JPH02138418U - - Google Patents
Info
- Publication number
- JPH02138418U JPH02138418U JP1989046308U JP4630889U JPH02138418U JP H02138418 U JPH02138418 U JP H02138418U JP 1989046308 U JP1989046308 U JP 1989046308U JP 4630889 U JP4630889 U JP 4630889U JP H02138418 U JPH02138418 U JP H02138418U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- exposure
- exposure area
- exhausting
- vicinity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989046308U JPH02138418U (fr) | 1989-04-21 | 1989-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989046308U JPH02138418U (fr) | 1989-04-21 | 1989-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02138418U true JPH02138418U (fr) | 1990-11-19 |
Family
ID=31561278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989046308U Pending JPH02138418U (fr) | 1989-04-21 | 1989-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02138418U (fr) |
-
1989
- 1989-04-21 JP JP1989046308U patent/JPH02138418U/ja active Pending