is kept to a small space and this part is used as a return passage for clean air. It is something.

The clean air supplied from the clean air supply means 120 to the zone 2 forming the clean room, a negative part of it flows out to the conservation area 1G through the side outlet 14, and the remaining air flows into the first zone 1G. The air flows into the underfloor return air duct 35 through an air circulation opening 34 provided on the floor along the line 12b. A floor return air port 37 serving as a second air circulation section is formed in a portion of the underfloor return air duct 35 facing the maintenance area 16 between adjacent clean rooms. As a result, as shown in FIG. 8, the air flowing out into the conservation area 16 via the underfloor circulation duct 35 and the second air circulation part 37 and the air flowing out from the side outlet 14 into the conservation area 1G are separated from each other in the conservation area. 16, and is returned to the clean air supply means 120 (the filter and blower are not shown in this figure) provided above the work area as shown by the arrow, to maintain the balance of %a in the clean room. This makes it possible to prevent deterioration in cleanliness due to dust generated by workers, and also eliminates the need for side return air tough l-, allowing effective use of the conservation area.

According to the configuration shown in FIGS. 3 to 7, the top plate 19 can be made almost flat, so by installing the ceiling partition plate 38 between the adjacent clean rooms 11, it is possible to create a space between the top plate 19 and the ceiling of the building. The air conditioning air supply duct 7 can be easily formed, resulting in a significant reduction in duct construction costs.

The overall configuration of the clean room and the system using the same has been described above.

Next, detailed examples of improvement will be explained.

Section 9.10 [g] shows the mounting structure of a high-performance filter that was first conceived by the inventor. Since air conditioning ducts and the like are often installed above the clean room 11, it is preferable to perform maintenance such as replacing high-performance filters from inside the clean room. In FIG. 9, the second high-performance filter 27N,
The first high-performance filter 25 is attached to the filter case 42 using the mounting bracket 39, and when replacing the filter, the second band 12
a is the second band diffuser plate 28, the second band 8. ? After removing the light lamp 27, the mounting bracket 39 is removed, and the second band high performance filter 25 is taken out downward. This is a concrete example, but it has the following problems.

(1) If the high-performance filter is installed incorrectly, contaminated air leaks 40 and the cleanliness of the room decreases.

(2) Air stagnation 41 occurs around the high-performance filter, preventing the level of cleanliness from increasing, and over a long period of time, dust stagnant in this area comes out to the clean room side, impairing the level of cleanliness.

(3) The outer frame of a high-performance filter is usually made of wood, and the wood is exposed on the clean room side, which is not desirable as it becomes a source of dust.

A mounting structure for a high-performance filter that has improved these problems is shown in Figures 11 and 12. In this example, the first band, that is, the second high-performance filter 24, the second band, that is, the first high-performance filter 25, the first chamber 26, the first chamber 95, the first blower 23, and the second blower 9G are integrated. In particular, the second high-performance filter 24 has its clean air outlet connected to the first
It is provided above the first high performance filter toward the side where the band is located. In this way, the height of the first band can be made sufficiently high. The first high-performance filter 25 and the second high-performance filter 24 are each cross-section I-cedar presser frame 4
4 and attachment fittings 39 to the chamber 26 . The upstream side and downstream side (clean room side) of the high-performance filters 24, 25 are partitioned by a partition plate 46 and a decorative partition plate 30, which act as partitioning means.

However, in order to take out the holding frame 44 and the high-performance filter 24, 25 when replacing the filter, a certain gap is required between the partition plate 46 and the partition decorative board 30 and the holding frame 44. Fill the gap in the sealing backing = 15 to prevent contaminated air from leaking from this gap. In this structure, a high-performance filter 24.
Even if the position of the presser frame 44 deviates due to the tightness of the seal 25, etc., the seal backing 45 can provide an effective seal.

With this improvement, maintenance of the high-performance filter can be performed from the clean room side, resulting in the following effects.

(1) The high performance filter was installed incorrectly and the chamber 26
Even if contaminated air leaks from the gap between , - indicates a negative pressure section).

(2) Air does not stagnate in the clean area around the high-performance filter.

(3) There is no need to worry about the wooden frame of the high-performance filter being exposed to the clean room side and becoming a source of contamination.

(4) Even if a defect occurs in the sealing backing 15, clean air will simply flow into the negative pressure area around the high-performance filter, and there will be no risk of contaminated air leaking into the clean room.

Next, an example of improving the flow of clean air at the seven air outlets will be described.

In the structure first conceived by the inventor, the filter cases 42 are sequentially butted against each other in the longitudinal direction of the cleaning room device 11 and connected, as shown in FIG. In this case, the filter case 42
In order to attach the diffuser plate 28 and to reinforce the filter case itself, the peripheral edge of the air outlet is slightly bent in the horizontal direction. However, with this structure, as shown in the figure, an eddy flow 43 is generated near the connection part 11 of the filter case 42. This eddy flow entrains dust generated by the operator and causes a reduction in cleanliness. I'm worried.

In the improved example shown in FIG. 12(a), since there is no bent portion that obstructs the air flow at the air outlet circumferential edge of the presser frame 44, there is no thin air flow and the flow of clean air is improved. However, in FIG. 12(a), the slightly adjacent presser frame 4
12 (1)) and (C) show examples of improvement.

In the improvement example shown in (b), a diffusion bunching plate 47 is partially installed at the lower part of the outlet/mouth of the high-performance filter 25, and a large amount of airflow is caused to flow to the end of the outlet where the bunching plate 47 is not present.・The wind speed at the mouth is equalized.

The diffusion punching plate 47 is provided below the illuminating lamp 27 to prevent turbulence caused by the 113 bright lamp 27, and is preferably made of a material that transmits light.

In the improvement example (C), a wind direction plate 48 is installed below the outlet of the high-performance filter 25 to allow a large amount of airflow to flow toward the end of the outlet, thereby averaging the wind speed.

These improvements can prevent the generation of thin air near the end of the outlet, and furthermore make the clean airflow uniform and improve the cleanliness.

Next, examples of improvements in the mounting structure of air purification units are shown in sections 9 to 9.
This will be explained with reference to FIG. As shown in FIGS. 9 and 10, the inventor of the present invention first conceived of a structure in which the ceiling section including the filter case 42 is constructed of a sheet metal case, which is connected in the longitudinal direction. In this case, the floor surface of the building is quite uneven, so if the structure is assembled by installing pillars on the floor, the height of the ceiling part will be uneven according to the floor surface, especially when viewed from inside the building. Band diffuser plate 29 and filter case 42
There is a problem in that the front surface etc. of the product become wavy and the product quality is impaired. Therefore, in the improved example shown in FIGS. 11 and 12, the rear part of the chamber 26 is placed on the cross beam 49 of the ceiling and fixed with a metal fitting 50, and the front part on the first band side is fixed with a rotation adjustment metal fitting (turnbuckle). 51 is suspended and supported from the top plate 19.

The reason why one end of the chamber 26 is fixed to the cross beam 49 is because the suspension support alone lacks earthquake resistance and there is a risk that the suspended portion may move and be damaged during an earthquake.

According to this structure, even if the top plate 19 becomes wavy due to the unevenness of the floor surface, the rotation adjustment device 51 allows the first
Since the partition decorative plate 30 on the band side can be adjusted horizontally, and the first band diffuser plate 29 can also be adjusted horizontally, it is possible to eliminate incorrect installation of parts.

Next, an example of improvement of the diffuser plate will be explained with reference to FIG. 13. For the second band diffuser plate 28 and the first band diffuser plate 29, a grid-shaped resin molded product is usually used. In this case, if the diffuser plate is used alone, it will sag due to its own weight as shown in Figure 13(a), so it should be surrounded by a U-shaped reinforcing sash 52 as shown in Figure 13(1)). That's good. However, this structure causes the following problems. In other words, the same figure <C
As shown in >, the reinforcing sash 52 obstructs the flow.
There is a concern that a thin stream 43 will form downstream of the water, impairing cleanliness. Therefore, examples of improvement are shown in (d) to (g) of the same figure. That is, as shown in (d) and (e) I, a reinforcing plate 53, which is partially L-shaped, is attached to the upper surface of the light scattering plate 28. The details of the attachment part of the reinforcing plate 53 are as shown in (f) and (g). , the cedar portion is fixed to the upper surface of the light scattering plate 28. With this structure, only a small portion of the reinforcement degree 53 obstructs the airflow, and the thin flow is significantly reduced compared to the structures (b) and (c).

FIG. 14 shows an example of an improved diffuser plate mounting structure.

As shown in FIG.
Then, it is placed on a decorative board 30 for draining juice. The mounting hole of the receiving bracket 56 is an elongated hole, and the mounting hole of the receiving bracket 56 is set from the first position to L of the grid of the diffuser plate 28.
It can be slid left and right.

The lattice of the diffuser plate 28 is attached to the claws 57 provided on the receiving fitting 56 as shown in (a) and (1) of the same figure. If the diffuser plate shown in FIG. 13(d) is used, the airflow does not need to be obstructed. Compared to the normal diffuser plate mounting structure shown in Fig. 10, the advantage of this improved example is that, as shown in Fig. 12 (a), regardless of the dimensions of the high-performance filter, It is to be installed continuously using. In this case, slide the receiving bracket 56 over one eye on the diffuser plate).
If you keep it in the same position, you can deal with it even if the diffuser plate is in the position shown below.

FIG. 15 shows an example of improving the mounting force of the first band diffuser plate. In the assembly work of the clean room H shown in the example, a gate-shaped frame is assembled and the air purification unit l- is attached to the ceiling of the second zone, so the assembly error is reduced to the first zone in the center. I'm being forced to do something. In this case, the diffuser plate receiving portion of the partition decorative board 30 is shaped as shown in FIG. 15(a)J or (1)),
Dimensions of each part L1L2. The relationship between L, the width of the first band diffuser plate 29, and the 1st order of 1st order is determined as follows.

H) L, > 1, (2) I-2> 2, (
3) +-, +11.3< In this way, if the error in the dimension of the first band becomes large and the original diffuser plate cannot be inserted, the first cut of the grid can be made. If the diffuser plate is cut in the middle of the grid, its strength will be weakened, so it is important to be able to make one cut.

Next, an example of improvement of the illumination light mounting structure will be described.

The mounting structure of the lighting light that the name of the present invention was originally conceived is 2 in Figure 3.
2 and U27. These are all located at the outlet of a high-performance filter, so if they are in a clean room that is designed for ultra-clean air, they may obstruct the airflow or cause problems. There are some inconveniences such as dust accumulating on the -L side of the light. 16th
In the improved example shown in the figure, the straight tube-shaped illumination lamps 22 and 27 are housed in a groove-shaped illumination case 61, embedded in the partition decorative board 30 and the side plate 20, and the surface is covered with a transparent cover 59. Avoid static air outlet, high performance filter 2
5 (provided in the 9th position).This allows the necessary locking to be performed because the outlet of the high-performance filter 24, 25 is structured so that there is no source of dust generation.

The reason why the transparent case 61 is used is to measure the illuminance in the direction of illumination by internal reflection, and the case has ventilation holes 60.
1. Temperature rise can be prevented, and since the inside of the case is under negative pressure, there is no need to worry about contaminated air leaking into the clean area. Bunching plates 62 may be attached to the air outlets of the high-performance filters 24 and 245 in order to protect the high-performance filters and improve airflow distribution.

FIG. 17 shows an example of improvement regarding air volume adjustment and blower backflow prevention. In principle, clean room equipment must be operated continuously to maintain cleanliness, and since it is uneconomical to operate at full air volume during non-work hours such as at night, it is recommended to stop the partial blower and adjust the lighting. desirable.

In this case, if some of the blowers are stopped with the structure shown in Fig. 11, the air from the stopped blowers will flow backward L5, and the loss will be large, making it impossible to obtain the specified air volume, iFt i? There is a serious problem that the temperature decreases.

In the improved example shown in FIG. 17, a tamper 63 is provided at each outlet of the blower 23, and the tamper 63 opens and closes around the fulcrum shaft 64.
The damper 63 is placed in the open state shown in FIG.
The rotational force of the spring (or spring) 65 causes the closed state shown in (1) in the same figure, thereby preventing backflow of air. Also, damper 6
If the opening angle of 3 is made smaller than 90 degrees as shown in the same figure (a), even if the blower 23 is installed off-center, the damper 63 will act as a wind direction plate. , the air volume distribution within the chamber 26 can be made uniform.

Next, we will explain an example of improving the connection structure of the air conditioning air supply duct.6 When controlling the temperature in the clean room, as shown in FIG. It is preferable to connect the air conditioning air supply tact 7 to the air inlet 15 provided separately, and to supply power from the air UfJ device 66 to the air chamber 90 where the air suction port of the blower 23 is open. The supply air amount control damper 68 is a supply air blower 69 of the air conditioner, and the 70 is a ventilation blower. However, in this structure, the amount of air supply into the clean room device 11 is controlled by opening and closing the power supply amount control tamper 67. At the same time, the amount of return air from the air inlet 13 of the air chamber 90 also changes.
The pressure loss at the pre-filter 21 changes, and as a result, the first,
There is a concern that the pressure within the second zones 12b and 12a will fluctuate greatly.

Fluctuations in the pressure inside the zones 12a and 12b in this way are a major hindrance to maintaining a high level of cleanliness within the zones, so in the improvement example shown in Figure 19.20, the air Eliminate inlet 15, no turn air; A population 13
The opening of the air conditioning air supply duct 7 is provided inside the flange 71 or 72 provided surrounding the air conditioner, and the conditioned air is blown out near the return air inlet 1:3. With this configuration, the return air inlet 13 can suck in a certain amount of air in the vicinity, so the pressure loss due to the prefilter 21 is constant regardless of whether the damper 67 is opened or closed, and the air is supplied from the air conditioner 66. Even if the amount of conditioned air changes, the amount of air ζJ passing through the pre-filter 21 remains constant. In this case, since the amount of air sucked into the pre-filter 21 is larger than the amount of air supplied by the air conditioner, the entire amount of air supplied from the air conditioner is sucked. With this improvement, pressure fluctuations within the zones 12a and 12b can be reduced, and compared to the structure shown in Fig. 18, the air conditioning supply air duct and the air chamber 90 are not rigidly connected, so during construction, Problems such as mismatching dimensions of duct connections are also reduced.

FIG. 21 shows a modification of the clean room apparatus of the present invention.

In this modification, a pressure chamber 73 is provided above the working area 12a of the clean room device 11. The pressure chamber 73 has a first high-performance filter 25 on its lower surface that supplies clean air toward the working area 12a, and on its side surface] I! ! Road area]
2 +) A second unit that supplies 1 Ifi purified air towards
A high-performance filter 24 is provided, and the blower is installed outside a partition wall that separates the inside and outside of the clean room. In this modification, the pressure chamber 73 is formed in a duct shape and is provided so as to pass through a plurality of connected gate-shaped frames, and one end of the pressure chamber 73 is connected to a main blower 74 provided outside the clean room H 11. The main blower 74 is connected to the air outlet and is configured to supply air to the entire clean room apparatus 11 using one main blower 74 . In this modification, the second high-performance filter 24 that supplies clean air to the passage area 121 is provided on the side of the pressure chamber 73, so the indoor height of the passage area can be increased and the overall height of the clean room device can be kept low. This allows the clean room system to be installed even in buildings with low ceiling heights. Furthermore, by providing a suction duct 75 from the ceiling and connecting it to the main blower 74, it is possible to maintain a negative pressure around the high-performance filters 24, 25.

The main blower 74 does not necessarily have to supply air to the entire clean room equipment 1, and the pressure chamber 7 main blower 74
may be provided. According to this modification, since the main blower is provided outside the clean room, the noise value within the zones 12a and 12b can be reduced.

Furthermore, the weight of the air purification unit can be reduced, and if a large-capacity blower is used as the main blower, it is more efficient than using a large number of small-capacity small-sized blowers, resulting in energy savings. Furthermore, there is no need to install an air conditioning air supply duct around the clean room.

FIG. 22 also shows another modification of the clean room apparatus. In this modification, the clean room apparatus is made into a unit for each module, and it is possible to connect and disconnect the clean room apparatus. caster 76,
The adjuster 77 is for facilitating movement, but unless it is something that is moved all the time, it may be transported by another method only when moving. When converting into a unit in this way, recent semiconductor manufacturing equipment is often designed with basic dimensions determined and n times the basic dimensions, so the module dimensions of the clean room equipment are also based on the basic dimensions of the semiconductor manufacturing equipment. If the dimensions are adjusted, it will be convenient to add, disconnect, and install clean rooms in case of changing, adding, or abolishing the chambers on the production line.

Furthermore, by matching the basic dimensions, troubles such as not being able to carry out maintenance work from the maintenance area due to the pillar becoming an obstacle during maintenance of semiconductor manufacturing equipment can be eliminated. Reference numeral 78 in the figure represents a unit connection hole as a coupling means.

Pass the bolt through this hole to connect both units. In this modification, the depth dimension of each gate frame is set in relation to the basic dimensions of the work equipment installed inside, and each gate frame has a pressure chamber for air purification means. The air blowers are provided independently, and the spaces on the suction side of the blower are open and communicated with each other. As a result, the area other than the outlet side of the first high-performance filter and the second high-performance filter of each gate-shaped frame becomes a negative pressure region, so that air that has not passed through the filter from the connecting part of the gate-shaped frames There is no leakage, which simplifies sealing work, especially at the connecting parts inside the clean room.

J: In addition, in areas where seals can be omitted, there is no problem of deterioration of the seal material due to aging, so reliability is improved.

〔Effect of the invention〕

According to the present invention, as configured as described above, even when a clean room device is installed inside an existing building, the height of the passage space can be increased without increasing the height direction of the clean room device. It is possible to improve the workability of the work in the clean room, and to maintain a high level of cleanliness by preventing the deterioration of cleanliness due to the inflow of contaminated air.In addition, installation is easy and equipment costs are reduced. You can get a clean room device that can be done cheaply.

[Brief explanation of the drawing]

Fig. 1 is a diagram showing a full-scale downflow type clean room which is a prior art, (a) is a cutaway plan view, (1)) is a side sectional view, and Fig. 2 is a diagram showing an example of construction of a cleaning device according to the present invention. (a) is a cutaway plan view, (1)) is a side sectional view, FIG. 3 is a sectional view perpendicular to the longitudinal direction showing an example of the configuration of the clean room apparatus of the present invention, and FIG. 4 is a perspective view showing its appearance. Fig. 5 is a sectional view perpendicular to the longitudinal direction showing another configuration example of the clean room apparatus of the present invention, and Fig. 6 is a sectional view perpendicular to the longitudinal direction of another configuration example with further improved cleanliness retention performance. 7 is a perspective view showing its appearance, and FIG. 8 is a side sectional view showing a modified construction example of the present invention.
Fig. 9 is a partially cutaway front view showing a general example of a high-performance filter structure, Fig. 10 is a cutaway side view of the same, and Fig. 11 is a partially cutaway front view showing an improved example of a high-performance filter structure. ,
Figures 12(a), (L+), and (c) are cutaway side views of the same, Figure 13 is a diagram showing a general example and an improved example of the diffuser plate, (a) is a diagram showing the diffuser plate installed state, ( 1]) is a perspective view of the diffuser plate and reinforcing sash, (C) is a cutaway side view of the same, (d) is a perspective view of the diffuser plate and reinforcing plate of an improved example, (e) is a cutaway side view of the same, (f
), (g) are detailed sectional views of the reinforcing plate attachment part, FIG. 14 is a diagram showing an improved example of the diffuser plate attachment structure, (a) is a partially cutaway front view, (b) is a partial plan view, (c ) is a perspective view 1 of the mounting part of the receiving bracket, FIGS. 15(a) and 15(b) are partially cutaway front views showing an example of an improved mounting structure of the first band diffuser plate, and FIG. 16 is an improved structure of the light removal allowance. Fig. 17 is a partially cutaway front view showing an example. Figure 17 is a diagram showing an example of improvement regarding wind ii adjustment and blower backflow prevention. (C) is a partially cutaway side view during air blowing; FIG. 18 is a cutaway front view showing an air conditioning duct connection structure; FIG. 19 is a cutaway front view showing an improved example of air conditioning duct connection (K construction); Fig. 20 is a detailed view of the air conditioning duct connection part of the improved example shown in Fig. 19, in which (a) and (C) are partially cutaway front views, (1)) and U (d) are side views, and 21 is a diagram showing a modification of the clean room H position, (a) is a cut front view, (b) is a partially cut side view, and FIG. 22 is a perspective view showing another modification of the clean room device. . 12: Clean space, 12a: Work space, 12b: Passage space, 12C: Airflow shielding part, 16: Conservation area, 17, 18: Frame, 19.20: Partition wall, 23.96: Blower, 24.2
5: High performance filter, 24: Second high performance filter, 2
5: First high performance filter, 26.95: Pressure chamber, 34
: Air circulation part, 34; First air circulation part, 35201#
? 1 (Q) (b) (C) (d) Procedural amendment (method) Heisei

Claims (1)

[Claims] 1. A production line consisting of working equipment arranged in a predetermined direction is surrounded so as to be isolated from the building space to form a clean space 12 independent from the building, and the clean space 12 is transformed into a working space 12a where the working equipment is arranged. and a passage space 12b formed in parallel to the working space 12a, and an air discharge part 122 that supplies clean air to the working space 12a from above and the passage space 12.
Air discharge part 12 that supplies clean air from the side above b
4. A clean room device characterized by comprising each of the following.