JPH02140948A - Vacuum processor - Google Patents

Abstract

PURPOSE:To perform a continuous process while holding vacuum in a vacuum processing chamber by forming a preparation chamber to be openable with the atmosphere by an atmosphere valve, and providing conveying means for conveying a material to be processed between the preparation chamber and the processing chamber in the preparation chamber, and conveying means for conveying a material to be processed between the preparation chamber and an exterior. CONSTITUTION:A processed material is removed in the atmosphere in a state that a preparation chamber 2 is in an atmospheric pressure state, and an unprocessed material to be processed is conveyed from the atmosphere into the chamber 2. After the conveyance, a breather valve 4 is closed to evacuate in vacuum the chamber 2. Then, a partition valve 3 is opened, the processed material in a vacuum processing chamber 1 is conveyed from the chamber 1 into the chamber 2, and the unprocessed material is conveyed from the chamber 2 into the chamber 1. Thereafter, the valve 3 is closed, the valve 4 is opened to open the chamber 3 with the atmosphere, the material to be processed in the chamber 2 is removed into the atmosphere, and the unprocessed material is conveyed from the atmosphere into the chamber 3. Thus, a vacuum processing can be continuously conducted whole always holding the chamber 1 in vacuum.

Description

[Detailed Description of the Invention] [Objective of the Invention] (Industrial Field of Application) The present invention is applicable to semiconductor manufacturing equipment, various display devices such as liquid crystal devices, thermal recording heads, thick AM chips, optical discs, and other high-density devices. Various types of recording media, etc.
It relates to vacuum processing equipment, typified by manufacturing equipment.

(Prior Art) Vacuum processing apparatuses such as etching apparatuses for semiconductor wafers, sputtering apparatuses, and low-pressure CVD apparatuses are classified into batch type and load-lock type.

Batch-type vacuum processing equipment is equipped with one vacuum processing chamber, and after opening the vacuum processing chamber to atmospheric pressure, the workpiece is taken out and mounted, and then the vacuum processing chamber is evacuated and the vacuum process is performed. This is what we do. In addition, the load rotor type vacuum processing equipment has two preparation chambers for one vacuum processing chamber, and the processing chamber and preparation chamber are separated by two gate valves, and the two preparation chambers and the atmosphere are separated from each other by two gate valves. Separated by two atmospheric valves.

(Problem to be solved by 5fe Ming) The above-mentioned batch type vacuum processing apparatus has the drawback of poor takt time because it takes time to evacuation.

Further, the load-lock type vacuum processing apparatus has the disadvantage that the apparatus configuration is complicated and expensive, and the area required for installing the apparatus is large.

The present invention was made in consideration of the above circumstances, and allows continuous processing while keeping the vacuum processing chamber in a vacuum, has a simple and inexpensive device configuration, and has a small area required for installing the device. The purpose is to provide less vacuum processing equipment.

(Structure of the Invention) (Means for Solving the Problems) The vacuum processing apparatus according to the present invention includes a vacuum processing chamber that is always kept in a vacuum, and a preparation chamber that is installed adjacent to the vacuum processing chamber via a gate valve. The preparation chamber is configured to be able to be opened to the atmosphere by an atmospheric valve, and the preparation chamber is provided with a transport means for transporting the processed material between the preparation chamber and the vacuum processing chamber, and a means for transporting the processing material between the preparation chamber and the outside. and conveying means for conveying the objects to be processed.

(Function) While the preparation chamber is at atmospheric pressure, the processed material in the process flow is taken out into the atmosphere, and the unprocessed material is brought into the preparation chamber from the atmosphere. The loading air valve is moved 1m away to create a vacuum in the preparation chamber, and then the gate valve is activated to transport the processed objects in the vacuum processing chamber from the vacuum processing chamber to the preparation chamber, and to remove unprocessed objects. Transport from the preparation room into the vacuum processing chamber. Thereafter, the gate valve is closed, the atmosphere valve is opened to open the preparation chamber to the atmosphere, and the objects to be processed in the preparation chamber are taken out into the atmosphere, and the unprocessed objects are brought into the preparation chamber from the atmosphere.

In this way, vacuum processing can be performed continuously while the vacuum processing chamber is always maintained in a vacuum state.

(Example) Embodiments of the present invention will be described with reference to the accompanying drawings.

FIG. 1 is a sectional view showing a first embodiment of a vacuum processing apparatus according to the present invention. This figure shows the vacuum processing equipment viewed from above, and is equipped with a vacuum processing chamber 1 that is constantly maintained in a vacuum.
A quasi-Ia chamber 2 is installed adjacent to the vacuum processing chamber 1.

A partition P3 that can be sealed is provided between the vacuum processing chamber 1 and the preparation chamber 2. On one side of the preparation room 2 is 'f
! ! An atmospheric valve 4 that can be closed and opened to the atmosphere is provided.

The preparation room 2 includes a transport means 5 for transporting the workpiece between the preparation room 2 and the vacuum processing chamber 1, and a transport means 5 for transporting the workpiece between the preparation room 2 and the external atmosphere opening table 6. A conveyance means 7 is provided. The conveying means 5 is provided with a swivel arm 8 rotatable about a fulcrum 9 attached to the floor of the preparation room 2, and a hand 10 is provided at the tip of the swivel arm 8.

The conveying means 7 is similarly provided with a turning arm 11, a fulcrum 12, and a hand 13.

Next, the operation of the above embodiment will be explained with reference to FIG.

In FIG. 2, the hatched areas are in a vacuum state, and the unhatched areas are at atmospheric pressure.

First, the preparation chamber 2 is brought to atmospheric pressure, the atmospheric valve 4 is opened, and the object to be processed is carried into the preparation chamber 2 (FIG. 2(A)). next,
Close the atmospheric valve 4 and evacuate the preparation room 2 (same (B))
). When the inside of the semi-N room 2 is evacuated, the gate valve 3 is closed,
The object to be processed is carried into the processing chamber 1 by the transport means 5 (
Same (C)).

Next, the gate valve 3 is closed, and processing of the object to be processed in the processing chamber 1 is started. On the other hand, after the preparation chamber 2 is returned to atmospheric pressure, the atmospheric pressure valve 4 is turned on, and the opening of the object to be processed next is carried into the semi-@ chamber 2 ((D)).

Thereafter, the atmospheric valve 4 is closed, the preparation chamber 2 is evacuated, and the processing of the object to be processed in the processing chamber 1 is completed (
Same (E)). Preparation chamber 2 is evacuated, and processing chamber 1
When the processing of the object to be processed in the processing chamber 1 is completed, the gate valve 3 is opened, and the object to be processed in the processing chamber 1 is carried out to the preparation room 2 by the conveying means 7 (F)). The opening of the object to be processed is carried into the processing chamber 1 ((G)).

Next, the gate valve 3 is closed and processing of the object to be processed in the vacuum processing chamber 1 is started. Meanwhile, the inside of the preparation room 2 is returned to atmospheric pressure, and the processed material A is carried out into the atmosphere.
Next, the objects to be processed are carried into the ItA room 2 ((H)). Then, the atmospheric valve 4 is closed, the interior of the preparation chamber 2 is evacuated, and the processing of the object to be processed is completed (see (I)
).

In the states shown in Fig. 2 (1) and (E), one object is being sent, but the other conditions are the same, and below (E) in Fig. 2
Steps from (1) to (1) are repeated to process the objects one after another. During this time, the workpieces in the atmosphere are carried into the vacuum processing chamber 1 via the preparation room 2, and the workpieces in the vacuum processing chamber 1 are carried out into the atmosphere via the preparation room 2 in parallel. Furthermore, the vacuum processing chamber 1 can be continuously maintained while being kept in a vacuum state.

As described above, according to the above embodiment, it is possible to perform continuous processing in the single preparation chamber 2 while maintaining the vacuum processing chamber 1 in a vacuum, and it is inexpensive and reduces the area required for equipment setup. It is possible to provide a vacuum processing apparatus with less In addition, the unprocessed material supply device and the processed material storage device are connected to S! Since the vacuum processing equipment can be arranged side by side in front of the equipment, it is possible to provide a vacuum processing equipment that is compact in equipment downtime and easy to use.

FIG. 3 shows a second embodiment of the present invention, which is equipped with conveying means 5A and 7Δ consisting of a four-bar rotating chain. That is, the conveyance means 5A is a link 17. which is rotatable around a fulcrum 15.16 formed on the floor of the preparation room 2A as a fixed link. ．． Links 21 are rotatably connected to the tips of 18 via fulcrums 19 and 20, respectively.
A hand 22 is provided at one end.

Similarly, the transport means 7A also has fulcrums 23; 24, 25.2
6, links 27, 28, 29, and a hand 30 are provided.

FIG. 4 shows a third embodiment of the present invention, in which the conveying means 5
B consists of a four-node rotating chain as in the second embodiment, with fulcrum 3
1.32, 33, 34, links 35, 36, 37, and a hand 38 are provided. This conveying means 5B is the vacuum processing chamber 1
This is used for transportation between B and preparation room 2B, and costs F ¥ (!1
A transport means for transporting between the 5th room 2B and the atmosphere opening table 6B is provided on the ceiling of the preparation room 2B (not shown).

FIG. 5 shows a fourth embodiment of the present invention, in which the conveying means 7
C consists of a five-node rotation chain. In other words, the prefecture [-^ Total 2C
Links 43 and 44 that are rotatable around fulcrums 41 and 42 are respectively provided on a support plate 40 provided on the floor of the
The link 43 is rotatably connected to a link 46 via a fulcrum 45, and this link 46 is rotatably connected to a link 48 via a fulcrum 47. On the other hand, the tip of the link 44 is rotatably connected to a link 48 via a fulcrum 40, and a hand 50 is integrally or integrally provided with the link 48.

FIG. 6 is a poly perspective view of the conveying means 7C. Support plate 4
0 is equipped with a motor 51 as a drive source,
This rotational force of Tanabata is transmitted via the rotation transmission mechanism 52 to the rotation shaft 53.54 which transmits rotation to each link 43.44. This transport means 7c, i is used to transport between the preparation chamber 20 and the outside, and is used to transport between the Aa chamber 2C and the vacuum processing chamber 1.
Carry out transportation between C and .

As shown in FIG. 7, the conveying means 5C is mounted on the ceiling 56 of the preparation room 2C.The conveying means 5C is similarly composed of a five-joint rotating chain, with supporting points 57, 58 degrees, 59 degrees, 60 degrees.
61. Links 62, 63, 64, 65 and a hand 66 are provided. Furthermore, a motor 67 as a drive source and a rotation transmission mechanism 68 for transmitting rotation to the links 62 and 63 are provided at the upper part of the top 1 [56].

These second to fourth embodiments also have the same effects as the first embodiment.

FIG. 8 is a longitudinal cross-sectional view, not showing the fifth embodiment of the present invention. In this embodiment, no gate valve is provided, and the vacuum processing chamber 1D and the preparation chamber 2D are partitioned off by a tray 70 that is carried in from the atmosphere together with the objects to be processed.

The unprocessed workpiece is transferred to the vacuum processing chamber 1D by the conveyance means 5D.
It is conveyed onto the bushing 71 directly below the bushing, and then the bushing 71 is raised to perform vacuum processing. ID,! : Separates from preparation room 2D. As soon as the processing is completed, the pusher V71 descends and transfers the processed object from above the pusher 71 to the transport means 6D.
Transported by. In this embodiment, the conveying means 5D, 6D
Although the workpieces are not directly transported into and out of the vacuum processing chamber 1D from the preparation chamber 2D, the workpieces are moved between the vacuum processing chamber 1D and the preparation chamber 2D by the assembly operation with the pusher 71. Carrying in and out.

In this case, after carrying in the most fusuma workpiece, a tray on which no workpiece is placed is carried in, and when the first workpiece is brought in, a tray that has already partitioned the vacuum processing chamber 1D and the preparation room 2D is used. In the explanation of the operation of the first embodiment, during this process, the gate valve 3 is closed when the push button 117 is
1 is raised and the gate valve 3 is open.
Corresponding to the state in which the button is lowered, the workpiece can be transported in the same manner as in the first embodiment, and the preparation chamber 2D and the vacuum processing chamber 1D can be partitioned by raising and lowering the bushing 71. It has the same effect as the first embodiment. In addition, the code C,
The opening does not show the object to be processed placed on the tray 70.

In addition, in the first to fifth embodiments, the preparation chambers 2.28 to 2D are
It is possible to transport the workpiece to the vacuum processing chambers 1.18 to 1D via the transport means 7.7A to 7D. ,2
Although it is possible to convey it to the atmosphere through A to 2D, the same effects can be obtained even if a conveying means different from the conveying means shown in these examples is used.

(Effects of the Invention) The vacuum processing apparatus according to the present invention includes a vacuum processing chamber that is always maintained at a vacuum, and a preparation chamber that is installed adjacent to this vacuum processing chamber via a gate valve, and the preparation chamber is connected to the atmosphere. The preparation room is configured to be openable to the atmosphere with a valve, and the preparation room is equipped with a transport means for transporting the workpiece between the preparation room and the vacuum processing chamber, and a transport means for transporting the workpiece between the preparation room and the outside. To provide a vacuum processing device which is equipped with a conveying means, enables continuous processing while keeping a vacuum processing chamber in a vacuum, has a simple and inexpensive device configuration, and requires a small area for installing the device. Can be done.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing the first embodiment of the vacuum processing apparatus according to the present invention, FIG. 2 (A> to N is a diagram showing the operation of the above embodiment, and FIGS. 6 and 7 are perspective views showing the conveying means in the fourth embodiment of the invention, and FIG. 8 shows the fifth embodiment of the invention. It is a vertical cross-sectional view. 1... Vacuum processing chamber, 2... Preparation room, 3... Gate valve, 4... Atmospheric valve, 5... Transfer means, 6... Atmospheric opening table.

Claims (1)

[Claims] It is equipped with a vacuum processing chamber that is always maintained in a vacuum state, and a preparation chamber that is installed adjacent to the vacuum processing chamber via a gate valve, and the preparation chamber is formed so that it can be opened to the atmosphere by means of an atmospheric valve.
The preparation room is characterized by being equipped with a transport means for transporting the workpiece between the preparation room and the vacuum processing chamber, and a transport means for transporting the workpiece between the preparation room and the outside. vacuum processing equipment.