JPH02136327U - - Google Patents
Info
- Publication number
- JPH02136327U JPH02136327U JP1989044823U JP4482389U JPH02136327U JP H02136327 U JPH02136327 U JP H02136327U JP 1989044823 U JP1989044823 U JP 1989044823U JP 4482389 U JP4482389 U JP 4482389U JP H02136327 U JPH02136327 U JP H02136327U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- semiconductor substrate
- wafer holder
- wedge
- holding claws
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989044823U JPH02136327U (2) | 1989-04-17 | 1989-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989044823U JPH02136327U (2) | 1989-04-17 | 1989-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02136327U true JPH02136327U (2) | 1990-11-14 |
Family
ID=31558461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989044823U Pending JPH02136327U (2) | 1989-04-17 | 1989-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02136327U (2) |
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1989
- 1989-04-17 JP JP1989044823U patent/JPH02136327U/ja active Pending