JPH02140969U - - Google Patents
Info
- Publication number
- JPH02140969U JPH02140969U JP4645589U JP4645589U JPH02140969U JP H02140969 U JPH02140969 U JP H02140969U JP 4645589 U JP4645589 U JP 4645589U JP 4645589 U JP4645589 U JP 4645589U JP H02140969 U JPH02140969 U JP H02140969U
- Authority
- JP
- Japan
- Prior art keywords
- center
- annular rail
- fixed
- around
- rotation shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 238000005096 rolling process Methods 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
図面は本考案の実施例を示し、第１図は真空蒸
着装置の全体構成を示す縦断面図、第２図はプラ
ネタリ治具と環状レールとの関係を示す平面図で
ある。
１……蒸着槽、３……環状レール、４……プラ
ネタリ治具、５……基板ホルダー、１１……セン
タメンバ、１２……固定アーム、１４……回動ア
ーム、１７……ローラ。
The drawings show an embodiment of the present invention, and FIG. 1 is a longitudinal cross-sectional view showing the overall configuration of a vacuum evaporation apparatus, and FIG. 2 is a plan view showing the relationship between a planetary jig and an annular rail. DESCRIPTION OF SYMBOLS 1... Vapor deposition tank, 3... Annular rail, 4... Planetary jig, 5... Substrate holder, 11... Center member, 12... Fixed arm, 14... Rotating arm, 17... Roller.
Claims (1)
を有し、蒸着槽内に略水平に設けられた環状レー
ルに支持されて、上記基板ホルダーを環状レール
の中心まわりに公転させながら、各基板ホルダー
を自転させるためのプラネタリ治具であつて、 上記環状レールの中心位置に配設され、上記環
状レールの中心まわりに回転するセンタメンバと
、 上記センタメンバよりそれぞれ放射方向に突出
した４本以上のアームと、 上記各アームの先端に回転自在に支持され、上
記基板ホルダーが固定された自転軸と、 上記自転軸に固定され、上記環状レールの上を
転動して基板ホルダーを公転せしめるとともに自
転せしめるローラと、 を備え、 上記４本以上のアームのうちの３本のアームは
センタメンバに固定され、他のアームはセンタメ
ンバに上下回動自在に連結されていて、センタメ
ンバに固定された３本のアームのローラによりプ
ラネタリ治具の荷重を支えるようにしたことを特
徴とする蒸着装置用プラネタリ治具。[Claim for Utility Model Registration] It has four or more substrate holders for holding substrates, is supported by an annular rail provided approximately horizontally in the vapor deposition tank, and the substrate holder is held around the center of the annular rail. The planetary jig is for rotating each board holder while revolving around the center of the ring, and includes a center member that is arranged at the center of the annular rail and rotates around the center of the annular rail, and a planetary jig that rotates each board holder around the center of the annular rail. four or more arms protruding in the direction; a rotation shaft rotatably supported at the tip of each arm and to which the substrate holder is fixed; and a rotation shaft fixed to the rotation shaft and rolling on the annular rail. a roller that causes the substrate holder to revolve and rotate on its own axis; three of the four or more arms are fixed to the center member, and the other arms are connected to the center member so as to be movable up and down. A planetary jig for a vapor deposition apparatus, characterized in that the load of the planetary jig is supported by three arm rollers fixed to a center member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4645589U JPH0718757Y2 (en) | 1989-04-20 | 1989-04-20 | Planetary jig for vapor deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4645589U JPH0718757Y2 (en) | 1989-04-20 | 1989-04-20 | Planetary jig for vapor deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02140969U true JPH02140969U (en) | 1990-11-26 |
| JPH0718757Y2 JPH0718757Y2 (en) | 1995-05-01 |
Family
ID=31561550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4645589U Expired - Lifetime JPH0718757Y2 (en) | 1989-04-20 | 1989-04-20 | Planetary jig for vapor deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0718757Y2 (en) |
-
1989
- 1989-04-20 JP JP4645589U patent/JPH0718757Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0718757Y2 (en) | 1995-05-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |