JPH02139062U - - Google Patents

Info

Publication number
JPH02139062U
JPH02139062U JP4803889U JP4803889U JPH02139062U JP H02139062 U JPH02139062 U JP H02139062U JP 4803889 U JP4803889 U JP 4803889U JP 4803889 U JP4803889 U JP 4803889U JP H02139062 U JPH02139062 U JP H02139062U
Authority
JP
Japan
Prior art keywords
base metal
inner peripheral
grindstone
abrasive grain
grain layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4803889U
Other languages
English (en)
Other versions
JP2516937Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989048038U priority Critical patent/JP2516937Y2/ja
Publication of JPH02139062U publication Critical patent/JPH02139062U/ja
Application granted granted Critical
Publication of JP2516937Y2 publication Critical patent/JP2516937Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Polishing Bodies And Polishing Tools (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の内周刃砥石の要部
を示す断面図、第２図ないし第５図はそれぞれ本
考案の実験例の効果を示すグラフ、第６図は一般
的な内周刃砥石の平面図、第７図は同砥石の断面
図、第８図は従来の内周刃砥石で切断されたウエ
ハの形状を示す概略図、第９図は従来の内周刃砥
石の課題解決法の一例を示す切断装置の概略図、
第１０図は上記装置によつて切断されたウエハの
形状を示す概略図である。 １０……台金、１１……砥粒層、Ｔ……台金の
内周部肉厚、Ｄ……台金の公称外径、Ｃ……砥粒
層の台金半径方向の幅。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) リング状の台金の内周に、超砥粒を分散し
    てなる砥粒層が形成された内周刃砥石において、
    前記台金の内周部の肉厚を前記外径の５０００分
    の１以下とし、かつ台金の拡張力を２３０Kgｆ／
    mm２以上としたことを特徴とする内周刃砥石。 (2) 前記砥粒層の台金半径方向の幅を１mm以下
    にしたことを特徴とする第１項記載の内周刃砥石
    。
JP1989048038U 1989-04-24 1989-04-24 内周刃砥石 Expired - Fee Related JP2516937Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989048038U JP2516937Y2 (ja) 1989-04-24 1989-04-24 内周刃砥石

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989048038U JP2516937Y2 (ja) 1989-04-24 1989-04-24 内周刃砥石

Publications (2)

Publication Number Publication Date
JPH02139062U true JPH02139062U (ja) 1990-11-20
JP2516937Y2 JP2516937Y2 (ja) 1996-11-13

Family

ID=31564500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989048038U Expired - Fee Related JP2516937Y2 (ja) 1989-04-24 1989-04-24 内周刃砥石

Country Status (1)

Country Link
JP (1) JP2516937Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63172563U (ja) * 1987-04-28 1988-11-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63172563U (ja) * 1987-04-28 1988-11-09

Also Published As

Publication number Publication date
JP2516937Y2 (ja) 1996-11-13

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees